公开(公告)号：US11029465B1

公开(公告)日：2021-06-08

申请号：US16832023

申请日：2020-03-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Steven M. Shank

IPC: G02B6/28 ,  G02B6/293 ,  G02B6/02

Abstract: One illustrative device disclosed herein includes a micro-ring modulator that comprises an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring. The device also includes an upper bus waveguide that is positioned vertically above at least a portion of the doped waveguide ring and at least a portion of the outer ring.

公开(公告)号：US10996398B1

公开(公告)日：2021-05-04

申请号：US16703356

申请日：2019-12-04

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/27 ,  G02B6/12 ,  G02B27/28 ,  G02F1/313

Abstract: Structures for a polarization splitter and methods of fabricating a structure for a polarization splitter. First and second waveguide cores of the polarization splitter are located adjacent to each other in a coupling region. A third waveguide core is located over the second waveguide core in the coupling region. The third waveguide core is composed of a material having a variable refractive index.

公开(公告)号：US20210124117A1

公开(公告)日：2021-04-29

申请号：US16663696

申请日：2019-10-25

Applicant: GLOBALFOUNDRIES U.S. Inc. ,  KHALIFA UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Sujith Chandran ,  Marcus Dahlem

IPC: G02B6/125 ,  G02B6/122 ,  G02B6/12

Abstract: Structures for a waveguide crossing and methods of fabricating a structure for a waveguide crossing. A waveguide crossing includes a central section and an arm positioned between a waveguide core and the central section. The arm and the waveguide core are aligned along a longitudinal axis. The arm is coupled to the waveguide core at a first interface, and the arm is coupled to a portion of the central section at a second interface. The arm has a first width at the first interface, a second width at the second interface, and a third width between the first interface and the second interface. The third width is greater than either the first width or the second width.

公开(公告)号：US20210109384A1

公开(公告)日：2021-04-15

申请号：US16868631

申请日：2020-05-07

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/025 ,  G02F1/035

Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. The electro-optic modulator has a layer stack arranged over a section of a waveguide core. The layer stack includes a first layer, a second layer, and a third layer. The first layer, the second layer, and the third layer are each composed of either copper or indium-tin oxide.

公开(公告)号：US12276835B2

公开(公告)日：2025-04-15

申请号：US18073144

申请日：2022-12-01

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/122 ,  G02B6/124 ,  G02B6/13 ,  G02B6/12

Abstract: Structures for an optical component, such as an optical reflector or an Echelle grating, and methods of forming such structures. The structure comprises a first waveguide core positioned in a vertical direction over a semiconductor substrate. The first waveguide core includes a tapered section and a plurality of segments separated by a plurality of gaps. A second waveguide core, which is positioned in the vertical direction relative to the first waveguide core, includes a portion positioned adjacent to the first waveguide core.

公开(公告)号：US20250085491A1

公开(公告)日：2025-03-13

申请号：US18243701

申请日：2023-09-08

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Theodore Letavic ,  Kenneth J. Giewont ,  Kevin Dezfulian ,  Koushik Ramachandran

IPC: G02B6/42 ,  G02B6/02

Abstract: Photonic structures including multiple input/output optical couplers and methods of forming such photonic structures. The photonic structure comprises a light source and a photonics chip including a semiconductor substrate. The photonic structure further comprises a first mirror disposed at a first height relative to a top surface of the semiconductor substrate and a second mirror disposed at a second height relative to the top surface of the semiconductor substrate. The first mirror is configured to reflect first light from the light source to the photonics chip, and the second mirror is configured to reflect second light from the light source to the photonics chip. The first mirror is disposed between the second mirror and the light source, and the second height is different from the first height.

公开(公告)号：US12248177B2

公开(公告)日：2025-03-11

申请号：US17869858

申请日：2022-07-21

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B6/125 ,  G02B6/136 ,  G02B6/12

Abstract: Structures for a waveguide crossing and methods of fabricating a structure for a waveguide crossing. The structure comprises a first waveguide core and a second waveguide core each including a first section, a second section, and a first waveguide bend connecting the first section to the second section. The second section terminates the first waveguide core. The second section terminates the second waveguide core. The second waveguide bend has a side surface that is spaced from a side surface of the first waveguide bend by a gap. A third waveguide core is terminated by a section having an overlapping arrangement with the second section of the first waveguide core. A fourth waveguide core is terminated by a section having an overlapping arrangement with the second section of the second waveguide core.

公开(公告)号：US12210135B2

公开(公告)日：2025-01-28

申请号：US17991160

申请日：2022-11-21

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian

IPC: G02B1/00 ,  G02B6/122 ,  G02B6/125 ,  G02B6/13

Abstract: Structures for an optical component, such as a polarization splitter rotator, and methods of forming such structures. The structure comprises a waveguide core positioned in a vertical direction over a substrate, and a metamaterial structure positioned in a lateral direction adjacent to the waveguide core. The metamaterial structure including a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps.

公开(公告)号：US12204144B2

公开(公告)日：2025-01-21

申请号：US17525327

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Nicholas A. Polomoff ,  Yusheng Bian ,  Vibhor Jain

IPC: G01N27/04 ,  G02B6/12 ,  G02B6/122 ,  H01L23/00

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photonic chip security structure and methods of manufacture. The structure includes an optical component over a substrate material, and at least one vertical wall including a reflecting material within a dielectric stack of material and surrounding the optical component.

公开(公告)号：US12174420B2

公开(公告)日：2024-12-24

申请号：US18384921

申请日：2023-10-30

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Hemant Dixit ,  Theodore Letavic

IPC: G02B6/122 ,  G02B1/00 ,  G02B6/13 ,  G02B6/30 ,  G02B6/12

Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes an optical component having a waveguide core, and multiple features positioned adjacent to the waveguide core. The waveguide core contains a first material having a first thermal conductivity, and the features contain a second material having a second thermal conductivity that is greater than the first thermal conductivity.