摘要:
The current invention relates to a semiconductor wafer heater assembly having a frosted clear quartz material for the wafer susceptor (6) that is placed between the heater (8) and the wafer (7) such that at certain wavelengths of the emitted radiant energy from the heater (8), the frosted clear quartz material is ‘thermally transmissive’ to the thermal radiation from the infrared region. The heater assembly is characterized in that the top quartz plate or susceptor (6) on which the wafer (7) is supported is made of a material that is not “optically transmissive” but is more than 90% “thermally transmissive” to infrared emission that is shorter than 3.5 micrometer wavelength and having higher tolerance and mechanical strength than conventional clear quartz material.
摘要:
A heater has a smooth heating surface and a recess formed on a second surface opposite to the heating surface. The recess is formed between opposite side walls in a lengthwise direction of the heater. Formation of the recess improves the electrical resistance of the heater and the opposite side walls reinforce the heater and prevent deformation of the heater when it is subjected to high temperatures in a semiconductor wafer processing device. The heater has substantially the same width along its lengthwise direction. This improves the control of heat pattern design, because the terminal end portions do not have an expanded shape.
摘要:
The present invention relates to a process for producing a soy sauce koji having a reduced Busho-shu which is one of the unpleasant smells of soy sauce, and a soy sauce koji having a reduced Busho-shu obtained by this production process. Specifically, the process for producing a soy sauce koji is characterized by using a combination of a koji mold having a high isobutyric acid productivity and another koji mold having a low isobutyric acid productivity. The present invention also relates to a process for producing a soy sauce having a reduced Busho-shu and a soy sauce obtained by this production process.
摘要:
An assembly is provided for regulating the temperature of and supporting a heating target such as semiconductor substrate or a metal/ceramic mold or other industrial processes that require temperature regulations such as degassing or annealing. In one embodiment, the assembly comprises a heating target support for supporting the heating target ; a ceramic heating element for heating the heating target to a temperature of at least 300° C.; a first thermally conductive layer disposed between the substrate support and the ceramic heating layer; a second layer disposed below the ceramic heating layer. Both the first layer and the second layer in the heater assembly have an elastic modulus of less than 5 GPa, for biasing the ceramic heating layer without causing damage to the ceramic layer while still providing uniform and excellent heating to the substrate.
摘要:
In accordance with the registration contents of the divided mail table, the control unit determines whether to handle each mail section as one electronic mail or to handle all the interrelated mail sections as one compiled electronic mail and executes a processing in accordance with the determination, when the mail sections are deleted, returned or transferred, after the mail sections are received by a portable phone and stored in the mail memory.
摘要:
An annular endless belt includes, as an outermost later thereof, a release layer containing a fluororesin and having an outer surface formed of a molded surface; a support layer as an innermost layer thereof; and an elastic layer disposed between the outermost layer and the innermost layer. A method of manufacturing the endless belt includes the steps of coating a release layer on an inner circumferential surface of an annular molding die; baking the release layer at a given temperature; coating an elastic layer; baking the elastic layer at a given temperature; coating a support layer; baking the support layer at a given temperature, and separating the endless belt from the molding die.
摘要:
A light-receiving element, comprises an absorption layer formed on a semiconductor substrate, a window layer formed on the absorption layer, a first electrode formed on the window layer, a second electrode formed on the window layer and electrically connected to the first electrode, and a diffusion region which is formed in the absorption layer and the window layer and is formed between the first electrode and the substrate and between the second electrode and the substrate.
摘要:
A multi-cylinder swash-plate-type compressor having a combined cylinder block closed on both axial ends by front and rear housings and provided therein with a reciprocative piston mechanism for sucking, compressing, and discharging a fluid, such as a refrigerant gas. The combined cylinder block is provided with a mounting bracket on the outer circumference thereof and suction and discharge ports formed in the outer circumference at positions adjacent to the mounting bracket. The compressor further has damping chambers arranged adjacent to the suction and discharge ports for suppressing pulsation in suction and discharge pressures of the refrigerant gas during the operation of the compressor. The damping chambers have considerable volumes and cross-sectional area.
摘要:
In a color separation prism system for a color television camera, a bias light source is located at a position substantially displaced from one or the other of the two intersections of (i) a plane including the optical axis of the taking lens of the camera and perpendicular to the plane including the optical axes of the three color light beams incident to the pick up tubes and (ii) the two parallel edges of a prism block formed by the entrance face thereof to which the light from the taking lens of the camera is incident and the upper and lower parallel faces of the prism block parallel to the plane including the optical axes of the three color light beams. The color separation prism system is particularly suitable for use in a system in which the refractive index of the glass constituting the prism blocks is as high as 1.7.