公开(公告)号：US4698158A

公开(公告)日：1987-10-06

申请号：US902069

申请日：1986-08-27

申请人： Masahiro Fujii ,  Minoru Kamada ,  Shigeharu Matsubara

发明人： Masahiro Fujii ,  Minoru Kamada ,  Shigeharu Matsubara

IPC分类号： C02F3/00 ,  C02F3/12 ,  C02F3/34

CPC分类号： C02F3/1231 ,  C02F3/006 ,  C02F3/12 ,  C02F3/34 ,  Y02W10/15

摘要： A process for activated sludge treatment of industrial wastewaters which uses, in the aeration tank of an activated sludge treatment plant, at least one member of the group consisting of phytic acid, phytate salts and materials containing the same, as well as at least one other phosphorus-containing compound.

摘要翻译： 一种用于工业废水的活性污泥处理方法，其在活性污泥处理装置的曝气池中使用至少一种由植酸，植酸盐和含有它们的物质组成的组中的至少一种，以及至少一种 含磷化合物。

公开(公告)号：US08136925B2

公开(公告)日：2012-03-20

申请号：US12819057

申请日：2010-06-18

申请人： Yoshifumi Hano ,  Masahiro Fujii

发明人： Yoshifumi Hano ,  Masahiro Fujii

IPC分类号： B41J2/04

CPC分类号： B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14411 ,  Y10T29/49002

摘要： To allow formation of an insulation film to be applied even to a glass substrate without depending on a substrate material so as to improve pressure generated by an electrostatic actuator, as well as to achieve improvement in driving stability and driving durability of the electrostatic actuator at a low cost. An electrostatic actuator including an individual electrode formed on a substrate, a vibration plate arranged opposite to the individual electrode via a predetermined gap and a driving means for causing a displacement of the vibration plate by generating an electrostatic force between the individual electrode and the vibration plate includes an insulation film provided on one or both of opposing surfaces of the fixed electrode and the movable electrode and a surface protection film provided on the insulation film. The surface protection film is made of a hard ceramic film or a hard carbon film.

摘要翻译： 为了允许形成即使施加到玻璃基板上的绝缘膜而不依赖于基板材料，从而改善由静电致动器产生的压力，并且可以实现静电致动器的驱动稳定性和驱动耐久性的提高 低成本。 一种静电致动器，包括形成在基板上的单独电极，经由预定间隙与单独电极相对设置的振动板和驱动装置，用于通过在各个电极和振动板之间产生静电力而引起振动板的位移 包括设置在固定电极和可动电极的相对表面的一个或两个上的绝缘膜和设置在绝缘膜上的表面保护膜。 表面保护膜由硬质陶瓷膜或硬碳膜制成。

公开(公告)号：US08087754B2

公开(公告)日：2012-01-03

申请号：US12537501

申请日：2009-08-07

申请人： Yoshifumi Hano ,  Masahiro Fujii

发明人： Yoshifumi Hano ,  Masahiro Fujii

IPC分类号： B41J2/045 ,  B41J2/055

CPC分类号： G02B26/001 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/14411 ,  G02B26/0841

摘要： To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm 4, an individual electrode 11 facing the diaphragm 4 with a gap 10 therebetween, while a voltage is applied between the diaphragm 4 and the individual electrode 11, and an insulating film 4a which is disposed on a surface of the diaphragm 4, the surface facing the individual electrode 11, are included, wherein the insulating film 4a is converted to an electret.

摘要翻译： 提供能够通过低压驱动获得大的隔膜位移的静电致动器。 此外，设置有设置有该静电致动器的液滴喷射头，用于驱动液滴喷射头的方法以及静电致动器的制造方法。 隔膜4是隔膜4和独立电极11之间施加电压的隔膜4，面对隔膜4的单独电极11，隔膜4设置在隔膜4的表面上的绝缘膜4a， 包括面对单个电极11的表面，其中绝缘膜4a被转换成驻极体。

公开(公告)号：US08083328B2

公开(公告)日：2011-12-27

申请号：US11970186

申请日：2008-01-07

申请人： Koji Kitahara ,  Motoki Itoda ,  Masahiro Fujii ,  Yoshifumi Hano

发明人： Koji Kitahara ,  Motoki Itoda ,  Masahiro Fujii ,  Yoshifumi Hano

IPC分类号： B41J2/045

CPC分类号： B41J2/14314 ,  B41J2/16 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2002/14411 ,  B41J2202/03 ,  C23C16/40 ,  H02N1/004

摘要： An electrostatic actuator comprises: a fixed electrode formed on a substrate; a movable electrode placed at an position opposing the fixed electrode via a predetermined gap; a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode: and an insulation film made of HfxAlyOz formed on an opposing surface of at least one of the fixed electrode and the movable electrode.

摘要翻译： 静电致动器包括：形成在基板上的固定电极; 可动电极经由预定间隙设置在与固定电极相对的位置; 驱动单元，通过在固定电极和可动电极之间产生静电力来给可动电极施加位移;以及由固定电极和可动电极中的至少一个的相对表面上形成的由Hf x Al y O z z构成的绝缘膜。

公开(公告)号：US20060125879A1

公开(公告)日：2006-06-15

申请号：US11295818

申请日：2005-12-07

申请人： Masahiro Fujii ,  Katsuji Arakawa

发明人： Masahiro Fujii ,  Katsuji Arakawa

IPC分类号： B41J2/04

CPC分类号： B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1626

摘要： To provide an electrostatic actuator that generates high pressure under a given voltage and includes an insulating film exhibiting excellent insulation resistance, a droplet discharge head that includes the electrostatic actuator and a method for manufacturing the droplet discharge head, a droplet discharge apparatus that includes the droplet discharge head and has excellent printing performance, and a device that includes the electrostatic actuator and has excellent driving performance. A diaphragm 12, a counter electrode 17 opposite to the diaphragm 12 with a gap interposed therebetween, and an insulating film 16 on a surface of the diaphragm 12 opposite to the counter electrode 17 are included. The insulating film 16 includes at least a dielectric film 16a formed of a substance having a higher relative dielectric constant than silicon oxide.

摘要翻译： 为了提供在给定电压下产生高压的静电致动器，并且包括具有优异的绝缘电阻的绝缘膜，包括静电致动器的液滴喷射头和用于制造液滴喷射头的方法，包括液滴的液滴喷射装置 排出头，具有优异的印刷性能，以及包括静电致动器并且具有优异的驱动性能的装置。 膜片12，与隔膜12相对的间隔相对的对置电极17以及与对置电极17相反的隔膜12的表面上的绝缘膜16。 绝缘膜16至少包括由具有比氧化硅更高的相对介电常数的物质形成的电介质膜16a。

公开(公告)号：US20060101858A1

公开(公告)日：2006-05-18

申请号：US10541965

申请日：2004-01-08

申请人： Masahiro Fujii

发明人： Masahiro Fujii

IPC分类号： C03B33/037

CPC分类号： C03B33/091 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/0011

摘要： Along a region where a scribe line is formed on a surface of a glass substrate 50, a laser spot is continuously applied for heating at a temperature lower than a softening point of the glass substrate 50, and a region in the vicinity of the heated region is cooled. In this manner, a blind crack is formed along a line to be scribed. A detection unit 40 applies light to the blind crack, immediately after formed in the vicinity of to a cooling spot, through an optical fiber 41. When the blind crack has been formed, part of the light is obtained in the optical fiber 41 because of diffuse reflection. Therefore, detection of the level of this reflected light allows checking as to whether the blind crack has been normally formed or not.

摘要翻译： 沿着在玻璃基板50的表面上形成刻划线的区域，在低于玻璃基板50的软化点的温度下，连续施加激光点加热，加热区域附近的区域 被冷却。 以这种方式，沿着要刻划的线形成盲目的裂纹。 检测单元40通过光纤41在形成于冷却点附近之后立即向盲孔施加光。当形成盲目的裂纹时，由于光纤41中的一部分光被获得 漫反射。 因此，检测该反射光的电平允许检查盲孔是否正常形成。

公开(公告)号：US06989513B2

公开(公告)日：2006-01-24

申请号：US10465842

申请日：2003-06-20

申请人： Katsuji Arakawa ,  Masahiro Fujii ,  Hiroshi Koeda

发明人： Katsuji Arakawa ,  Masahiro Fujii ,  Hiroshi Koeda

IPC分类号： H05B3/10

CPC分类号： H05B3/148

摘要： A stable and durable heat-generating element and substrate, a method of efficient and highly precise manufacture of same, and equipment utilizing same are obtained. Employing as material a silicon substrate into at least a portion of which boron or another impurity is diffused to impart conductivity, a heater portion, in which are provided one or a plurality of slits the corner portions of which are removed or are rounded, is fabricated integrally on the silicon substrate by etching processes. Simultaneously with this, a depression portion provided below to control the heating state of the heater portion is formed integrally.

摘要翻译： 获得稳定且耐用的发热元件和基板，其高效且高精度制造的方法以及利用其的设备。 将作为材料的硅衬底作为其至少一部分硼或另一杂质扩散以赋予导电性的材料，加热器部分设置有一个或多个切口，其角部被去除或被倒圆形， 通过蚀刻工艺一体地在硅衬底上。 与此同时，下面设置的用于控制加热器部分的加热状态的凹部形成为一体。

公开(公告)号：US06450625B1

公开(公告)日：2002-09-17

申请号：US09424163

申请日：2000-02-29

申请人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

发明人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

IPC分类号： B41J2045

CPC分类号： B41J2/1626 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/164 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14411 ,  B41J2202/03 ,  Y10T29/42

摘要： An electrostatic ink-jet head (1) in which the present invention is applied comprises a pressure chamber (6) communicating with an ink nozzle (21), and an atmospheric pressure chamber (12) opened to the atmosphere, with a vibrating plate (5) being provided on the base plane of the pressure chamber (6). Voltage applied between the vibrating plate (5) and an electrode (43) causes the vibrating plate (5) to vibrate due to electrostatic force, thereby discharging ink droplets. A vibrating chamber (41) communicates with a pressure compensating chamber (49), and a displacement plate (16) capable of being displaced in the direction outward from the plane according to fluctuations in the external, atmospheric pressure is formed at the base plane of the pressure compensating chamber (49). Displacement of the displacement plate (16) increases/decreases the volume of the pressure compensating chamber (49), and the internal pressure of the vibrating chambers (41) communicating thereof is adjusted to match the external atmospheric pressure. Accordingly, the vibration properties of the vibrating plate (5) can be maintained constant even when the external atmospheric pressure fluctuates, and proper ink droplet discharging action can be maintained.

摘要翻译： 应用本发明的静电喷墨头（1）包括与油墨喷嘴（21）连通的压力室（6）和向大气开放的大气压室（12），振动板 5）设置在压力室（6）的基面上。 施加在振动板（5）和电极（43）之间的电压使得振动板（5）由于静电力而振动，从而排出墨滴。 振动室（41）与压力补偿室（49）连通，并且能够根据外部大气压力的波动从平面向外的方向位移的位移板（16）形成在 压力补偿室（49）。 位移板（16）的位移增加/减小了压力补偿室（49）的体积，并且调节与其连通的振动室（41）的内部压力以匹配外部大气压力。 因此，即使外部大气压力波动，也能够使振动板（5）的振动特性保持恒定，能够维持适当的墨滴排出动作。

公开(公告)号：US06410107B2

公开(公告)日：2002-06-25

申请号：US09727090

申请日：2000-11-30

申请人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

发明人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

IPC分类号： B05D512

CPC分类号： B41J2/1632 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03

摘要： Methods for manufacturing an electrostatic actuator that comprises electrode members having opposing surfaces with a gap disposed therebetween. In an ink jet head, a bottom surface of a diaphragm may be one of the electrodes (common electrode) of an eletrostatic actuator, the diaphragm forming a wall of an ink chamber in the ink jet head that is displaced relatively by an electrostatic force. A hydrophobic film, preferably hexamethyldisilazane (HMDS), is formed on at least one of the opposing electrode surfaces to improve the durability of the electrostatic actuator so that electrostatic attraction between opposing electrode members does not decrease and the opposing electrode members do not stick together. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.

摘要翻译： 一种制造静电致动器的方法，该静电致动器包括具有设置在其间的间隙的具有相对表面的电极构件。 在喷墨头中，隔膜的底表面可以是静电致动器的电极（公共电极）之一，隔膜形成喷墨头中相对于静电力移动的墨室的壁。 在至少一个相对电极表面上形成疏水膜，优选六甲基二硅氮烷（HMDS），以提高静电致动器的耐久性，使得相对电极部件之间的静电吸引力不会降低，并且相对的电极部件不会粘在一起。 HMDS分子小于PFDA分子，因此即使在相对电极之间的间隙窄的情况下也可形成均匀的，无变化的疏水膜。 HMDS疏水膜的耐久性和膜稳定性也很高。 因此，可以实现具有高耐久性和操作稳定性的静电致动器。

公开(公告)号：US06375858B1

公开(公告)日：2002-04-23

申请号：US09423788

申请日：2000-01-05

申请人： Tomohiro Makigaki ,  Taro Takekoshi ,  Masahiro Fujii ,  Koji Kitahara ,  Seiichi Fujita

发明人： Tomohiro Makigaki ,  Taro Takekoshi ,  Masahiro Fujii ,  Koji Kitahara ,  Seiichi Fujita

IPC分类号： B41J204

CPC分类号： B41J2/1629 ,  B41J2/16 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1635 ,  B41J2002/043 ,  B41J2002/14387 ,  B41J2002/14411

摘要： When a nozzle 21 with a stepwise cross-section, which is provided with a small cross-sectional nozzle portion 21a formed on the front side thereof and with a large cross-sectional nozzle portion 21b formed on the rear side thereof in a discharge direction, respectively, is formed by applying etching to a silicon wafer 200 for forming a nozzle plate 2, a resist film 210 is formed on a surface 200a of the silicon wafer 200, and patterning by half-etching and patterning by full-etching is applied to the resist film 210. Next, anisotropic-dry-etching is applied to the silicon wafer 200 by ICP discharge, thereby forming grooves at the full-etched portions. Next, the resist film at the half-etched portions is removed and anisotropic-dry-etching is applied to the portions from which the resist film is removed by ICP discharge. As a result, there can be simply formed on a monocrystalline silicon substrate an ink nozzle having a stepwise cross-section and further having an action, which is larger than that of a conventional ink nozzle, for aligning the directions of pressures applied from cavities to nozzles in a nozzle axis direction.

摘要翻译： 当具有形成在其前侧上的小截面喷嘴部分21a和在排放方向上形成在其后侧上的大截面喷嘴部分21b的具有逐级横截面的喷嘴21时， 分别通过对用于形成喷嘴板2的硅晶片200进行蚀刻而形成，在硅晶片200的表面200a上形成抗蚀剂膜210，并且通过半蚀刻和通过全蚀刻进行图案化的图案被应用于 抗蚀剂膜210.接下来，通过ICP放电对硅晶片200施加各向异性干法蚀刻，从而在全蚀刻部分形成槽。 接下来，去除半蚀刻部分的抗蚀剂膜，并且通过ICP放电将抗蚀剂膜除去的部分施加各向异性干蚀刻。 结果，可以简单地在单晶硅衬底上形成具有逐步横截面并且还具有大于常规油墨喷嘴的作用的墨喷嘴，用于将从腔施加的压力的方向对准 喷嘴沿喷嘴轴线方向。