公开(公告)号：US07940385B2

公开(公告)日：2011-05-10

申请号：US12153853

申请日：2008-05-27

申请人： Akira Hamamatsu ,  Hisae Shibuya ,  Shunji Maeda

发明人： Akira Hamamatsu ,  Hisae Shibuya ,  Shunji Maeda

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N2021/8822

摘要： In a defect inspection apparatus for performing an inspection with an optical system, the dimension of a defect is measured substantially concurrently with detection of the defect. In order to promote the accuracy of measurement of the defect dimension, a correction unit is provided which corrects the defect dimension by using a standard sample such as a standard particle.

摘要翻译： 在用光学系统进行检查的缺陷检查装置中，在检测到缺陷的同时测量缺陷的尺寸。 为了提高缺陷尺寸的测量精度，提供了通过使用诸如标准颗粒的标准样品来校正缺陷尺寸的校正单元。

公开(公告)号：US07912276B2

公开(公告)日：2011-03-22

申请号：US12755453

申请日：2010-04-07

申请人： Hisae Shibuya ,  Akira Hamamatsu ,  Yuji Takagi

发明人： Hisae Shibuya ,  Akira Hamamatsu ,  Yuji Takagi

IPC分类号： G06K9/00 ,  G06K9/62

CPC分类号： G06K9/6221 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/8854 ,  G01N2021/95676

摘要： With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefor, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.

摘要翻译： 为了在短时间内实现缺陷种类训练，目的在于教导检查薄膜装置的检测缺陷的分类条件，根据本发明的一个方面，提供一种目视检查方法， 其装置包括以下步骤：基于由光学或电子缺陷检测装置获取的检查图像检测缺陷，同时计算缺陷的特征; 并根据预先设定的分类条件对缺陷进行分类，其中所述分类条件设置步骤还包括以下步骤：从缺陷检测步骤预先获取的大量缺陷中收集缺陷特征; 基于收集的缺陷特征分布在大量缺陷上的采样缺陷; 并根据检查采样缺陷的结果设置缺陷分类条件。

公开(公告)号：US20080317329A1

公开(公告)日：2008-12-25

申请号：US12141947

申请日：2008-06-19

申请人： Hisae Shibuya ,  Shunji Maeda

发明人： Hisae Shibuya ,  Shunji Maeda

IPC分类号： G06K9/78

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： An image feature is calculated based on the image of a detected defect, a coordinate feature is calculated based on position coordinates of the detected defect, and false alarm judgment is performed according to a decision tree constructed by threshold processing to the image feature or the coordinate feature.

摘要翻译： 基于检测到的缺陷的图像计算图像特征，基于检测到的缺陷的位置坐标来计算坐标特征，并根据对图像特征或坐标的阈值处理构成的判定树进行虚假警报判断 特征。

公开(公告)号：US20130282336A1

公开(公告)日：2013-10-24

申请号：US13976147

申请日：2011-11-22

申请人： Shunji Maeda ,  Hisae Shibuya ,  Hiroyuki Magara

发明人： Shunji Maeda ,  Hisae Shibuya ,  Hiroyuki Magara

IPC分类号： G05B23/02

CPC分类号： G05B23/02 ,  G05B23/0229

摘要： In order to provide a facility of a plant or the like with an anomaly detection/diagnosis method and an anomaly detection/diagnosis system which are capable of detecting an anomaly of the facility with a high degree of sensitivity at an early time, pieces of maintenance-history information composed of past examples such as a work history and information on replaced parts are associated in advance with each other by the appearance frequency (context) of a keyword and, on the basis of anomaly detection making use of signals output by a multi-dimensional sensor installed in the facility as an object, the detected anomaly is linked to the pieces of maintenance-history information which are associated with each other. Thus, at a point of time prediction is detected, it is possible to give a relationship with a countermeasure such as a replacement of a part, an adjustment or a restart.

摘要翻译： 为了提供具有异常检测/诊断方法和异常检测/诊断系统的设备的设备，其能够在早期以高灵敏度检测设备的异常，维护 由诸如工作历史和替换部件的信息组成的历史信息通过关键字的出现频率（上下文）相互关联，并且基于使用多重输出的信号的异常检测 作为对象安装在设备中的三维传感器，检测到的异常与彼此相关联的维护历史信息链接。 因此，在检测到时间点的情况下，可以提供与部件的更换，调整或重启等对策的关系。

公开(公告)号：US20130107247A1

公开(公告)日：2013-05-02

申请号：US13672742

申请日：2012-11-09

申请人： Akira Hamamatsu ,  Yoshimasa Oshima ,  Shunji Maeda ,  Hisae Shibuya ,  Yuta Urano ,  Toshiyuki Nakao ,  Shigenobu Maruyama

发明人： Akira Hamamatsu ,  Yoshimasa Oshima ,  Shunji Maeda ,  Hisae Shibuya ,  Yuta Urano ,  Toshiyuki Nakao ,  Shigenobu Maruyama

IPC分类号： G01B11/30

CPC分类号： G01B11/303 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501

摘要： An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison.

摘要翻译： 用于检查基板表面的检查方法和装置包括将光照射到具有膜的基板表面，从基板表面的多个位置检测散射光或反射光以获得多个电信号， 多个电信号和指示电信号和表面粗糙度之间的关系的数据库，以及基于比较结果的表面粗糙度值的计算。

公开(公告)号：US20120290497A1

公开(公告)日：2012-11-15

申请号：US13574314

申请日：2010-11-25

申请人： Hiroyuki Magara ,  Shunji Maeda ,  Hisae Shibuya

发明人： Hiroyuki Magara ,  Shunji Maeda ,  Hisae Shibuya

IPC分类号： G06Q10/00

CPC分类号： G06Q10/00

摘要： In the failure diagnosis system of the present invention, the maintenance case information including data ambiguity and a partially deficient portion is utilized even in the case where maintenance case information having a high similarity is not sufficiently provided. The failure diagnosis system is provided with: a failure diagnosis rule creation unit 31 which, by utilizing maintenance case information accumulated in the past, creates a failure diagnosis rule used for listing up candidates of maintenance parts required for recovering the equipment from a failure phenomenon; a failure diagnosis execution unit 32 which, upon occurrence of a failure, outputs the candidates of maintenance parts required for recovering from the failure phenomenon to a maintenance work assist terminal with reference to the failure diagnosis rule; and a failure diagnosis rule updating unit 33 for updating the failure diagnosis rule, and the failure diagnosis rule creation unit 31 has a factor-information link creation unit, which creates links among pieces of factor information composed of pieces of information relating to the failure phenomenon, information relating to the subject component, and information relating to the corresponding treatment in the maintenance case information accumulated in the past.

摘要翻译： 在本发明的故障诊断系统中，即使在没有充分提供具有高相似度的维护案例信息的情况下，也利用包括数据模糊性和部分缺陷部分的维护案例信息。 故障诊断系统具备：故障诊断规则生成部31，利用过去累积的维护案例信息，创建故障诊断规则，用于从故障现象列出恢复设备所需的维护部件的候补; 故障诊断执行单元32，在故障发生时，参照故障诊断规则将从故障现象中恢复所需的维护部件的候补输出到维护作业辅助终端; 故障诊断规则更新单元33用于更新故障诊断规则，故障诊断规则创建单元31具有因素信息链接创建单元，该单元创建由与故障现象相关的信息组成的因素信息之间的链接 与主题部分有关的信息，以及与过去积累的维护案例信息中的对应处理有关的信息。

公开(公告)号：US20120166142A1

公开(公告)日：2012-06-28

申请号：US13384463

申请日：2010-06-16

申请人： Shunji Maeda ,  Hisae Shibuya

发明人： Shunji Maeda ,  Hisae Shibuya

IPC分类号： G06F15/00

CPC分类号： G05B23/0227 ,  G06K9/00536 ,  G06K9/6251

摘要： Provided is an anomaly detection method and system capable of constructing determination condition rules of anomaly detection from case-based anomaly detection by way of multivariate analysis of a multi-dimensional sensor signal, applying the rules to design-based anomaly detection of individual sensor signals, and also appropriately executing setting and control of threshold values for highly sensitive, early, and clearly visible detection of anomalies. Anomaly detection on the basis of a case base by way of multivariate analysis controls design-based anomaly detection. That is to say, (1) anomaly detection on the basis of a case base performs selection of sensor signals and anomaly detection according to various types of anomalies. Specifically, anomaly detection (characteristic conversion), evaluation of level of effect of each signal, construction of determination conditions (rules), and display and selection of sensor signals corresponding to the anomaly are performed. (2) Design-based anomaly detection for individual sensor signals performs anomaly detection after the above have been performed. Specifically, setting and control of thresholds, display of thresholds, and anomaly detection and display are performed.

摘要翻译： 提供了一种异常检测方法和系统，其能够通过多维传感器信号的多元分析来构建基于病例的异常检测的异常检测的判定条件规则，将规则应用于各个传感器信号的基于设计的异常检测， 并且还适当地执行阈值的设置和控制，以便高度敏感，早期和清晰地检测异常。 在多变量分析的基础上进行异常检测，控制基于设计的异常检测。 也就是说，（1）基于病例库的异常检测，根据各种异常进行传感器信号的选择和异常检测。 具体地说，进行异常检测（特征变换），各信号的效果评价，确定条件（规则）的构成以及对应于异常的传感器信号的显示和选择。 （2）单个传感器信号的基于设计的异常检测在执行上述之后进行异常检测。 具体地，执行阈值的设置和控制，阈值的显示以及异常检测和显示。

公开(公告)号：US08149396B2

公开(公告)日：2012-04-03

申请号：US13099530

申请日：2011-05-03

申请人： Akira Hamamatsu ,  Hisae Shibuya ,  Shunji Maeda

发明人： Akira Hamamatsu ,  Hisae Shibuya ,  Shunji Maeda

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N2021/8822

摘要： A defect inspection apparatus for inspecting defects on an inspecting object includes an illuminator which irradiates a beam of light on the inspecting object, a photo-detector which detects rays of light from the inspecting object due to the irradiation of the light beam by the illuminator, a defect detector which detects a defect by processing a signal obtained through detection by the photo-detector, a characteristic quantity calculator which calculates a characteristic quantity related to a size of the defect, and a defect size calculator which uses a relation between size and characteristic quantity which is calculated by an optical simulation and calculates a size of the detected defect.

摘要翻译： 用于检查检查对象的缺陷的缺陷检查装置包括：在检查对象物上照射光束的照明器，由于照射器照射光束而检测来自被检查物体的光的光检测器， 缺陷检测器，其通过处理通过光检测器的检测获得的信号来检测缺陷;计算与缺陷的尺寸相关的特征量的特征量计算器;以及使用尺寸和特性之间的关系的缺陷尺寸计算器 通过光学模拟计算的量，并计算检测到的缺陷的尺寸。

公开(公告)号：US08116556B2

公开(公告)日：2012-02-14

申请号：US12888286

申请日：2010-09-22

申请人： Hisae Shibuya ,  Yuji Takagi

发明人： Hisae Shibuya ,  Yuji Takagi

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： In a process for manufacturing a semiconductor wafer, defect distribution state analysis is performed so as to facilitate identification of the defect cause including a device cause and a process cause by classifying the defect distribution state according to the defect position coordinates detected by the inspection device, into one of the distribution characteristic categories: repeated defects, clustered defects, arc-shaped regional defects, radial regional defects, line type regional defects, ring and blob type regional defects, and random defects.

摘要翻译： 在制造半导体晶片的过程中，进行缺陷分布状态分析，以便根据由检查装置检测到的缺陷位置坐标来分类缺陷分布状态，便于识别包括装置原因和处理原因的缺陷原因， 成为分布特征类别之一：反复缺陷，聚类缺陷，弧形区域缺陷，径向区域缺陷，线型区域缺陷，环型和Blob型区域缺陷以及随机缺陷。

公开(公告)号：US08027527B2

公开(公告)日：2011-09-27

申请号：US11472368

申请日：2006-06-22

申请人： Hisae Shibuya ,  Yuji Takagi

发明人： Hisae Shibuya ,  Yuji Takagi

IPC分类号： G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501 ,  G06T7/0006 ,  G06T7/001 ,  G06T2207/30148

摘要： The distribution states of defects are analyzed on the basis of the coordinates of defects detected by an inspection apparatus to classify them into a distribution feature category, or any one of repetitive defect, congestion defect, linear distribution defect, ring/lump distribution defect and random defect. In the manufacturing process for semiconductor substrates, defect distribution states are analyzed on the basis of defect data detected by an inspection apparatus, thereby specifying the cause of defect in apparatus or process.