公开(公告)号：US08042560B2

公开(公告)日：2011-10-25

申请号：US12219312

申请日：2008-07-18

申请人： Norihiro Ito

发明人： Norihiro Ito

IPC分类号： B08B3/00

CPC分类号： H01L21/68728 ,  H01L21/67051

摘要： A substrate processing apparatus includes a rotary cup disposed outside a substrate holding member to surround a substrate held on the substrate holding member and to rotate along with the substrate holding member, and having a wall portion that receives a process liquid thrown off from the substrate being rotated. Further, this apparatus includes an exhaust and drain cup disposed outside the rotary cup to surround the rotary cup and the substrate holding member, and including an annular liquid receptacle that receives the process liquid thrown off from the substrate being rotated and an inner annular space formed on an inward side from the annular liquid receptacle. An exhaust mechanism is connected to the inner annular space of the exhaust and drain cup.

摘要翻译： 一种基板处理装置，包括设置在基板保持部件的外侧的旋转杯，以围绕保持在基板保持部件上的基板，并且与基板保持部件一起旋转，并且具有容纳从基板排出的处理液体的壁部， 旋转 此外，该装置包括设置在旋转杯外部以围绕旋转杯和基板保持构件的排气和排水杯，并且包括环形液体容器，其接收从旋转的基板排出的处理液体和形成的内部环形空间 在环形液体容器的内侧。 排气机构连接到排气和排水杯的内部环形空间。

公开(公告)号：US20110127561A1

公开(公告)日：2011-06-02

申请号：US12737552

申请日：2009-07-27

申请人： Nobuhiro Ide ,  Norihiro Ito ,  Hiroya Tsuji ,  Yuko Matsuhisa

发明人： Nobuhiro Ide ,  Norihiro Ito ,  Hiroya Tsuji ,  Yuko Matsuhisa

IPC分类号： H01L51/52 ,  H01L51/56

CPC分类号： H01L51/5278 ,  H01L51/0051 ,  H01L51/0072 ,  H01L51/0081

摘要： [Problem] The present invention aims to provide an electroluminescence device with an improved intermediate layer, for achieving a superior durability and sustainability performance thereof.[Solution] The present invention refers to organic electroluminescence devices having a plurality of light emitting layers 4 between an anode 1 and a cathode 2 with the intermediate layer 3 being interposed between two of the light emitting layers. The intermediate layer 3 comprises one layer 3a selected from a group consisting of a charge transfer complex layer made of a charge transfer complex, a metal layer made of a metal having a work function of 3.7 eV or less, and a metal compound layer made of a compound of the metal; an electrically conductive material-containing light transmissive layer 3b; a charge transport organic material layer 3c formed of a charge transport organic material; and a hole injection material layer 3d formed of a hole injection material, which are superimposed in this order. The charge transport material layer 3c is formed to have a thickness in a range of 0.5 nm to 30 nm.

摘要翻译： 本发明旨在提供具有改进的中间层的电致发光器件，以实现其优异的耐久性和可持续性性能。 解决方案本发明涉及在阳极1和阴极2之间具有多个发光层4的有机电致发光器件，中间层3介于两个发光层之间。 中间层3包括选自由电荷转移络合物制成的电荷转移络合物层，功能为3.7eV以下的金属制金属层和金属化合物层 金属的化合物; 含导电材料的透光层3b; 由电荷输送有机材料形成的电荷输送有机材料层3c; 以及由空穴注入材料形成的空穴注入材料层3d，其依次叠加。 电荷输送材料层3c的厚度形成为0.5nm〜30nm的范围。

公开(公告)号：US20110024779A1

公开(公告)日：2011-02-03

申请号：US12673806

申请日：2008-08-25

申请人： Masahiro Nakamura ,  Takeyuki Yamaki ,  Yoshio Mitsutake ,  Masahito Yamana ,  Nobuhiro Ide ,  Norihiro Ito ,  Hiroya Tsuji

发明人： Masahiro Nakamura ,  Takeyuki Yamaki ,  Yoshio Mitsutake ,  Masahito Yamana ,  Nobuhiro Ide ,  Norihiro Ito ,  Hiroya Tsuji

IPC分类号： H01L51/50

CPC分类号： H01L51/5268 ,  B82Y20/00 ,  B82Y30/00 ,  H01L2251/5369

摘要： An organic EL device in the present invention comprises a light-transmissive substrate 1, an organic light emitting layer 2, a light-transmissive electrode 3 disposed between the light-transmissive substrate 1 and the organic light emitting layer 2, and a light guiding layer 4 which is disposed between the substrate 1 and the light-transmissive electrode 3. The light guiding layer 4 is configured to alter light direction. The organic EL device is configured to emit light from the organic light emitting layer 2, and allow the light to propagate out through said light guiding layer 4, the light-transmissive electrode 3, and the light-transmissive substrate 1. The light guiding layer 4 includes a light dispersion layer 5. The light dispersion layer 5 is formed with a light dispersion region 8 and a light-transmissive region 9, which are arranged in a coplanar relation within said light dispersion layer 5. The light dispersion region 8 contains light dispersion particles 6 and a binder resin 7. The light-transmissive region 9 contains the light dispersion particles 6 at a lower ratio than the light dispersion region 8. The organic EL device in the present invention enables to improve an overall light output by suppressing the reduction of light output in the front direction as well as increasing light output in diagonal directions.

摘要翻译： 本发明的有机EL元件包括透光性基板1，有机发光层2，配置在透光性基板1和有机发光层2之间的透光性电极3和导光层 4，其设置在基板1和透光电极3之间。导光层4被配置为改变光线方向。 有机EL器件被配置为从有机发光层2发光，并且允许光通过所述导光层4，透光电极3和透光基板1传播出去。导光层 4包括光分散层5.光分散层5形成有在所述光分散层5内以共面关系排列的光分散区域8和透光区域9.光分散区域8包含光 分散粒子6和粘合剂树脂7.透光区域9含有比分散区域8低的比例的光分散粒子6.本发明的有机EL元件能够通过抑制 在正向上减少光输出以及增加对角线方向的光输出。

公开(公告)号：US07767006B2

公开(公告)日：2010-08-03

申请号：US10581729

申请日：2004-12-16

申请人： Yoshichika Tokuno ,  Norihiro Ito ,  Takehiko Orii ,  Mitsunori Nakamori ,  Tadashi Iino ,  Hiroki Ohno ,  Yusuke Saito

发明人： Yoshichika Tokuno ,  Norihiro Ito ,  Takehiko Orii ,  Mitsunori Nakamori ,  Tadashi Iino ,  Hiroki Ohno ,  Yusuke Saito

IPC分类号： B01D59/26

CPC分类号： H01L21/68721 ,  B01D53/002 ,  B01D2257/106 ,  C01B13/10 ,  H01L21/6715 ,  H01L21/68742 ,  H01L21/68785

摘要： Water vapor is mixed to O3 gas generated by an ozone generator of discharge type. The mixed fluid is cooled by a cooler, thereby impurities such as metals and nitrogen oxides contained in the O3 gas dissolve into condensed water. Subsequently, a gas-liquid separator separates the O3 gas from the condensed water. Water vapor is mixed with the O3 gas again. The mixed fluid passes through a metal trap composed of a container containing plural silicon chips as a metal adsorbent, thereby to remove the remaining metals therefrom.

摘要翻译： 将水蒸气与由排放型臭氧发生器产生的O 3气体混合。 混合流体被冷却器冷却，从而O 3气体中所含的金属和氮氧化物等杂质溶解在冷凝水中。 随后，气液分离器将O 3气体与冷凝水分离。 水蒸汽再次与O3气体混合。 混合流体通过金属捕集器，该金属捕集器由含有多个硅芯片的容器组成，作为金属吸附剂，从而从其中除去剩余的金属。

公开(公告)号：US20090031948A1

公开(公告)日：2009-02-05

申请号：US12219312

申请日：2008-07-18

申请人： Norihiro Ito

发明人： Norihiro Ito

IPC分类号： B05C11/02 ,  B08B3/10

CPC分类号： H01L21/68728 ,  H01L21/67051

摘要： A substrate processing apparatus includes a rotary cup disposed outside a substrate holding member to surround a substrate held on the substrate holding member and to rotate along with the substrate holding member, and having a wall portion that receives a process liquid thrown off from the substrate being rotated. Further, this apparatus includes an exhaust and drain cup disposed outside the rotary cup to surround the rotary cup and the substrate holding member, and including an annular liquid receptacle that receives the process liquid thrown off from the substrate being rotated and an inner annular space formed on an inward side from the annular liquid receptacle. An exhaust mechanism is connected to the inner annular space of the exhaust and drain cup.

摘要翻译： 一种基板处理装置，包括设置在基板保持部件的外侧的旋转杯，以围绕保持在基板保持部件上的基板，并且与基板保持部件一起旋转，并且具有容纳从基板排出的处理液体的壁部， 旋转 此外，该装置包括设置在旋转杯外部以围绕旋转杯和基板保持构件的排气和排水杯，并且包括环形液体容器，其接收从旋转的基板排出的处理液体和形成的内部环形空间 在环形液体容器的内侧。 排气机构连接到排气和排水杯的内部环形空间。

公开(公告)号：US20080023049A1

公开(公告)日：2008-01-31

申请号：US11878385

申请日：2007-07-24

申请人： Kazuhisa Matsumoto ,  Satoshi Kaneko ,  Masami Akimoto ,  Takayuki Toshima ,  Norihiro Ito

发明人： Kazuhisa Matsumoto ,  Satoshi Kaneko ,  Masami Akimoto ,  Takayuki Toshima ,  Norihiro Ito

IPC分类号： B08B3/04

CPC分类号： H01L21/67051 ,  H01L21/67017 ,  H01L21/6708 ,  H01L21/67173

摘要： A liquid processing system includes a liquid processing section including liquid processing units horizontally disposed therein and each configured to perform a liquid process while supplying a process liquid onto a substrate; a process liquid storing section that stores the process liquid to be supplied to the liquid processing units of the liquid processing section; and a piping unit including a supply pipe configured to guide the process liquid from the process liquid storing section to the liquid processing units. The process liquid storing section, the piping unit, and the liquid processing section are disposed inside a common casing in this order from below. The supply pipe of the piping unit has a horizontal pipe portion horizontally extending along an array direction of the liquid processing units, such that the process liquid is supplied from the horizontal pipe portion to the liquid processing units individually.

摘要翻译： 液体处理系统包括液体处理部分，其包括水平地设置在其中的液体处理单元，并且每个液体处理部件被配置为在将处理液体供应到基板上时进行液体处理; 处理液体存储部，其存储要供给到液体处理部的液体处理单元的处理液; 以及管道单元，其包括供给管，其构造成将处理液从所述处理液储存部引导到所述液体处理单元。 处理液收容部，配管部和液处理部从下方依次配置在公共壳体的内部。 管道单元的供给管具有沿着液体处理单元的排列方向水平延伸的水平管部分，使得处理液体从水平管部分分别供应到液体处理单元。

公开(公告)号：US20070240824A1

公开(公告)日：2007-10-18

申请号：US11785351

申请日：2007-04-17

申请人： Satoshi Kaneko ,  Kazuhisa Matsumoto ,  Norihiro Ito ,  Masami Akimoto ,  Takayuki Toshima ,  Hiromitsu Nanba

发明人： Satoshi Kaneko ,  Kazuhisa Matsumoto ,  Norihiro Ito ,  Masami Akimoto ,  Takayuki Toshima ,  Hiromitsu Nanba

IPC分类号： B05C13/02 ,  B08B3/00 ,  H01L21/306

CPC分类号： H01L21/67051 ,  H01L21/6715 ,  H01L21/68728 ,  Y10S134/902

摘要： A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate and to rotate along with the substrate; a liquid supply mechanism configured to supply a process liquid onto at least a front surface of the substrate; and an exhaust/drain section configured to perform gas-exhausting and liquid-draining out of the rotary cup; and a guide member disposed to surround the substrate, having an upper surface to be substantially continued to the front surface of the substrate, and configured to rotate along with the substrate holding member and the rotary cup, such that a process liquid supplied onto the front surface of the substrate and thrown off from the substrate is guided by the upper surface of the guide member from the rotary cup to the exhaust/drain section.

摘要翻译： 一种液体处理装置，包括：基板保持部件，其被构造成与水平状态下保持的基板一起旋转; 旋转杯，其构造成围绕所述基底并与所述基底一起旋转; 液体供给机构，其构造成将处理液体供给到所述基板的至少前表面上; 以及排气/排出部，其构造成从所述旋转杯中排出并排出液体; 以及引导构件，其设置成围绕所述基板，具有基本上连续到所述基板的前表面的上表面，并且被构造成与所述基板保持构件和所述旋转杯一起旋转，使得提供到所述前面的处理液 基板的表面从基板被甩出，由引导构件的上表面从旋转杯引导到排气/排出部。