Micromachined integrated pressure sensor with oxide polysilicon cavity
sealing
    52.
    发明授权
    Micromachined integrated pressure sensor with oxide polysilicon cavity sealing 失效
    微加工集成压力传感器,具有氧化物多孔腔密封

    公开(公告)号:US5531121A

    公开(公告)日:1996-07-02

    申请号:US375040

    申请日:1995-01-19

    摘要: A method is disclosed for micromachining the surface of a silicon substrate which encompasses a minimal number of processing steps. The method involves a preferential etching process in which a chlorine plasma etch is capable of laterally etching an N+ buried layer beneath the surface of the bulk substrate. Such a method is particularly suitable for forming sensing devices which include a small micromachined element, such as a bridge, cantilevered beam, membrane, suspended mass or capacitive element, which is supported over a cavity formed in a bulk silicon substrate. The method also permits the formation of such sensing devices on the same substrate as their controlling integrated circuits. This invention also provides novel methods by which such structures can be improved, such as through optimizing the dimensional characteristics of the micromachined element or by encapsulating the micromachined element.

    摘要翻译: 公开了一种微加工硅衬底的表面的方法,其包含最少数量的处理步骤。 该方法包括优先蚀刻工艺,其中氯等离子体蚀刻能够横向蚀刻在本体衬底的表面下面的N +掩埋层。 这种方法特别适用于形成感测装置,其包括小型微加工元件,例如桥,悬臂梁,膜,悬挂质量或电容元件,其被支撑在形成于体硅衬底中的空腔上。 该方法还允许在与它们的控制集成电路相同的衬底上形成这样的感测装置。 本发明还提供了通过优化微加工元件的尺寸特性或通过封装微加工元件来改善这种结构的新方法。

    Extractive distillation of alcohol/ether/hydrocarbon mixtures
    53.
    发明授权
    Extractive distillation of alcohol/ether/hydrocarbon mixtures 失效
    醇/醚/烃混合物的萃取蒸馏

    公开(公告)号:US5160414A

    公开(公告)日:1992-11-03

    申请号:US732981

    申请日:1991-07-19

    IPC分类号: B01D3/40 C07C41/42

    CPC分类号: B01D3/40 C07C41/42

    摘要: An extractive distillation process for separation ethers (in particular methyl t-butyl ether or ethyl t-butyl ether), aliphatic hydrocarbons (in particular isobutane and/or isobutene) and alcohols (in particular methanol or ethanol) employs as solvent sulfolane(s) and/or dialkyl sulfone(s), or N-(.beta.-mercaptoalkyl)-2-pyrrolidone(s), or a mixture of N-alkyl-2-pyrrolidone(s) and either sulfolane(s) or glycol compound(s).

    摘要翻译: 用于分离醚(特别是甲基叔丁基醚或乙基叔丁基醚),脂族烃(特别是异丁烷和/或异丁烯)和醇(特别是甲醇或乙醇)的萃取蒸馏方法用作溶剂环丁砜, 和/或二烷基砜或N-(β-巯基烷基)-2-吡咯烷酮,或N-烷基-2-吡咯烷酮和环丁砜或二醇化合物(s)的混合物 )。

    Separation of olefinic hydrocarbons by extractive distillation
    54.
    发明授权
    Separation of olefinic hydrocarbons by extractive distillation 失效
    通过萃取蒸馏分离烯烃

    公开(公告)号:US5151161A

    公开(公告)日:1992-09-29

    申请号:US731686

    申请日:1991-07-17

    IPC分类号: B01D3/40 C07C7/08

    CPC分类号: B01D3/40 C07C7/08

    摘要: The separation of alkadienes from close-boiling alkenes by extractive distillation employes as solvent N-methyl-2-thiopyrrolidone, alone or in admixture with unsubstituted sulfolane (cyclotetramethylene sulfone), or a mixture of unsubstituted sulfone and N-methyl-2-pyrrolidone. The separation of cycloalkadienes from close-boiling alkadienes by extractive distillation employs N-methyl-2-thiopyrrolidone as solvent.

    摘要翻译: 通过萃取蒸馏将烯二烯与近沸点烯烃的分离单独或与未取代的环丁砜(环四亚甲基砜)或未取代的砜和N-甲基-2-吡咯烷酮的混合物一起使用作为溶剂N-甲基-2-硫代吡咯烷酮。 通过萃取蒸馏分离环烯二烯与近沸点烯二酸,采用N-甲基-2-硫代吡咯烷酮作为溶剂。

    Extractive distillation of hydrocarbon mixtures employing mixed solvent
    55.
    发明授权
    Extractive distillation of hydrocarbon mixtures employing mixed solvent 失效
    使用混合溶剂萃取蒸馏烃混合物

    公开(公告)号:US4948472A

    公开(公告)日:1990-08-14

    申请号:US378734

    申请日:1989-07-12

    IPC分类号: C07C7/08

    CPC分类号: C07C7/08

    摘要: A mixture of (a) at least one N-alkyl-2-pyrrolidone (preferably N-methyl-2-pyrrolidone) and (b) at least one glycol compound (preferably ethylene glycol or tetraethylene glycol) is used as solvent in the extractive distillation of a feed mixture of cycloalkane(s) (in particular cyclohexane) and close-boiling alkane(s).

    摘要翻译: (a)至少一种N-烷基-2-吡咯烷酮(优选N-甲基-2-吡咯烷酮)和(b)至少一种二醇化合物(优选乙二醇或四甘醇)的混合物用作萃取物中的溶剂 蒸馏环烷烃(特别是环己烷)和近沸点烷烃的进料混合物。

    Limb protective coverings
    57.
    发明授权
    Limb protective coverings 失效
    肢体保护层

    公开(公告)号:US4530350A

    公开(公告)日:1985-07-23

    申请号:US592216

    申请日:1984-03-22

    IPC分类号: A61F15/00 A61F13/00

    摘要: A limb protective covering is provided having a tubular sleeve of plastic and an integral hand or foot receiving member and an elongate closure strap heat sealed along a transverse line intermediate its ends to the sleeve, and having an overlying stabilizing loop over the closure strap at the heat sealed line.

    摘要翻译: 提供了一种四肢保护罩,其具有塑料的管状套筒和一体的手或脚接收构件以及沿其横向线热封密封的细长的封闭带,其中心部分在其端部处于套筒之间,并且在封闭带上具有覆盖稳定环 热封线。

    Limb protective coverings
    58.
    发明授权
    Limb protective coverings 失效
    肢体保护层

    公开(公告)号:US4254765A

    公开(公告)日:1981-03-10

    申请号:US67338

    申请日:1979-08-17

    IPC分类号: A61F15/00 A61F13/00

    CPC分类号: A61F15/004

    摘要: A limb protective covering is provided having a tubular sleeve of plastic and an integral hand or foot receiving member and an elongate closure strap having a panel intermediate its ends fastened to the sleeve by fastening to an inner rigidifying panel with the sleeve sandwiched between.

    摘要翻译: 提供了一种肢体保护罩,其具有塑料的管状套筒和一体的手或脚接收构件和细长的封闭带,其具有在其两个夹套之间通过紧固到内部硬化板的端部而紧固在套筒上的面板。