Defect inspection method, defect inspection apparatus having a mounting table with a substrate thereon and an image pickup device are relatively moved for capturing the image of the substrate, and computer readable storage medium storing a program for performing the method
    51.
    发明授权
    Defect inspection method, defect inspection apparatus having a mounting table with a substrate thereon and an image pickup device are relatively moved for capturing the image of the substrate, and computer readable storage medium storing a program for performing the method 有权
    相对移动缺陷检查方法,具有其上具有基板的安装台和图像拾取装置的缺陷检查装置用于捕获基板的图像,以及存储用于执行该方法的程序的计算机可读存储介质

    公开(公告)号:US07652276B2

    公开(公告)日:2010-01-26

    申请号:US11698049

    申请日:2007-01-26

    IPC分类号: G01N21/86

    CPC分类号: G01N21/9501

    摘要: In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.

    摘要翻译: 在本发明中,通过驱动单元的驱动移动的图像拾取装置在安装台上拾取基板的图像。 驱动单元由来自第一控制器的驱动信号控制。 输出到第一控制器的驱动信号也输出到第二控制器,使得第二控制器基于驱动信号控制图像拾取装置。 图像拾取装置本身的移动与图像拾取装置的图像拾取同步。 根据本发明,当安装基板的安装台和图像拾取装置相对移动以捕获基板的图像时,可以捕获没有图像失真的精确图像以进行精确的检查。

    Heat radiation structure of semiconductor element and heat sink
    52.
    发明授权
    Heat radiation structure of semiconductor element and heat sink 有权
    半导体元件和散热片的散热结构

    公开(公告)号:US07365425B2

    公开(公告)日:2008-04-29

    申请号:US11008157

    申请日:2004-12-10

    申请人: Makoto Hayakawa

    发明人: Makoto Hayakawa

    IPC分类号: H01L23/34

    摘要: According to a heat radiation structure of a semiconductor element of the invention, by providing a recess for a thermal conductive sheet on the bottom surface of a mounting seat of a heat sink, disposing the thermal conductive sheet in this recess, and screwing a source electrode of a power FET on the bottom surface of the mounting seat of the heat sink, it is possible to efficiently radiate the heat generated by the semiconductor element without damaging semiconductor chips in the interior of the semiconductor element and without deteriorating electrical properties.

    摘要翻译: 根据本发明的半导体元件的散热结构,通过在散热器的安装座的底面上设置用于导热片的凹部,将导热片设置在该凹部中,并且将源电极 在散热器的安装座的底表面上的功率FET的场合,可以有效地辐射由半导体元件产生的热量,而不会损坏半导体元件内部的半导体芯片,而不会劣化电气性能。

    Defect inspection method, defect inspection apparatus, and computer readable storage medium
    53.
    发明申请
    Defect inspection method, defect inspection apparatus, and computer readable storage medium 有权
    缺陷检查方法,缺陷检查装置和计算机可读存储介质

    公开(公告)号:US20070188832A1

    公开(公告)日:2007-08-16

    申请号:US11698049

    申请日:2007-01-26

    IPC分类号: H04N1/00

    CPC分类号: G01N21/9501

    摘要: In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.

    摘要翻译: 在本发明中,通过驱动单元的驱动移动的图像拾取装置在安装台上拾取基板的图像。 驱动单元由来自第一控制器的驱动信号控制。 输出到第一控制器的驱动信号也输出到第二控制器,使得第二控制器基于驱动信号控制图像拾取装置。 图像拾取装置本身的移动与图像拾取装置的图像拾取同步。 根据本发明,当安装基板的安装台和图像拾取装置相对移动以捕获基板的图像时,可以捕获没有图像失真的精确图像以进行精确的检查。

    Submarine apparatus having a spacer mechanism between a body and a boot
    55.
    发明授权
    Submarine apparatus having a spacer mechanism between a body and a boot 失效
    具有在主体和靴子之间的隔离机构的潜艇装置

    公开(公告)号:US06672801B2

    公开(公告)日:2004-01-06

    申请号:US09956959

    申请日:2001-09-21

    IPC分类号: F16L100

    CPC分类号: H02G15/14 H02G1/10

    摘要: A submarine apparatus is laid undersea by a submarine-cable laying device. The submarine apparatus comprises a cylindrical body performing a signal processing, a conical boot arranged at each of both ends of the body so as to fix an end of a submarine cable, and a gimbal joint provided on each of both ends of the body so as to support an end of an arm portion extending from the boot. The diameter of an end of the boot is smaller than a diameter of each of both ends of the body. A spacer mechanism is provided between the body and the boot so as to occupy a part of a space therebetween.

    摘要翻译: 潜艇装置由海底电缆敷设装置埋设在海底。 潜艇装置包括执行信号处理的圆柱体,设置在主体两端的每一端的锥形罩,以固定海底电缆的端部,以及设置在主体的两端的万向接头,以便 以支撑从靴子延伸的臂部分的端部。 护罩端部的直径小于身体两端的直径。 在主体和靴子之间设置间隔机构,以占据它们之间的一部分空间。