公开(公告)号：US07916432B2

公开(公告)日：2011-03-29

申请号：US12000285

申请日：2007-12-11

申请人： Naoki Ohta ,  Kazuki Sato ,  Kosuke Tanaka

发明人： Naoki Ohta ,  Kazuki Sato ,  Kosuke Tanaka

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G03B31/00 ,  G11B5/3163 ,  G11B5/3903 ,  G11B5/3909

摘要： The thin-film patterning method for a magnetoresistive device comprises forming a functional layer on a substrate; forming a first mask layer above the functional layer; forming a patterned resist on the first mask layer; etching the first mask layer by using the resist; removing the resist; forming a second mask layer by atomic layer deposition, the second mask layer covering a step defined by an edge of the first mask layer; dry-etching the second mask layer in a thickness direction of the substrate so as to leave the second mask layer on a side face of the step; removing the first mask layer so as to expose the functional layer under the first mask; and dry-etching the functional layer by using the second mask layer.

摘要翻译： 用于磁阻器件的薄膜构图方法包括在衬底上形成功能层; 在功能层上形成第一掩模层; 在所述第一掩模层上形成图案化抗蚀剂; 通过使用抗蚀剂蚀刻第一掩模层; 去除抗蚀剂; 通过原子层沉积形成第二掩模层，所述第二掩模层覆盖由所述第一掩模层的边缘限定的台阶; 在所述基板的厚度方向上干蚀刻所述第二掩模层，以将所述第二掩模层留在所述台阶的侧面上; 去除所述第一掩模层以使所述功能层暴露在所述第一掩模下方; 并通过使用第二掩模层对功能层进行干蚀刻。

公开(公告)号：US07817381B2

公开(公告)日：2010-10-19

申请号：US11798744

申请日：2007-05-16

申请人： Naoki Ohta ,  Kosuke Tanaka ,  Kazuki Sato

发明人： Naoki Ohta ,  Kosuke Tanaka ,  Kazuki Sato

IPC分类号： G11B5/33

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3932

摘要： A thin film magnetic head comprises a lower magnetic shield layer and an upper magnetic shield layer which are mutually opposed in the layering direction, a magnetoresistance effect element having a free layer, and a bias-applying layer which applies a bias magnetic field to the magnetoresistance effect element. The free layer is positioned between the lower magnetic shield layer and the upper magnetic shield layer, and is positioned on the side of the media-opposed surface. The bias-applying layer has a first portion, a second portion, and a third portion. The first portion and the second portion are positioned at a distance in the track width direction so as to enclose the magnetoresistance effect element therebetween. The third portion is positioned either between the magnetoresistance effect element and the lower magnetic shield layer or between the magnetoresistance effect element and the upper magnetic shield layer, and connects the first portion and the second portion.

摘要翻译： 薄膜磁头包括在分层方向上相互相对的下磁屏蔽层和上磁屏蔽层，具有自由层的磁阻效应元件和向磁阻施加偏置磁场的偏置施加层 效果元素。 自由层位于下磁屏蔽层和上磁屏蔽层之间，并位于介质相对表面的一侧。 偏置施加层具有第一部分，第二部分和第三部分。 第一部分和第二部分位于轨道宽度方向上的一定距离处，以便在其间包围磁阻效应元件。 第三部分位于磁阻效应元件和下磁屏蔽层之间，或位于磁阻效应元件和上磁屏蔽层之间，并连接第一部分和第二部分。

公开(公告)号：US07770284B2

公开(公告)日：2010-08-10

申请号：US11806224

申请日：2007-05-30

申请人： Naoki Ohta ,  Takeo Kagami

发明人： Naoki Ohta ,  Takeo Kagami

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3906 ,  G11B5/3932 ,  G11B5/3967 ,  H01L43/08 ,  H01L43/12 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A manufacturing method of an MR element in which current flows in a direction perpendicular to layer planes, includes forming on a lower electrode layer an MR multi-layered film having a cap layer at a top thereof, forming a mask on the cap layer of the MR multi-layered film, patterning the MR multi-layered film by milling through the mask to form an MR multi-layered structure, forming a magnetic domain control bias layer by using a lift off method using the mask, after forming the magnetic domain control bias layer, forming an additional cap layer on the cap layer and a part of the magnetic domain control bias layer, planarizing a top surface of the additional cap layer and the magnetic domain control bias layer, and forming an upper electrode layer on the planarized top surface.

摘要翻译： 电流在垂直于层平面的方向流动的MR元件的制造方法包括在下电极层上形成在其顶部具有盖层的MR多层膜，在其上形成掩模 MR多层膜，通过铣削通过掩模来形成MR多层膜以形成MR多层结构，在形成磁畴控制之后，通过使用使用掩模的剥离方法形成磁畴控制偏置层 偏置层，在盖层上形成附加的盖层和磁畴控制偏置层的一部分，平坦化附加盖层的顶表面和磁畴控制偏置层，以及在平坦化的顶部上形成上电极层 表面。

公开(公告)号：US07573675B2

公开(公告)日：2009-08-11

申请号：US11374167

申请日：2006-03-14

申请人： Naoki Ohta ,  Kazuki Sato ,  Noriaki Kasahara ,  Takeo Kagami

发明人： Naoki Ohta ,  Kazuki Sato ,  Noriaki Kasahara ,  Takeo Kagami

IPC分类号： G11B5/31

CPC分类号： G11B5/3932 ,  G11B5/3967

摘要： A thin film magnetic head has an air bearing surface and comprises magnetic shield layers, an MR element, bias-applying layers, and a hard magnetic layer. Each of the magnetic shield layers has an end face forming the air bearing surface, and an end face located opposite to the end face. The MR element is located between the magnetic shield layers and on the end face side. The bias-applying layers are located between the magnetic shield layers and are arranged to apply a bias magnetic field to the MR element. The hard magnetic layer is located between the magnetic shield layers and on the end face side. A height of the hard magnetic layer is larger than ⅓ and smaller than ½ of a height of each magnetic shield layer.

摘要翻译： 薄膜磁头具有空气轴承表面并且包括磁屏蔽层，MR元件，偏置施加层和硬磁性层。 每个磁屏蔽层具有形成空气轴承表面的端面和与端面相对的端面。 MR元件位于磁屏蔽层之间和端面侧。 偏置施加层位于磁屏蔽层之间并被布置成向MR元件施加偏置磁场。 硬磁性层位于磁屏蔽层之间和端面侧。 硬磁性层的高度大于1/3且小于每个磁屏蔽层的高度的1/2。

公开(公告)号：US20090190271A1

公开(公告)日：2009-07-30

申请号：US12010626

申请日：2008-01-28

申请人： Hiroshi Yamazaki ,  Naoki Ohta

发明人： Hiroshi Yamazaki ,  Naoki Ohta

IPC分类号： G11B5/33

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G11B5/3906 ,  G11B5/3967 ,  G11B5/398

摘要： An MR element includes a first ferromagnetic layer, a second ferromagnetic layer, a spacer layer disposed between the first and second ferromagnetic layers; and an antiferromagnetic layer disposed on a side of the first ferromagnetic layer farther from the spacer layer. The antiferromagnetic layer is disposed away from a detection surface. The first ferromagnetic layer includes: a first portion having an end face located in the detection surface and a rear end opposite to the end face; and a second portion located away from the detection surface and connected to the rear end of the first portion. The first portion has a first surface touching the spacer layer, and a second surface that is opposite to the first surface and that does not touch the antiferromagnetic layer. The second portion has a third surface touching the antiferromagnetic layer, and a fourth surface opposite to the third surface. The distance between the first surface and the second surface is smaller than the distance between the third surface and an imaginary plane including the first surface.

摘要翻译： MR元件包括第一铁磁层，第二铁磁层，设置在第一和第二铁磁层之间的间隔层; 以及设置在离间隔层更远的第一铁磁层侧的反铁磁性层。 反铁磁层远离检测表面放置。 第一铁磁层包括：具有位于检测表面中的端面的第一部分和与端面相对的后端; 以及位于远离检测表面并连接到第一部分的后端的第二部分。 第一部分具有接触间隔层的第一表面和与第一表面相对并且不接触反铁磁层的第二表面。 第二部分具有接触反铁磁层的第三表面和与第三表面相对的第四表面。 第一表面和第二表面之间的距离小于包括第一表面的第三表面和假想平面之间的距离。

公开(公告)号：US07489481B2

公开(公告)日：2009-02-10

申请号：US11067643

申请日：2005-02-28

申请人： Kentaro Nagai ,  Takeo Kagami ,  Noriaki Kasahara ,  Naoki Ohta ,  Satoshi Miura

发明人： Kentaro Nagai ,  Takeo Kagami ,  Noriaki Kasahara ,  Naoki Ohta ,  Satoshi Miura

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3912 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3909 ,  G11B2005/3996

摘要： A magnetic head is provided for further improving a correlation between the dynamic characteristics and static characteristics. A lower magnetic shield layer, a magneto-resistive layer, and an upper magnetic shield layer are laminated on a base in this order. A lower lead layer and an upper lead layer apply a sense current to the magneto-resistive layer in a direction substantially perpendicular to the film plane thereof through the magnetic shield layers. The lower magnetic shield layer and upper magnetic shield layer have their shapes and sizes which substantially exactly overlap each other, when viewed in a laminating direction. The lower lead layer is electrically connected to the lower magnetic shield layer. At least a portion of the lower lead layer closer to the lower magnetic shield layer is made of a non-magnetic conductive material. The upper lead layer is electrically connected to the upper magnetic shield layer. At least a portion of the upper lead layer closer to the upper magnetic shield layer is made of a non-magnetic conductive material.

摘要翻译： 提供磁头用于进一步改善动态特性和静态特性之间的相关性。 下部磁屏蔽层，磁阻层和上部磁屏蔽层依次层压在基座上。 下引线层和上引线层通过磁屏蔽层在大致垂直于其膜平面的方向上向磁阻层施加感测电流。 当从层叠方向观察时，下磁屏蔽层和上磁屏蔽层具有基本精确地彼此重叠的形状和尺寸。 下引线层电连接到下磁屏蔽层。 下引线层的更靠近下磁屏蔽层的至少一部分由非磁性导电材料制成。 上引线层电连接到上磁屏蔽层。 上导电层的至少一部分靠近上磁屏蔽层由非磁性导电材料制成。

公开(公告)号：US20080253037A1

公开(公告)日：2008-10-16

申请号：US11734047

申请日：2007-04-11

申请人： Takeo Kagami ,  Kazuki Sato ,  Kosuke Tanaka ,  Takayasu Kanaya ,  Naoki Ohta

发明人： Takeo Kagami ,  Kazuki Sato ,  Kosuke Tanaka ,  Takayasu Kanaya ,  Naoki Ohta

IPC分类号： G11B5/31

CPC分类号： G11B5/3912 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3906 ,  G11B5/398

摘要： A thin-film magnetic head includes a lower magnetic shield layer, an MR multi-layered structure formed on the lower magnetic shield layer so that current flows in a direction perpendicular to surfaces of laminated layers, an insulation layer formed to surround the MR multi-layered structure, an additional metal layer laminated on at least the MR multi-layered structure, an upper electrode layer made of a soft magnetic material laminated on the additional metal layer and the insulation layer, and an upper magnetic shield layer laminated on the upper electrode layer. The additional metal layer has a multi-layered structure including a nonmagnetic metal layer and a soft magnetic layer laminated on the nonmagnetic metal layer, and has a length along a track-width direction of the MR multi-layered structure larger than a width of a magnetization-free layer in the MR effect multi-layered structure.

摘要翻译： 薄膜磁头包括下磁屏蔽层，形成在下磁屏蔽层上的MR多层结构，使得电流沿垂直于层压层表面的方向流动，形成为围绕MR多层结构的绝缘层， 至少层叠在MR多层结构上的附加金属层，层叠在附加金属层上的软磁性材料构成的上部电极层和绝缘层，以及层叠在上部电极上的上部磁屏蔽层 层。 附加金属层具有层叠在非磁性金属层上的非磁性金属层和软磁性层的多层结构，并且沿着MR多层结构的轨道宽度方向的长度大于 无磁化层的MR效应多层结构。

公开(公告)号：US20060209470A1

公开(公告)日：2006-09-21

申请号：US11374167

申请日：2006-03-14

申请人： Naoki Ohta ,  Kazuki Sato ,  Noriaki Kasahara ,  Takeo Kagami

发明人： Naoki Ohta ,  Kazuki Sato ,  Noriaki Kasahara ,  Takeo Kagami

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3932 ,  G11B5/3967

摘要： A thin film magnetic head has an air bearing surface and comprises magnetic shield layers, an MR element, bias-applying layers, and a hard magnetic layer. Each of the magnetic shield layers has an end face forming the air bearing surface, and an end face located opposite to the end face. The MR element is located between the magnetic shield layers and on the end face side. The bias-applying layers are located between the magnetic shield layers and are arranged to apply a bias magnetic field to the MR element. The hard magnetic layer is located between the magnetic shield layers and on the end face side. A height of the hard magnetic layer is larger than ⅓ and smaller than ½ of a height of each magnetic shield layer.

公开(公告)号：US20060082929A1

公开(公告)日：2006-04-20

申请号：US11205072

申请日：2005-08-17

申请人： Hiroshi Kiyono ,  Tetsuya Kuwashima ,  Takeo Kagami ,  Noriaki Kasahara ,  Naoki Ohta ,  Nozomu Hachisuka

发明人： Hiroshi Kiyono ,  Tetsuya Kuwashima ,  Takeo Kagami ,  Noriaki Kasahara ,  Naoki Ohta ,  Nozomu Hachisuka

IPC分类号： G11B5/127 ,  G11B5/33

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3912 ,  G11B5/3967 ,  G11B5/4826 ,  G11B2005/3996

摘要： A parasitic capacity C4 generated between a slider substrate and the first shield layer with the first insulating layer as a capacity layer is made substantially equal to a parasitic capacity C2 occurring between a lower magnetic layer and the second shield layer with the third insulating layer as a capacity layer. Preferably, a connection is made between the lower magnetic layer and the slider substrate by a resistance of preferably 100 (Ω) or lower. Thus, it is possible to provide a thin-film magnetic head that can hold back deterioration in a reproducing device and the occurrence of errors due to crosstalk between a recording device and the reproducing device and extraneous noises.

摘要翻译： 在第一绝缘层作为电容层的滑块基板与第一屏蔽层之间产生的寄生电容C 4大体上等于具有第三绝缘层的下磁层与第二屏蔽层之间的寄生电容C 2 作为容量层。 优选地，通过优选100（Ω）或更低的电阻在下磁性层和滑块基板之间形成连接。 因此，可以提供能够抑制再现装置中的劣化的薄膜磁头和由于记录装置与再现装置之间的串扰而引起的错误的发生以及无关的噪声。

公开(公告)号：US20060024100A1

公开(公告)日：2006-02-02

申请号：US11192130

申请日：2005-07-29

申请人： Naoki Ohta ,  Satoshi Shigezaki

发明人： Naoki Ohta ,  Satoshi Shigezaki

IPC分类号： G03G21/00

CPC分类号： G03G21/0011

摘要： An image forming apparatus comprising a toner accumulating member disposed nearer to the housing than the cleaning blade and the lower seal are, wherein the toner accumulating member accumulates the toner at a tip of the cleaning blade; the toner accumulating member has at least one opening; and the following condition is satisfied: 0%

摘要翻译： 一种图像形成装置，包括与清洁刮板和下部密封件相比更靠近壳体的调色剂存储部件，其中调色剂存储部件将调色剂累积在清洁刮板的尖端处; 调色剂存积部件具有至少一个开口; 并且满足以下条件：<？in-line-formula description =“In-line formula”end =“lead”？> 0％其中S（O）是通过对所有开口的面积求和而获得的总开口面积; S（C）是长边方向与清洁刀片的长度方向长度相同长度的两边的矩形区域，两侧面的长度与调色剂存积部件的下端和第 位于与清洁刮板的下端相同高度的调色剂存积部件上。