公开(公告)号：US06333681B1

公开(公告)日：2001-12-25

申请号：US09491171

申请日：2000-01-25

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Masato Komazawa ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/43 ,  H01L41/0946

摘要： A piezoelectric/electrostrictive device is disclosed comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by a drive of the driving portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions, and a piezoelectric/electrostrictive element including a piezoelectric/electrostrictive operating portion comprising at least a pair or more of electrodes and a piezoelectric/electrostrictive layer formed on at least a part of the outer surface of at least one thin plate portion out of the thin plate portions, one end of the piezoelectric/electrostrictive operating portion in a direction in which the fixing portion is connected with the movable portion exists on the fixing portion or the movable portion, and the other end of the piezoelectric/electrostrictive operating portion is arranged on the thin plate portion, and at least a piezoelectric/electrostrictive layer of the piezoelectric/electrostrictive element exists extending over the movable portion and the fixing portion. The device of the present invention, having high rigidity in the width direction of the thin plate portions, namely in the Y-axis direction, enables rigid joining when functional parts such as sensors, magnetic heads, or the like are fixed to the present device, and further when the present device per se is fixed to another structure.

摘要翻译： 公开了一种压电/电致伸缩器件，其包括驱动部分，该驱动部分由压电/电致伸缩元件的位移驱动，通过驱动部分的驱动而操作的可动部分，用于保持驱动部分和可动部分的固定部分 所述可移动部分经由所述驱动部分与所述固定部分联接，以及由所述驱动部分的内壁，所述可移动部分的内壁和所述固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分，以及包括压电/电致伸缩操作部分的压电/电致伸缩元件，所述压电/电致伸缩操作部分包括至少一对或多个电极和形成在外部的至少一部分上的压电/电致伸缩层 至少一个薄板部分的表面在薄板部分之外，压电/电致伸缩操作部分的固定部分与可动部分连接的方向的一端存在于固定部分或可移动部分上，并且 压电/电致伸缩操作部分的另一端设置在薄板部分上，至少压电/电致伸缩元件的压电/电致伸缩层存在于可移动部分和固定部分上方延伸。 本发明的薄板部的宽度方向的刚性即Y轴方向的本发明的装置能够在诸如传感器，磁头等的功能部件固定在本装置上时进行刚性接合 并且当本装置本身固定到另一结构时。

公开(公告)号：US06329740B1

公开(公告)日：2001-12-11

申请号：US09413127

申请日：1999-10-06

申请人： Toshikazu Hirota ,  Koji Kimura ,  Yukihisa Takeuchi

发明人： Toshikazu Hirota ,  Koji Kimura ,  Yukihisa Takeuchi

IPC分类号： H01L4108

CPC分类号： H01L41/314 ,  G02B26/04 ,  G02B26/0858 ,  H01L41/0946 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49798

摘要： A piezoelectric/electrostrictive device includes: a driving portion which is driven by displacement of a piezo-electric/electrostrictive element, a movable portion which operates on the basis of a drive of the driving portion, and a fixed portion for supporting the above driving portion and movable portion. It has a driving portion including thin plates facing each other and a thin film piezoelectric/electrostrictive element formed on the surface of at least one of the thin plates, and the above fixed portion and the above movable portion are joined by the driving portion. In this piezoelectric/electrostrictive element, the movable portion can largely be displaced, and it is not easily affected by a harmful vibration in operation, and it is excellent in mechanical strength, handling efficiency, impact resistance, and moisture resistance.

摘要翻译： 压电/电致伸缩器件包括：通过压电/电致伸缩元件的位移驱动的驱动部分，基于驱动部分的驱动而操作的可动部分和用于支撑上述驱动部分的固定部分 和可动部。 它具有包括彼此相对的薄板的驱动部分和形成在至少一个薄板的表面上的薄膜压电/电致伸缩元件，并且上述固定部分和上述可移动部分由驱动部分接合。 在这种压电/电致伸缩元件中，可移动部分可以大大移位，并且不容易受到操作中的有害振动的影响，并且机械强度，处理效率，耐冲击性和耐湿性都优异。

公开(公告)号：US06217979B1

公开(公告)日：2001-04-17

申请号：US09085853

申请日：1998-05-27

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

IPC分类号： C04B3700

CPC分类号： C04B35/486 ,  C04B35/4885 ,  C04B35/6264 ,  C04B2235/3225 ,  C04B2235/6025 ,  H01L41/0973 ,  H01L41/314 ,  H04R17/08 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24331

摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.

摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。

公开(公告)号：US5853514A

公开(公告)日：1998-12-29

申请号：US716876

申请日：1996-09-20

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Nobuo Takahashi

IPC分类号： G01L1/16 ,  C04B35/49 ,  C04B35/493 ,  H01L41/09 ,  H01L41/22 ,  H04R17/00 ,  H04R17/08 ,  C04B37/00 ,  H01L41/08

CPC分类号： C04B35/486 ,  C04B35/4885 ,  C04B35/6264 ,  H01L41/0973 ,  H01L41/314 ,  C04B2235/3225 ,  C04B2235/6025 ,  H04R17/08 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24331

摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.

摘要翻译： 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的 形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方 。

公开(公告)号：US5691593A

公开(公告)日：1997-11-25

申请号：US392083

申请日：1995-02-22

申请人： Yukihisa Takeuchi ,  Koji Kimura ,  Masato Komazawa

发明人： Yukihisa Takeuchi ,  Koji Kimura ,  Masato Komazawa

IPC分类号： B41J2/14 ,  B41J2/16 ,  H01H57/00 ,  H01L41/09 ,  H01L41/314 ,  H01L41/335 ,  H01L41/39 ,  H01L41/08

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/14274 ,  B41J2/1612 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/314 ,  B41J2002/14258 ,  H01H2057/006 ,  H01H57/00 ,  H01L41/335 ,  Y10T29/42

摘要： A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.

摘要翻译： 一种包括陶瓷基板的压电/电致伸缩致动器以及形成在基板的至少一个表面的至少一部分上的至少一个压电/电致伸缩致动器单元，每个压电/电致伸缩致动器单元具有第一电极膜，压电/电致伸缩 膜和第二电极膜，按照说明书的顺序层压，通过热处理在基板上形成压电/电致伸缩致动器单元。

公开(公告)号：US5376857A

公开(公告)日：1994-12-27

申请号：US206939

申请日：1994-03-07

申请人： Yukihisa Takeuchi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Koji Kimura

IPC分类号： B06B1/06 ,  B41J2/14 ,  H01L41/08 ,  H01L41/09 ,  H01L41/113

CPC分类号： H01L41/0973 ,  B41J2/14233 ,  B41J2002/14258 ,  B41J2002/14387

摘要： A piezoelectric device (1) includes an at least locally thin-walled ceramic substrate (2) and at least one piezoelectric transducer (3) on the substrate (2). The piezoelectric transducer (3) includes a lower electrode layer (4), a piezoelectric layer (5) and an upper electrode layer (6) which are sequentially laminated with each other. The piezoelectric layer (5) has a dimension which is sufficient to cover substantially completely the lower electrode layer (4). The piezoelectric layer (5) has at least one edge (7) which protrudes beyond the lower electrode layer (4) and which is at least locally incompletely bonded to the ceramic substrate (2).

摘要翻译： 压电器件（1）包括至少局部薄壁陶瓷衬底（2）和在衬底（2）上的至少一个压电换能器（3）。 压电换能器（3）包括相互层叠的下电极层（4），压电层（5）和上电极层（6）。 压电层（5）的尺寸足以完全覆盖下电极层（4）。 压电层（5）具有至少一个突出超过下电极层（4）的边缘（7），并且至少局部地不完全地结合到陶瓷衬底（2）上。

公开(公告)号：US5126615A

公开(公告)日：1992-06-30

申请号：US672330

申请日：1991-03-20

申请人： Yukihisa Takeuchi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Koji Kimura

IPC分类号： H01L41/083 ,  H01L41/09 ,  H01L41/22 ,  H02N2/00

CPC分类号： H01L41/094 ,  H01L41/081 ,  H01L41/0933

摘要： A piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive unit each including a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are superposed on each other on a ceramic substrate, or at least one piezoelectric/electrostrictive unit each including a plurality of patterned spaced-apart electrode film strips formed on a ceramic substrate, and a plurality of patterned spaced-apart piezoelectric/electrostrictive film strips each formed on the ceramic substrate and disposed between and in contact with adjacent ones of the electrode film strips. The ceramic substrate includes ceramic particles and grain boundaries defined by the ceramic particles. Lead is included in the grain boundaries which exist in at least a selected portion of the ceramic substrate on which the unit or units is/are disposed.

公开(公告)号：US06931698B2

公开(公告)日：2005-08-23

申请号：US10096059

申请日：2002-03-12

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

IPC分类号： G02B26/08 ,  H01L41/04 ,  H01L41/08 ,  H01L41/09 ,  H01L41/314 ,  H01L41/338 ,  H02N2/02 ,  H04R17/00

CPC分类号： G02B26/0858 ,  H01L41/094 ,  H01L41/0946 ,  H01L41/314 ,  H01L41/338 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T29/4908

摘要： A piezoelectric/electrostrictive device is provided including a functional element. The functional element includes a base portion, a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane, a piezoelectric/electrostrictive element formed on the deformable portion, and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.

摘要翻译： 提供了包括功能元件的压电/电致伸缩器件。 功能元件包括基部，呈现薄板形状并从基部延伸形成平面的可变形部分，形成在可变形部分上的压电/电致伸缩元件以及从可变形部分延伸的反射部分 以便形成与可变形部分的平面相交并且具有设置在有效平面上的光反射部件的有源平面。 压电/电致伸缩元件的操作使得可变形部分在基本上垂直于可变形部分的平面的方向上变形，从而改变从反射部分反射的光的反射角度。

公开(公告)号：US06671939B2

公开(公告)日：2004-01-06

申请号：US10099671

申请日：2002-03-15

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

IPC分类号： H04R1700

CPC分类号： H01L41/0946 ,  H01L41/27 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49574 ,  Y10T29/49789 ,  Y10T29/49798

摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. At least one thin plate section of the pair of thin plate sections is previously bent in a direction to make mutual approach so that it has an inwardly convex configuration to the hole.

摘要翻译： 压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 一对或多个压电/电致伸缩元件设置在一对薄板部分上。 由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁两个孔形成一个孔。 该一对薄板部分中的至少一个薄板部分预先沿着相互接近的方向弯曲，使得其具有朝向该孔的向内凸起的构造。

公开(公告)号：US06472799B2

公开(公告)日：2002-10-29

申请号：US10072189

申请日：2002-02-07

申请人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/0946 ,  H01L41/0831 ,  H01L41/22 ,  H01L41/27 ,  H01L41/273 ,  H01L41/314

摘要： A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. At least one piezoelectric/electrostrictive element is arranged on the pair of thin plate section, and a hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. The pair of thin plate sections are previously bent in directions to make mutual separation so that they have an outwardly convex configuration.