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公开(公告)号：US20050168757A1
公开(公告)日：2005-08-04
申请号：US10510868
申请日：2003-04-02
申请人： Ulrich Benner , Elmar Mayer
发明人： Ulrich Benner , Elmar Mayer
CPC分类号： G01D5/38 , G01D5/34715
摘要： An optical position measuring system including a periodic grating structure and a scanning unit. The scanning unit includes a light source that directs light towards the periodic grating structure and an optical lens device that receives light from the periodic grating structure and creates an image of the periodic grating structure in an image plane, the optical lens device having a periodic lens array with a grating period, AG (r) or the mutual distance between adjoining lenses of said lens array defined by the equation: wherein AG(r) is the A G ( r ) = β ( r ) * [ t ( r ) * [ k + i + n ] + ψ ] ( β ( r ) + 1 ) array, t(r) the period of the periodic grating structure, |β(r)| the absolute amount of the image scale β of the lens array ψ a presettable defined phase shift r the radius of the grating arrangement, wherein in the case of a linear grating r=∞, and AG, t and |β| are constants, i, k, n ε N, i.e. are natural numbers, including zero.
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公开(公告)号：US20050162661A1
公开(公告)日：2005-07-28
申请号：US11075439
申请日：2005-03-08
申请人： Eiji Yamamoto
发明人： Eiji Yamamoto
摘要： An optical displacement sensor comprises a surface emitting laser light source, a scale and a photosensor. The surface emitting laser light source emits a light beam having a predetermined shape. The scale is displaceable in such a manner as to cross the light beam emitted from the surface emitting laser light source and has a diffraction grating of a predetermined period formed thereon for forming a diffraction interference pattern from the light beam. The photosensor receives a predetermined portion of the diffraction interference pattern. The photosensor includes light intensity detecting means comprised of a plurality of light receiving areas arranged apart from one another in a pitch direction of the diffraction interference pattern on a light receiving surface at intervals of np1(z1+z2)/z1 where z1 is a distance between a light-beam emitting surface of the surface emitting laser light source and a surface on which the diffraction grating is formed, z2 is a distance between the surface on which the diffraction grating is formed and the light receiving surface of the photosensor, p1 is the pitch of the diffraction grating on the scale, and n is a natural number.
摘要翻译： 光学位移传感器包括表面发射激光光源，刻度尺和光电传感器。 表面发射激光光源发射具有预定形状的光束。 标尺可以以与从表面发射激光光源发射的光束交叉的方式移位，并且具有形成在其上的预定周期的衍射光栅，用于从光束形成衍射干涉图案。 光传感器接收衍射干涉图案的预定部分。 光传感器包括光强度检测装置，其包括以np 1（z 1 + z 2）/ z 1的间隔在光接收表面上沿衍射干涉图案的俯仰方向彼此分开布置的多个光接收区域，其中， z 1是表面发射激光光源的光束发射表面与其上形成衍射光栅的表面之间的距离，z 2是其上形成衍射光栅的表面与光接收表面之间的距离 的光电传感器，p 1是刻度上的衍射光栅的间距，n是自然数。
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公开(公告)号：US20050140985A1
公开(公告)日：2005-06-30
申请号：US10983639
申请日：2004-11-09
申请人： Tomotaka Takahashi
发明人： Tomotaka Takahashi
CPC分类号： G01D5/38
摘要： A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device unit (140) has a first diffraction scale (141) and a second diffraction scale (143). The first diffraction scale (141) has a transmission type first diffraction grating (142). The second diffraction scale (143) has a diffraction grating. The second diffraction scale (143) has a transmission type second diffraction grating (144) on both sides of a metal film (146). Furthermore, the metal film (146) configures a reflection type third diffraction grating (145) when the second diffraction scale (143) is viewed from the side of the main scale (110).
摘要翻译： 位移检测装置（100）包括主标尺（110）和检测头（120）。 检测头（120）包括发光/接收单元（130）和光学设备单元（140）。 光学器件单元（140）具有第一衍射标尺（141）和第二衍射标尺（143）。 第一衍射标尺（141）具有透射型第一衍射光栅（142）。 第二衍射标尺（143）具有衍射光栅。 第二衍射标尺（143）在金属膜（146）的两侧具有透射型第二衍射光栅（144）。 此外，当从主刻度尺（110）侧观察第二衍射标尺（143）时，金属膜（146）构成反射型第三衍射光栅（145）。
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54.发明授权High accuracy miniature grating encoder readhead using fiber optic receiver channels 有权高精度微型光栅编码器读头使用光纤接收器通道公开(公告)号：US06906315B2
公开(公告)日：2005-06-14
申请号：US10298312
申请日：2002-11-15
申请人： Joseph D. Tobiason
发明人： Joseph D. Tobiason
CPC分类号： G01D5/34723
摘要： A fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of a self-image of the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed according to various design relationships that insure a robust signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.
摘要翻译： 公开了一种用于感测刻度光栅位移的光纤编码器读头。 读取头的检测器通道是具有相应的相位光栅掩模的光纤检测器通道。 光纤编码器读取头被配置为检测刻度光栅的自身图像的位移。 在各种示例性实施例中，根据确保稳健的信噪比的各种设计关系构建光纤读头。 因此，可以实现高水平的位移信号插值，允许亚微米位移测量。 光纤编码器读头可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的包装中。
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55.发明申请Interferometric miniature grating encoder readhead using fiber optic receiver channels 有权使用光纤接收器通道的干涉微型光栅编码器读头公开(公告)号：US20050068539A1
公开(公告)日：2005-03-31
申请号：US10674619
申请日：2003-09-30
申请人： Joseph Tobiason
发明人： Joseph Tobiason
CPC分类号： G01D5/34723 , G01D5/38
摘要： An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.
摘要翻译： 公开了用于感测刻度光栅位移的干涉光纤编码器读头。 读取头的检测器通道是具有相应的相位光栅掩模的光纤检测器通道。 光纤编码器读头被配置为检测由刻度光栅引起的干涉条纹的位移。 在各种示例性实施例中，根据确保紧凑安装和相对理想的正弦信号作为位移的函数的各种设计关系，构造并可操作地定位光纤读头。 因此，可以实现高水平的位移信号插值，允许亚微米位移测量。 光纤编码器读头可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的包装中。
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公开(公告)号：US5670781B1
公开(公告)日：2000-10-10
申请号：US59847996
申请日：1996-02-08
申请人： RENCO ENCODERS INC
发明人： SETBACKEN ROBERT
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公开(公告)号：US6034761A
公开(公告)日：2000-03-07
申请号：US021955
申请日：1998-02-11
申请人： Makoto Takamiya
发明人： Makoto Takamiya
IPC分类号： G01B11/00 , G01D5/38 , G01P3/36 , G01P5/00 , G01S7/48 , G01S17/58 , G01B9/02 , G01B11/02 , G02F1/00
摘要： An apparatus for measuring displacement information of an object. The apparatus has a light source emitting a light beam, an electro-optical crystal member, a voltage applying system for imparting a predetermined frequency difference between light beams passing through two different areas in the electro-optical crystal member, and a light receiving system for receiving scattered light from the object to which the two light beams emergent from the electro-optical crystal member have been projected. The electro-optical crystal member is disposed so that a light beam from the light source may partly enter the two different areas to form the two light beams to which the predetermined frequency difference is imparted. The displacement information of the object is obtained from the scattered light received by the light receiving system.
摘要翻译： 一种用于测量物体的位移信息的装置。 该装置具有发射光束的光源，电光晶体部件，用于在通过电光晶体部件中的两个不同区域的光束之间施加预定的频率差的电压施加系统，以及用于 已经投射了从光电晶体部件射出的两个光束的物体的散射光。 电光晶体部件设置成使得来自光源的光束可以部分地进入两个不同的区域，以形成施加了预定频率差的两个光束。 物体的位移信息是从受光系统接收到的散射光获得的。
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58.发明授权
公开(公告)号：US6005667A
公开(公告)日：1999-12-21
申请号：US897548
申请日：1997-07-21
申请人： Makoto Takamiya , Kou Ishizuka
发明人： Makoto Takamiya , Kou Ishizuka
CPC分类号： G11B5/5526 , G01D5/38 , G11B5/59605 , G11B5/59677
摘要： This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting a light beam onto the diffraction grating and light detection means for receiving an interference light beam obtained by multiplexing diffracted light beams of different orders from the spot projection position on the diffraction grating in a state in which the wavefronts of the diffracted light beams are matched with each other. The relative displacement of the object is measured upon light reception of the light detection means.
摘要翻译： 本发明涉及一种用于光学测量物体与衍射光栅的相对位移的装置，该装置具有用于将光束点投影到衍射光栅上的光投影系统和用于接收获得的干涉光束的光检测装置 通过在衍射光束的波前彼此匹配的状态下将不同阶数的衍射光束与衍射光栅上的点投影位置进行多路复用。 在光检测装置的光接收时测量物体的相对位移。
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公开(公告)号：US5909333A
公开(公告)日：1999-06-01
申请号：US878711
申请日：1997-06-18
申请人： John Stewart Best , Wen-Wei Chiang , Steven Robert Hetzler , Donald Edward Horne , Chih-Kung Lee , Vincent Marrello
发明人： John Stewart Best , Wen-Wei Chiang , Steven Robert Hetzler , Donald Edward Horne , Chih-Kung Lee , Vincent Marrello
CPC分类号： G11B21/083 , G11B5/5534
摘要： A non-invasive servo-write system for use in a data recording disk drive. The system measures actuator position and generates a reference clock using semiconductor lasers. Internal position references are provided by reflective diffraction gratings affixed to the actuator arm and the spindle hub. Wavefront reconstruction optics correct for aberrations in the gratings. Optical sensors detect differential changes in the diffraction patterns created by the gratings, eliminating sensitivity to frequency drift. Decode electronics convert optical sensor data into an actuator position measurement. Control electronics drive the voice coil motor within the disk drive, which positions the write transducer to record servo information provided in a servo pattern generator. Transparent windows in the head-disk-assembly cover allow the servo-writer to write drives which are completely assembled and sealed.
摘要翻译： 一种用于数据记录磁盘驱动器的非侵入式伺服写入系统。 该系统测量致动器位置，并使用半导体激光器产生参考时钟。 内部位置参考由固定在执行器臂和主轴毂上的反射衍射光栅提供。 波前重构光学校正光栅中的像差。 光学传感器检测由光栅产生的衍射图案的差异变化，消除了对频率漂移的敏感性。 解码电子元件将光学传感器数据转换为执行器位置测量。 控制电子装置驱动磁盘驱动器内的音圈电机，其将写入传感器定位以记录提供在伺服模式发生器中的伺服信息。 头盘组件盖中的透明窗口允许伺服写入器写入完全组装和密封的驱动器。
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公开(公告)号：US5909283A
公开(公告)日：1999-06-01
申请号：US946605
申请日：1997-10-07
申请人： Steven Albert Eselun
发明人： Steven Albert Eselun
CPC分类号： G01D5/38
摘要： A linear encoder characterized as having a few number of parts including a light source that directs a beam of light onto the grating of a movable scale where reflected diffracted beams from two locations on the scale interfere with one another to form light fringe bands on a plane. In one embodiment, a Ronchi grating is located on the plane having lines with a spacing equal to the spacing of the light fringe bands. The combination of the Ronchi lines and the bands of the fringe pattern form a Moire pattern which is transmitted through the Ronchi grating and whose spatial distribution of intensity moves as the scale is moved and is detected by a photodetector array. The photodetector array converts the signal from the Moire pattern to a sinusoidal expression of displacement whose phase is used to determine displacement of the scale.
摘要翻译： 一种线性编码器，其特征在于具有若干数量的部件，包括将光束引导到可移动刻度的光栅上的光源，其中来自标尺上的两个位置的反射衍射光束彼此干涉以在平面上形成光条纹带 。 在一个实施例中，Ronchi光栅位于具有间隔等于光边缘带的间隔的线的平面上。 Ronchi线和条纹图案的条纹的组合形成通过Ronchi光栅传播的莫尔图案，并且当光斑移动并且由光电检测器阵列检测时，其强度的空间分布移动。 光电检测器阵列将来自莫尔图案的信号转换成位移的正弦表达式，其相位用于确定标尺的位移。
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