公开(公告)号：US5406212A

公开(公告)日：1995-04-11

申请号：US914563

申请日：1992-07-17

申请人： Tatsuya Hashinaga ,  Masanori Nishiguchi

发明人： Tatsuya Hashinaga ,  Masanori Nishiguchi

IPC分类号： G01R31/28 ,  G01R31/309 ,  G01R1/04

CPC分类号： G01R31/2874 ,  G01R31/2884 ,  G01R31/309

摘要： A burn-in apparatus for use in burn-in tests includes a burn-in test chamber for accommodating a plurality of semiconductor devices to be tested. The burn-in apparatus further includes measuring means for detecting electric characteristics of temperature sensors built in semiconductor devices to measure junction temperatures of the semiconductor chips built in the semiconductor devices. Based on outputs of the measuring means, control means controls electric power feed amounts to the integrated circuits of the semiconductor chips and/or environmental temperatures in the burn-in test chambers. Thus, the junction temperatures are maintained in a set temperature range, and accuracy of screening tests can be improved.

摘要翻译： 用于老化测试的老化装置包括用于容纳待测试的多个半导体器件的老化测试室。 老化装置还包括用于检测内置在半导体器件中的温度传感器的电特性的测量装置，以测量内置在半导体器件中的半导体芯片的结温。 基于测量装置的输出，控制装置控制到半导体芯片的集成电路的电力馈送量和/或老化测试室中的环境温度。 因此，结温保持在设定温度范围内，能够提高筛选试验的准确性。

公开(公告)号：US5359285A

公开(公告)日：1994-10-25

申请号：US914556

申请日：1992-07-17

申请人： Tatsuya Hashinaga ,  Masanori Nishiguchi

发明人： Tatsuya Hashinaga ,  Masanori Nishiguchi

IPC分类号： G01R31/28 ,  G01R31/309 ,  G01R15/12 ,  F25B29/00

CPC分类号： G01R31/2874 ,  G01R31/2884 ,  G01R31/309

摘要： A burn-in apparatus for use in burn-in tests includes a burn-in test container for accommodating a plurality of semiconductor device. Also, the burn-in apparatus includes a measuring device for individually measuring junction temperatures of semiconductor chips of the respective semiconductor device by detecting electric characteristics of temperature sensors built in the semiconductor chips, and a temperature adjusting device for controlling amounts of heat radiation and conduction of the semiconductor chips. The temperature adjusting device, such as device for controlling air flow rates of air nozzles of the container, is controlled by control device on the basis of outputs of the measuring device. Thus, the junction temperatures can be kept within a predetermined temperature range to thereby improve the accuracy of screening tests.

摘要翻译： 用于老化测试的老化装置包括用于容纳多个半导体器件的老化测试容器。 此外，该老化装置还包括一个测量装置，用于通过检测内置在半导体芯片中的温度传感器的电特性来分别测量各个半导体器件的半导体芯片的结温;以及温度调节装置，用于控制散热和导电量 的半导体芯片。 用于控制容器的空气喷嘴的空气流量的装置的温度调节装置由控制装置基于测量装置的输出来控制。 因此，结温可以保持在预定的温度范围内，从而提高筛选试验的准确性。

公开(公告)号：US5245671A

公开(公告)日：1993-09-14

申请号：US601722

申请日：1990-10-26

申请人： Shigeki Kobayashi ,  Yasuaki Tanimura ,  Teruhisa Yotsuya

发明人： Shigeki Kobayashi ,  Yasuaki Tanimura ,  Teruhisa Yotsuya

IPC分类号： G01N21/88 ,  G01N21/956 ,  G01R31/309

CPC分类号： G01N21/95684 ,  G01N21/8806 ,  G01R31/309

摘要： Disclosed is an inspection apparatus for a printed circuit board or the like for inspecting the shape of the soldered portion of a part mounted on the printed circuit board, and for judging whether the soldered portion is acceptable or not. In order to illuminate a printed circuit board undergoing inspection, there are provided three types of ring shaped light-emitting elements, which respectively generate red light, green light and blue light, arranged at positions to project this light, at angles of incidence that differ from one another, toward the surface of a body to be inspected. Light rays of the three primary colors emitted by these light-emitting elements have light-emission energy distributions with respect to wavelength that provide white light when these light rays are mixed, and the quantities of light emitted are adjusted in such a manner that white light is obtained. As a result, three-colored light images regarding the surface of the object under inspection can be detected, and it is possible to detect also peripheral information (part number, polarity, color code, various marks, etc.) essential in solder inspections.The present invention discloses also a method of teaching with regard to the mounted position of a part, the type thereof, and a feature quantity of the mounted state, a method of setting an inspection zone on a printed circuit board, and a method of displaying the results of inspection, etc. These methods are performed prior to inspection of the printed circuit board in the inspecting apparatus.

摘要翻译： PCT No.PCT / JP89 / 00470 Sec。 371 1990年10月26日第 102（e）日期1990年10月26日PCT提交1989年5月2日PCT公布。 出版物WO89 / 11093 日期为1989年11月16日。公开的是用于检查安装在印刷电路板上的部件的焊接部分的形状并用于判断焊接部分是否可接受的印刷电路板等的检查装置。 为了照亮正在进行检查的印刷电路板，提供了三种类型的环形发光元件，其分别产生红光，绿光和蓝光，布置在以不同方向入射的位置突出该光 从另一方面看待被检查的身体的表面。 由这些发光元件发射的三原色的光线相对于在混合这些光线时提供白光的波长具有发光能量分布，并且以这样的方式调节发光量：白光 获得。 结果，可以检测到关于检查对象的表面的三色光图像，并且还可以检测焊料检查中所必需的外围信息（部件号，极性，颜色代码，各种标记等）。 本发明还公开了一种关于部件的安装位置，其类型和安装状态的特征量的教导方法，在印刷电路板上设置检查区域的方法以及显示方法 检查结果等。这些方法在检查检查装置中的印刷电路板之前进行。

公开(公告)号：US5200799A

公开(公告)日：1993-04-06

申请号：US580547

申请日：1990-09-11

申请人： Yuji Maruyama ,  Yukifumi Tsuda ,  Kazutoshi Ikegaya ,  Kunio Sannomiya ,  Hiroto Toba ,  Takumi Seto

发明人： Yuji Maruyama ,  Yukifumi Tsuda ,  Kazutoshi Ikegaya ,  Kunio Sannomiya ,  Hiroto Toba ,  Takumi Seto

IPC分类号： G01R31/309

CPC分类号： G01R31/309

摘要： A system for inspecting a condition of parts packaged on a printed-circuit board. The inspection system includes a position detecting device to receive scattered light due to illumination of the printed-circuit board with a laser beam and convert the received scattered light into a position signal. This position signal is used for obtaining luminance data and at least two height data of the parts on the printed-circuit board. Proper height data of the parts is determined on the basis of the difference between the two height data. The inspection system determines the package condition by comparing the final height data with a predetermined reference data.

公开(公告)号：US4983911A

公开(公告)日：1991-01-08

申请号：US481429

申请日：1990-02-15

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G02F1/1343 ,  G01R19/00 ,  G01R31/308 ,  G01R31/309 ,  H01L21/66

CPC分类号： G01R31/308 ,  G01R31/309

摘要： A two-dimensional image of the voltage distribution across a surface at a large plurality voltage test points of a panel under test is extracted by illuminating the surface with an expanded, collimated beam of optical energy of a known polarization state through an electro-optic modulator crystal, such as KDP, wherin the crystal is disposed to allow longitudinal probing geometries such that a voltage on the surface of the panel under test causes a phase shift in the optical energy (the electro-optic effect) which can be observed through an area polarization sensor (a polarizing lens) for use to directly produce a two-dimensional spatially-dependent power modulation image directly representative of the spatially corresponding voltage state on the surface of the panel under test. Surface cross-talk is minimized by placing the face of the crystal closer to the panel under test than the spacing of voltage sites in the panel under test. The device may operate in a pass-through mode or in a reflective mode. An etalon may be used to enhance sensitivity.

摘要翻译： 通过电光调制器以已知极化状态的扩展的准直光学光束照射表面，提取在待测试的面板的大的多个电压测试点处表面上的电压分布的二维图像 晶体，例如KDP，配置晶体以允许纵向探测几何形状，使得被测试面板的表面上的电压导致光能量（电光效应）的相移，其可以通过区域观察 偏振传感器（偏振透镜），用于直接产生二维空间依赖的功率调制图像，其直接代表被测面板的空间对应的电压状态。 通过将晶体的表面放置在被测试面板上比待测试的面板中的电压位置的间隔更近，使表面串扰最小化。 该装置可以以直通模式或反射模式操作。 标准具可用于提高灵敏度。

公开(公告)号：US4983827A

公开(公告)日：1991-01-08

申请号：US427507

申请日：1989-10-25

申请人： Kazutoshi Ikegaya ,  Kunio Sannomiya ,  Yukifumi Tsuda ,  Yuji Maruyama ,  Nobuhiro Araki ,  Hiroto Toba

发明人： Kazutoshi Ikegaya ,  Kunio Sannomiya ,  Yukifumi Tsuda ,  Yuji Maruyama ,  Nobuhiro Araki ,  Hiroto Toba

IPC分类号： G01N21/88 ,  G01B11/24 ,  G01B11/245 ,  G01N21/93 ,  G01N21/956 ,  G01R31/309 ,  H05K3/34 ,  H05K13/08

CPC分类号： G01R31/309 ,  H05K13/08

摘要： A linescan apparatus for detecting salient pattern on a surface of a product comprises: a laser light source for continuously emitting a laser beam; a polygon mirror for reflecting the laser beam; a drive for rotating the polygon mirror to scan said laser beam; an f.theta. lens arranged such that the linescan laser beam strikes against the plane perpendicularly; a carrying device for moving the product in the direction substantially perpendicular to the plane; a mirror for reflecting the linescan laser beam reflected at a surface of the product to direct the linescan laser beam to the polygon mirror through the f.theta. lens, the mirror being positioned apart from the second plane; and a beam position detector for detecting unidimensional position of a spot mede by the linescan laser beam projected thereon from the mirror via the polygon mirror. This linescan apparatus provides three-dimensional data of a surface of the product. The detected position signal is compared by reference data for inspecting the product. An linescan apparatus further comprises second beam position detector and an averaging circuit for averaging outputs from first mentioned and second beam detectors.

摘要翻译： 用于检测产品表面上的突出图案的线条扫描装置包括：用于连续发射激光束的激光源; 用于反射激光束的多面镜; 用于旋转多面镜以扫描所述激光束的驱动器; f theta透镜布置成使得线可激光束垂直于平面撞击平面; 用于沿着与该平面基本垂直的方向移动产品的承载装置; 用于反射在产品的表面处反射的线阵激光束的反射镜，以通过fθ透镜将线阵激光束引导到多面镜，反射镜被定位成离开第二平面; 以及光束位置检测器，用于通过经由多面镜从反射镜投射到其上的线扫描激光束来检测点中心的一维位置。 该线扫描装置提供产品表面的三维数据。 通过用于检查产品的参考数据来比较检测到的位置信号。 线扫描装置还包括第二光束位置检测器和用于平均来自第一和第二光束检测器的输出的平均电路。

公开(公告)号：US4930890A

公开(公告)日：1990-06-05

申请号：US210097

申请日：1988-06-22

申请人： Yasuhiko Hara ,  Kenzo Endo

发明人： Yasuhiko Hara ,  Kenzo Endo

IPC分类号： G01N21/88 ,  G01N21/64 ,  G01N21/956 ,  G01R31/28 ,  G01R31/309 ,  H05K3/00 ,  H05K13/08

CPC分类号： G01R31/309 ,  G01N21/95692 ,  G01R31/2806 ,  H05K13/08 ,  G01N2021/8887 ,  G01N2021/95653 ,  G01N21/64 ,  G01N2201/102

摘要： A method and apparatus for detecting through-hole voids in a multi-layer printed circuit board. The through-hole is formed with an electrical conductor for interconnecting wiring patterns of upper layers and wiring patterns of lower layers of the printed wiring board and is illuminated with a beam having a wavelength falling within a specified wavelength band capable of exciting an luminescent beam from a layer material. The layer material is exposed by a through-hole void in the through-hole of the printed wiring board. The luminescent beam excited by the illumination beam impinging upon the layer material by way of the through-hole void in the through-hole is focussed by means of a focussing optical system and a photoelectric converter. The photoelectric converter converts the luminescent beam into an electrical signal. The presence of a through-hole void is indicated by the electrical signal.

摘要翻译： 一种用于检测多层印刷电路板中的通孔空隙的方法和装置。 通孔形成有电导体，用于互连印刷线路板的上层的布线图案和下层的布线图案，并且用波长落在能够激发发光束的规定波长带内的波长照射 一层材料。 层状材料通过印刷电路板的通孔中的通孔空洞露出。 由通过通孔中的通孔空穴撞击在层材料上的照明光束激发的发光束通过聚焦光学系统和光电转换器聚焦。 光电转换器将发光束转换为电信号。 电气信号表示通孔空隙的存在。

公开(公告)号：US4816686A

公开(公告)日：1989-03-28

申请号：US832692

申请日：1986-02-25

申请人： Yasuhiko Hara ,  Koichi Karasaki ,  Noriaki Ujiie

发明人： Yasuhiko Hara ,  Koichi Karasaki ,  Noriaki Ujiie

IPC分类号： G01R31/28 ,  G01R31/309 ,  G01N21/88 ,  G01N21/64

CPC分类号： G01N21/95684 ,  G01R31/2806 ,  G01R31/309 ,  G01N2021/95638

摘要： Method and apparatus for detecting wiring patterns wherein a printed circuit board is irradiated with a light ray which excites a substrate of the printed circuit board to generate a fluorescent radiation from the substrate, the fluorescent radiation generated from portions other than a wiring pattern of the printed circuit board is imaged by means of an image detector, and a negative pattern of the wiring pattern is detected on the basis of an image signal generated from the image detector.

摘要翻译： 用于检测布线图案的方法和装置，其中利用激发印刷电路板的基板以从基板产生荧光辐射的光线照射印刷电路板，从印刷的布线图案以外的部分产生的荧光辐射 电路板通过图像检测器成像，并且基于从图像检测器生成的图像信号来检测布线图案的负图案。

公开(公告)号：US4812037A

公开(公告)日：1989-03-14

申请号：US166946

申请日：1988-03-11

申请人： Ernest P. Riedel ,  Robert A. Boenning

发明人： Ernest P. Riedel ,  Robert A. Boenning

IPC分类号： G01N25/72 ,  G01R31/28 ,  G01R31/309 ,  G01N21/23

CPC分类号： G01N25/72 ,  G01R31/2806 ,  G01R31/309

摘要： An apparatus for optically detecting electronic circuit malfunctions includes a light transmitting plate member which is adapted to be positioned adjacent to a plurality of individual electronic circuit elements positioned on a printed circuit board. First and second polarizing filters are positioned adjacent to opposing edges of the light transmitting plate. As the individual electronic circuit elements positioned on the circuit board are operated, the nonuniform heating of the light transmitting plate by the circuit elements produces mechanical stresses within the plate. As monochromatic or white light is passed through the pair of polarizing filters and the light transmitting plate, a light/dark striated pattern of light is produced on the surface of the second polarizing filter. By recording the pattern of a properly operating printed circuit board, a reference pattern may be obtained. Subsequent patterns of light are compared to the reference pattern in order to detect differences between patterns. These differences indicate a change in the temperature of an electronic circuit element with respect to its proper operating temperature, and further indicates a possible malfunction of that individual circuit element.

摘要翻译： 用于光学检测电子电路故障的装置包括适于被定位成邻近位于印刷电路板上的多个单独的电子电路元件的透光板构件。 第一和第二偏振滤光器邻近透光板的相对边缘定位。 当位于电路板上的各个电子电路元件工作时，电路元件对透光板的不均匀加热在板内产生机械应力。 当单色或白色光通过一对偏振滤光器和透光板时，在第二偏振滤光器的表面上产生光/暗条纹图案。 通过记录正确操作的印刷电路板的图案，可以获得参考图案。 将随后的光图案与参考图案进行比较，以便检测图案之间的差异。 这些差异表示电子电路元件相对于其正常工作温度的温度变化，并且还指示该单独电路元件的可能的故障。

公开(公告)号：US4700225A

公开(公告)日：1987-10-13

申请号：US913242

申请日：1986-09-30

申请人： Yasuhiko Hara ,  Keiya Saito ,  Koichi Karasaki ,  Akira Sase

发明人： Yasuhiko Hara ,  Keiya Saito ,  Koichi Karasaki ,  Akira Sase

IPC分类号： H04N7/18 ,  G01R31/28 ,  G01R31/309 ,  G06K9/00 ,  G06T1/00 ,  G06T5/00

CPC分类号： G01R31/2806 ,  G01R31/309

摘要： A method and an apparatus for testing the pattern of a printed circuit board, comprising a stroboscope for emitting intermittent light synchronously with the feed velocity of the printed circuit board; a condenser lens for gathering the intermittent light emitted from the stroboscope and irradiating the gathered light to the printed circuit board; a filter for converting the light of the stroboscope to exciting light; a half mirror for reflecting the exciting light gathered by the condenser lens and converted by the filter, then projecting the reflected light upon the printed circuit board perpendicularly thereto, and passing the excited fluorescent light from the substrate of the printed circuit board; an imaging lens for forming an image of the fluorescent light passed through the half mirror; another filter for eliminating any other light than the fluorescent light out of the entire light passed through the half mirror; a TV camera for picking up the fluorescent image formed by the imaging lens; a memory for storing the preceding-frame pattern video signal obtained from the TV camera with the stroboscope turned on and attenuated by an amount corresponding to the afterimage component; a circuit for subtracting the attenuated stored pattern video signal from the present-frame pattern video signal obtained from the TV camera with the stroboscope turned on; a circuit for generating a reference pattern; and a circuit for producing a negative pattern of the wiring pattern from the output signal of the subtracting circuit and comparing the negative pattern with the reference pattern. In this invention, the image of the printed circuit board set on the table in continuous motion is picked up by the TV camera without any harmful influence of the afterimage so that the printed circuit board can be properly checked to ascertain whether the wiring pattern thereof is normal or not.

摘要翻译： 一种用于测试印刷电路板的图案的方法和装置，包括与所述印刷电路板的进给速度同步地发射间歇光的频闪仪; 聚光透镜，用于收集从频闪仪发出的间歇光并将收集的光照射到印刷电路板; 用于将频闪仪的光转换成激发光的滤光器; 用于反射由聚光透镜聚集的激发光并由滤光器转换的半反射镜，然后将反射光垂直投影到印刷电路板上，并使激发的荧光从印刷电路板的基板通过; 用于形成通过半反射镜的荧光的图像的成像透镜; 用于消除通过半反射镜的整个光线中的荧光以外的任何其它光的另一个滤光器; 用于拾取由成像透镜形成的荧光图像的电视摄像机; 存储器，用于存储从电视摄像机获得的前置帧模式视频信号，其中频闪仪开启并衰减与余像分量对应的量; 用于从频闪灯开启的TV摄像机获得的当前帧图形视频信号中减去已衰减的存储图案视频信号的电路; 用于产生参考图案的电路; 以及用于从所述减法电路的输出信号产生所述布线图案的负图案并将所述负图案与所述参考图案进行比较的电路。 在本发明中，连续运动地设置在桌子上的印刷电路板的图像由电视摄像机拾取，而不会对余像造成任何有害影响，从而能够正确地检查印刷电路板，以确定其布线图案是否为 正常与否