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    PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
    63.
    发明申请
    PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME 审中-公开
    用于制造包含层的工艺和材料及其制品

    公开(公告)号：US20130323880A1

    公开(公告)日：2013-12-05

    申请号：US13981327

    申请日：2012-02-10

    Applicant: Nora Sabina Radu ,  Kyung-Ho Park ,  Adam Fennimore ,  Kerwin D. Dobbs

    Inventor： Nora Sabina Radu ,  Kyung-Ho Park ,  Adam Fennimore ,  Kerwin D. Dobbs

    IPC: H01L51/00

    CPC classification number: H01L51/0002 ,  G03F7/038 ,  G03F7/0755 ,  G03F7/325 ,  H01L51/0003 ,  H01L51/0059 ,  H01L51/56

    Abstract: There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of developed priming layer, wherein the pattern of developed priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of developed priming layer on the first layer. The priming material has at least one unit of Formula I In Formula I: R1 through R6 are D, alkyl, aryl, or silyl, where adjacent R groups can join together to form an aromatic ring; X is a single bond, H, D, or a leaving group; Y is H, D, alkyl, aryl, silyl, or vinyl; a-f are an integer from 0-4; m, p and q are an integer of 0 or greater.

    Abstract translation: 提供了一种用于在第一层上形成包含的第二层的方法，包括以下步骤：形成具有第一表面能的第一层; 用起动材料处理第一层以形成起动层; 以辐射模式曝光引发层，导致曝光区域和未曝光区域; 开发底漆层以有效地从未曝光区域去除底漆层，从而产生具有显影起泡层图案的第一层，其中显影起始层的图案具有高于第一表面能的第二表面能; 以及通过在第一层上的显影起始层的图案上的液体沉积形成第二层。 起始材料具有式I中至少一个单元。在式I中：R 1至R 6为D，烷基，芳基或甲硅烷基，其中相邻的R基团可以连接在一起形成芳环; X是单键，H，D或离去基团; Y是H，D，烷基，芳基，甲硅烷基或乙烯基; a-f是0-4的整数; m，p和q是0以上的整数。

    PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
    64.
    发明申请
    PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME 审中-公开
    用于制造包含层的工艺和材料及其制品

    公开(公告)号：US20130248848A1

    公开(公告)日：2013-09-26

    申请号：US13990812

    申请日：2011-12-19

    Applicant: Nora Sabina Radu ,  Adam Fennimore

    Inventor： Nora Sabina Radu ,  Adam Fennimore

    IPC: H01L51/00

    CPC classification number: H01L51/0004 ,  H01L51/0003 ,  H01L51/0007 ,  H01L51/0018 ,  H01L51/0035 ,  H01L51/0059 ,  H01L51/5048 ,  H01L51/56

    Abstract: There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of priming layer, wherein the pattern of priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of priming layer on the first layer. The priming material has Formula I In Formula I: Ar1 through Ar4 are the same or different and are aryl groups; L is a spiro group, an adamantyl group, bicyclic cyclohexyl, deuterated analogs thereof, or substituted derivatives thereof; R1 is the same or different at each occurrence and is D, F, alkyl, aryl, alkoxy, silyl, or a crosslinkable group, where adjacent R1 groups can be joined together to form an aromatic ring; R2 is the same or different at each occurrence and is H, D, or halogen; a is the same or different at each occurrence and in an integer from 0-4; and n is an integer greater than 0.

    Abstract translation: 提供了一种用于在第一层上形成包含的第二层的方法，包括以下步骤：形成具有第一表面能的第一层; 用起动材料处理第一层以形成起动层; 以辐射模式曝光引发层，导致曝光区域和未曝光区域; 开发底漆层以有效地从未曝光区域去除底漆层，从而产生具有起泡层图案的第一层，其中底漆层的图案具有高于第一表面能的第二表面能; 以及通过在第一层上的起动层的图案上的液体沉积形成第二层。 起始材料具有式I在式I中：Ar 1至Ar 4相同或不同，为芳基; L是螺基，金刚烷基，双环环己基，氘代类似物或其取代衍生物; R 1在每次出现时相同或不同，为D，F，烷基，芳基，烷氧基，甲硅烷基或可交联基团，其中相邻的R 1基团可以连接在一起形成芳环; R2在每次出现时相同或不同，为H，D或卤素; a在每次出现时相同或不同，整数为0-4; 并且n是大于0的整数。

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