摘要:
Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate, and a method for fabricating the TFT substrate. The wire structure includes an underlying layer including a silver oxide formed on a lower structure, and a silver conductive layer including silver or a silver alloy formed on the underlying layer.
摘要:
A thin film conductor having improved adhesion and superior conductivity, a method for fabricating the same, a thin film transistor (TFT) plate including the thin film conductor, and a method for fabricating the TFT plate are provided. The thin film conductor includes an adhesive layer containing an oxidation-reactive metal or silicidation-reactive metal and silver, a silver conductive layer formed on the adhesive layer, and a protection layer formed on the silver conductive layer and containing an oxidation-reactive metal and silver.
摘要:
Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate, and a method for fabricating a TFT substrate. The wire structure includes a barrier layer formed on a substrate and including copper nitride and a copper conductive layer formed on the barrier layer and including copper or a copper alloy.
摘要:
A TFT array panel for an LCD includes a substrate, a first signal line and a second signal line that cross each other on the substrate, a TFT that is connected to the first signal line and the second signal line, and a pixel electrode that is connected to the TFT. Here, at least one of the two signal lines includes a first conductive layer containing molybdenum, a second conductive layer that is formed on the first conductive layer and contains copper, and a third conductive layer that is formed on the second conductive layer and contains a conductive oxide.
摘要:
A TFT array panel including a lower aluminum layer, an aluminum nitride layer formed on the lower aluminum layer, and an upper aluminum layer formed on the aluminum nitride layer is presented. This TFT array panel including an aluminum wiring line reduces or even prevents the formation of a hillock that could create a short circuit. Also presented is a method of fabricating such TFT array panel.