公开(公告)号：US20220082466A1

公开(公告)日：2022-03-17

申请号：US17022988

申请日：2020-09-16

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01L21/12

摘要： The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermal pile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.

公开(公告)号：US20210396548A1

公开(公告)日：2021-12-23

申请号：US16903825

申请日：2020-06-17

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01D4/00 ,  G01F1/44 ,  G01F1/684

摘要： An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.

公开(公告)号：US11179083B2

公开(公告)日：2021-11-23

申请号：US16202407

申请日：2018-11-28

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： B65D81/00 ,  A61B5/20 ,  A61B5/145 ,  A61B5/00

摘要： The design and structure of a physiological fluid collection bag with instant data transmission capabilities, utilizing a micromachined thermal time-of-flight flow sensor as well as integrated pH and calorimetric mass flow sensors for simultaneous and continuous measurement of the instant volumetric flow rate, accumulated total volume, pH and density of data of a collected fluid is disclosed in embodiments. The fluid collection bag includes a collection chamber and storage chamber wherein the sensors are installed inside the storage chamber of the bag and the bag is fully disposable. The fluid collection bag is able to measure the flow rate and instantly relay the data to a reusable data processing unit that can transmit the data to a designated data center or to medical staff.

公开(公告)号：US20180325183A1

公开(公告)日：2018-11-15

申请号：US16046797

申请日：2018-07-26

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： A24F47/00 ,  G01F1/684 ,  G01N33/00

CPC分类号： A24F47/008 ,  G01F1/6845 ,  G01N33/0036

摘要： The design and structure as well as the control scheme of a smart electronic vaporizer device having a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and control electronics that provide the vaporizing process in proportional to the user inhalation flowrate or strength for the best simulation of the experience for traditional cigarette. The device further incorporates a MEMS gas composition sensor that is coupled with the mass flow sensor to measure the user's respiratory health data, including but not limited to asthma status and metabolism related respiratory exchange rate. The device is further capable to relay the data to the designated mobile device and further to the designated cloud for big data process and sharing.

公开(公告)号：US09109935B2

公开(公告)日：2015-08-18

申请号：US13662523

申请日：2012-10-28

申请人： Xiangyou Yang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

发明人： Xiangyou Yang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

IPC分类号： G01F1/68 ,  G01F1/684 ,  G01F25/00 ,  G01F15/00

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F15/00 ,  G01F25/0007

摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.

摘要翻译： 本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。 微型质量流量传感器是所谓的微机电系统（微机电系统）设备。 由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。 该装置还具有稳定的流动调节以实现期望的动态范围能力。 此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的托管转让或关税。

公开(公告)号：US08950253B2

公开(公告)日：2015-02-10

申请号：US13736941

申请日：2013-01-08

申请人： Liji Huang ,  Chih-Chang Chen

发明人： Liji Huang ,  Chih-Chang Chen

IPC分类号： G01F1/68 ,  G01F1/69

CPC分类号： G01F1/69 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/692

摘要： A silicon mass flow sensor manufacture process that enables the backside contacts and eliminates the conventional front side wire binding process, and the assembly of such a mass flow sensor is disclosed in the present invention. The achieved assembly enhances the reliability by eliminating the binding wire exposure to the flow medium that may lead to detrimental failure due to the wire shortage or breakage while the miniature footprint could be maintained. The assembly further reduces flow instability from the flow sensor package including the bump of wire sealing. The invented mass flow sensor assembly can be a flow sensor module if the supporting sensor carrier is pre-designed with the control electronics. Without the control electronics, the said mass flow sensor assembly is easy to install into desired flow channels and connect to the external control electronics.

摘要翻译： 硅质量流量传感器制造方法，其能够实现背面接触并消除常规的前侧线束粘合过程，并且在本发明中公开了这种质量流量传感器的组装。 实现的组件通过消除可能导致由于电线短缺或断裂而导致有害故障的流动介质的接合线而增强了可靠性，同时可以保持微小的占地面积。 该组件进一步减少了流量传感器封装的流动不稳定性，包括电线密封凸块。 如果支撑传感器载体与控制电子装置预先设计，则本发明的质量流量传感器组件可以是流量传感器模块。 没有控制电子器件，所述质量流量传感器组件易于安装到期望的流动通道中并连接到外部控制电子装置。

公开(公告)号：US20140118161A1

公开(公告)日：2014-05-01

申请号：US13662520

申请日：2012-10-28

申请人： Changming Jiang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

发明人： Changming Jiang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

IPC分类号： G01F5/00 ,  G08C15/06

CPC分类号： H04Q9/00 ,  H04Q2209/43 ,  H04Q2209/60

摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.

摘要翻译： 在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。 仪表有两个独立的计量单位。 其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。 旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。 旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。 这两个单元可以由电池或外部来源供电。 这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

公开(公告)号：US20140116129A1

公开(公告)日：2014-05-01

申请号：US13662523

申请日：2012-10-28

申请人： Xiangyou Yang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

发明人： Xiangyou Yang ,  Yong Feng ,  Sugang Jiang ,  Chih-Chang Chen ,  Liji Huang

IPC分类号： G01F1/684

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F15/00 ,  G01F25/0007

摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electromechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied tot custody transfer or tariff in utility industry as well.

摘要翻译： 本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。 微型质量流量传感器是所谓的微机电系统（微机电系统）设备。 由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。 该装置还具有稳定的流动调节以实现期望的动态范围能力。 此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的保管转让或关税。

公开(公告)号：US08644693B2

公开(公告)日：2014-02-04

申请号：US12796565

申请日：2010-06-08

申请人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

发明人： Liji Huang ,  Jiliang Ruan ,  Jian Luo ,  Chih-Chang Chen

IPC分类号： F24H1/10

CPC分类号： G01N33/2888 ,  G01N25/18

摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.

摘要翻译： 本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。 除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

公开(公告)号：US08544320B2

公开(公告)日：2013-10-01

申请号：US12782521

申请日：2010-05-18

申请人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

发明人： Liji Huang ,  Jialuo Jack Xuan ,  Chih-Chang Chen

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  F41G1/40 ,  G01F1/692

摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.

摘要翻译： 在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。 在本发明中公开了三个主要实施例。 通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。 硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。 与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。