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1.发明授权公开(公告)号：US08644693B2
公开(公告)日：2014-02-04
申请号：US12796565
申请日：2010-06-08
申请人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
发明人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
IPC分类号： F24H1/10
CPC分类号： G01N33/2888 , G01N25/18
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
摘要翻译： 本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。 除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。
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2.发明申请公开(公告)号：US20110301765A1
公开(公告)日：2011-12-08
申请号：US12796565
申请日：2010-06-08
申请人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
发明人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
CPC分类号： G01N33/2888 , G01N25/18
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
摘要翻译： 本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。 除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。
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公开(公告)号：US08336392B2
公开(公告)日：2012-12-25
申请号：US12787268
申请日：2010-05-25
申请人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
发明人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
IPC分类号： G01F1/56
CPC分类号： G01F1/6845
摘要： Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.
摘要翻译： 如今，诸如液晶投影仪，电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统，以减少过热引起的电子设备损坏的风险。 本发明公开了一种与空气流量传感器集成的装置，作为气流堵塞检测的报警装置。 气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法，该方法受到响应缓慢和实时状况识别不良。 本发明将通过间接地监测周围温度来直接监测气流的优点，以防止气流通道堵塞。
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公开(公告)号：US20120011940A1
公开(公告)日：2012-01-19
申请号：US12787268
申请日：2010-05-25
申请人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
发明人： Liji Huang , Jian Luo , Changming Jiang , Yenan Liu , Wenhong Deng , Jialuo Jack Xuan , Chih-Chang Chen
IPC分类号： G01F1/56
CPC分类号： G01F1/6845
摘要： Nowadays many electronic devices, such as LCD projector, computer servers, and air fresher etc. require reliable air cooling system to reduce the risk of electronics damage caused by overheating. The present invention disclosed an apparatus integrated with air flow sensor as an alarm apparatus for air flow clog detection. The major prior approach for air flow circulation failure detection is based on an indirect measurement method of temperature monitoring on surrounding environments, which method is suffering from the slow response and poor identification of real-time situation. The present invention will demonstrate the advantages by directly monitoring air flow over by indirectly monitoring the surrounding temperature as for the purpose of preventing air flow path clog.
摘要翻译： 如今，诸如液晶投影仪，电脑服务器和空气清新器等电子设备需要可靠的空气冷却系统，以减少过热引起的电子设备损坏的风险。 本发明公开了一种与空气流量传感器集成的装置，作为气流堵塞检测的报警装置。 气流循环故障检测的主要方法是基于对周围环境进行温度监测的间接测量方法，该方法受到响应缓慢和实时状况识别不良。 本发明将通过间接地监测周围温度来直接监测气流的优点，以防止气流通道堵塞。
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公开(公告)号：US11927555B2
公开(公告)日：2024-03-12
申请号：US17330269
申请日：2021-05-25
申请人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
发明人： Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
CPC分类号： G01N25/18 , G01F1/6845 , G01F1/6847 , G01F1/69 , G01F1/692 , G01F1/699 , G01F15/14
摘要： The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.
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公开(公告)号：US10240723B2
公开(公告)日：2019-03-26
申请号：US15609518
申请日：2017-05-31
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a regulated digital gas dispense apparatus is exhibited in this disclosure. The MEMS mass flow meter embedded with a Bluetooth communication device and powered by a battery pack is designed to replace the mechanical low pressure gauge in a conventional gas dispense regulator such that the dispensed gas flowrate as well as totalized dispensed gas volume in each session or in consequent sessions can be continuously and precisely registered. The measured data are further relayed to local users via the local display or physical data port as well as via a paired smart device running a customized APP that can further relay the data to a designated cloud for cloud data processing, and the data can be streamed reversely. This disclosure shall assist and realize the ultimate optimized management for the users, distributors and/or gas manufacturers in the gas dispensing industry.
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公开(公告)号：US10209156B2
公开(公告)日：2019-02-19
申请号：US15380035
申请日：2016-12-15
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L9/00
摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.
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公开(公告)号：US10066976B2
公开(公告)日：2018-09-04
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.
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公开(公告)号：US20170356772A1
公开(公告)日：2017-12-14
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： G01F1/3218 , G01F1/6845
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.
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10.发明申请公开(公告)号：US20170097252A1
公开(公告)日：2017-04-06
申请号：US14875534
申请日：2015-10-05
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/7084 , G01F7/00
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric and anemometric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing elements on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.
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