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公开(公告)号：US07638772B2
公开(公告)日：2009-12-29
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US07550731B2
公开(公告)日：2009-06-23
申请号：US11750719
申请日：2007-05-18
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14665
摘要： A conversion apparatus includes a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, with each pixel having a conversion element that converts radiation into electric charges, and a switching element. The switching element has a structure having a gate electrode, a first insulating layer, a second insulating layer, and a semiconductor layer from the substrate side in this order. The conversion element has an MIS-type structure of a bottom electrode arranged on an insulating layer extending from the first insulating layer of the switching element and being vertically higher than the gate electrode of the switching element, an insulating layer which is formed of the same layer as the second insulating layer of the switching element, and a semiconductor layer which is formed of the same layer as the semiconductor layer of the switching element from the substrate side in this order.
摘要翻译： 转换装置包括在基板上的像素区域，其包括以矩阵形式布置的多个像素，每个像素具有将辐射转换成电荷的转换元件和开关元件。 开关元件具有从基板侧依次具有栅电极，第一绝缘层，第二绝缘层和半导体层的结构。 转换元件具有底部电极的MIS型结构，该底部电极布置在从开关元件的第一绝缘层延伸并垂直于开关元件的栅电极的绝缘层上，由其形成的绝缘层 作为开关元件的第二绝缘层的层，以及从基板侧依次形成与开关元件的半导体层相同的层的半导体层。
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63.发明申请IMAGING APPARATUS, RADIATION IMAGING APPARATUS, AND MANUFACTURING METHODS THEREFOR 有权成像装置，放射成像装置及其制造方法公开(公告)号：US20090075405A1
公开(公告)日：2009-03-19
申请号：US12273602
申请日：2008-11-19
IPC分类号： H01L21/66
CPC分类号： H01L27/14603 , H01L27/1462 , H01L27/14632 , H01L27/14665 , H01L27/14685 , H01L27/14687 , H01L27/14692
摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.
摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。
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公开(公告)号：US20090008533A1
公开(公告)日：2009-01-08
申请号：US12210839
申请日：2008-09-15
IPC分类号： H01L27/00
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20080203311A1
公开(公告)日：2008-08-28
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US20070272870A1
公开(公告)日：2007-11-29
申请号：US11751702
申请日：2007-05-22
IPC分类号： G01T1/24 , H01L27/146 , H01L25/00 , H01L27/00
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20070228423A1
公开(公告)日：2007-10-04
申请号：US11692671
申请日：2007-03-28
IPC分类号： H01L27/148
CPC分类号： H01L27/14659
摘要： This imaging apparatus has pixels arranged in a matrix shape on a substrate, each of which has a conversion element and the first TFT, wherein the first TFT is connected to the first gate wiring and signal wiring, and the conversion element is connected to bias wiring. The imaging apparatus has the second TFT 6 that is arranged outside a region in which the pixels are arranged. The signal wirings are mutually connected through the second TFT 6 outside a region in which the pixels are arranged. When the apparatus is driven, the second TFT is turned off.
摘要翻译： 该成像装置具有在基板上排列成矩阵状的像素，每个像素具有转换元件和第一TFT，其中第一TFT连接到第一栅极布线和信号布线，并且转换元件连接到偏置布线 。 成像装置具有布置在像素排列的区域的外侧的第二TFT 6。 信号布线通过第二TFT 6在像素排列的区域之外相互连接。 当该装置被驱动时，第二个TFT被关闭。
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68.发明授权公开(公告)号：US08785873B2
公开(公告)日：2014-07-22
申请号：US13049975
申请日：2011-03-17
IPC分类号： G01T1/20
CPC分类号： H01L27/14663 , H01L27/14665 , H01L31/18
摘要： A detection apparatus comprising a substrate; a switching element arranged over the substrate and including a plurality of electrodes; a conductive line arranged over the substrate and electrically connected to a first electrode of the plurality of electrodes of the switching element; and a conversion element including a semiconductor layer arranged over the switching element and the conductive line and arranged between two electrodes, one electrode of the two electrodes being electrically connected to a second electrode of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.
摘要翻译： 一种检测装置，包括：基板; 布置在所述基板上并包括多个电极的开关元件; 布置在所述基板上并与所述开关元件的所述多个电极中的第一电极电连接的导电线; 以及转换元件，其包括布置在所述开关元件和所述导电线上并且布置在两个电极之间的半导体层，所述两个电极的一个电极电连接到所述开关元件的所述多个电极中的第二电极。 转换元件的一个电极通过形成在开关元件的一个电极和第一电极之间的空间或者在一个电极和导电线之间的空间设置在开关元件和导线之上。
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69.发明授权Manufacturing method of radiation detecting apparatus, and radiation detecting apparatus and radiation imaging system 有权放射线检测装置的制造方法以及放射线检测装置和放射线成像系统公开(公告)号：US08440977B2
公开(公告)日：2013-05-14
申请号：US12676352
申请日：2008-11-04
IPC分类号： H01L27/146
CPC分类号： H01L27/14663
摘要： The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
摘要翻译： 本发明的目的是实现一种光辐射检测装置，包括准备包括衬底，布置在衬底上的绝缘层，布置在绝缘层上的多个像素的矩阵阵列的步骤，其中像素包括转换 元件将入射辐射转换为电信号，以及连接电极，布置在多个像素的周围，将与多个像素覆盖的柔性支撑部件固定在与基板相对的一侧的矩阵阵列，并且释放基板 从矩阵数组。
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公开(公告)号：US20120032088A1
公开(公告)日：2012-02-09
申请号：US13195535
申请日：2011-08-01
申请人： Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe , Jun Kawanabe , Kentaro Fujiyoshi , Hiroshi Wayama
发明人： Takamasa Ishii , Chiori Mochizuki , Minoru Watanabe , Jun Kawanabe , Kentaro Fujiyoshi , Hiroshi Wayama
CPC分类号： G01T1/242 , G01T1/24 , H01L27/14636 , H01L27/14663 , H01L31/113 , H04N5/32
摘要： A stacked-type detection apparatus including a plurality of pixels arranged at small intervals is configured to have low capacitance associated with signal lines and/or driving lines. With this novel configuration, small time constant and high-speed driving capability can be achieved in the signal lines and/or driving lines. The plurality of pixels in the detection apparatus are arranged in a row direction and a column direction on an insulating substrate. Each pixel includes a conversion element and a switch element, the conversion element is disposed above the switch element. A driving line disposed below the conversion elements is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. The signal line includes a conductive layer embedded in an insulating member, the insulating member is disposed in a layer lower than an uppermost surface portion of the driving line.
摘要翻译： 包括以小间隔排列的多个像素的层叠型检测装置被配置为具有与信号线和/或驱动线相关联的低电容。 利用这种新颖的结构，可以在信号线路和/或驱动线路中实现小的时间常数和高速驱动能力。 检测装置中的多个像素在绝缘基板上排列成行方向和列方向。 每个像素包括转换元件和开关元件，转换元件设置在开关元件上方。 设置在转换元件下方的驱动线连接到沿行方向布置的开关元件，并且信号线连接到沿列方向布置的开关元件。 信号线包括嵌入在绝缘构件中的导电层，绝缘构件设置在比驱动线的最上表面部分低的层中。
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