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公开(公告)号：US09134153B2
公开(公告)日：2015-09-15
申请号：US14131125
申请日：2011-07-13
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译： 提供了提高耐腐蚀性的流量计。 流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。 隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和 铝垫。
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公开(公告)号：US20140326064A1
公开(公告)日：2014-11-06
申请号：US14359161
申请日：2012-01-18
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
摘要翻译： 提供了一种传感器元件的污染减少的热式流量计。 流量计包括：传感器元件，包括形成在薄膜部分中的加热电阻器，薄膜部分设置在形成在基板上的隔膜上; 支撑构件，用于将传感器元件定位在其上; 第二通道，其包括支撑构件的一部分并且部分地吸入通过进气管道的进气; 以及引导构件，其设置在所述支撑构件或所述传感器元件上，所述引导构件位于沿着所述次级通道中的空气流延伸并且越过所述薄膜部分的线L上，所述引导构件允许微粒沿着远离的方向被引导 来自线L的细颗粒与沿着支撑构件或传感器元件的表面的空气流一起。
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公开(公告)号：US08689608B2
公开(公告)日：2014-04-08
申请号：US12973376
申请日：2010-12-20
IPC分类号： G01N25/18
CPC分类号： G01N25/18
摘要： The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
摘要翻译： 本发明提供了一种高响应性和高精度的热气传感器，其被配置为使得能够基于导热性的变化来分析气体。 热气体传感器包括：具有空腔部分5的基板2，层叠在空腔部分中的薄膜支撑体6，其包括多个绝缘层8a和8b;以及第二加热构件3和第二加热构件4， 在薄膜载体中的绝缘层之间。 第二加热构件位于第一加热构件的周边周围。 第一加热构件被控制到比第二加热构件被控制的温度高的温度。 环境气体的浓度基于施加到第一加热构件的功率被测量。
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公开(公告)号：US20130313675A1
公开(公告)日：2013-11-28
申请号：US13984748
申请日：2011-03-02
IPC分类号： H01L29/66
CPC分类号： H01L29/66992 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F5/00
摘要： Provided is a compact thermal type flowmeter that can perform a partial thermal treatment on a sensor element portion without affecting other elements and can improve the reliability of a sensor element while improving the sensitivity of the sensor element.A thermal type flowmeter includes a hollow portion which is formed in a semiconductor substrate, a thin film portion which is formed by insulating films provided to cover the hollow portion and, a heating resistor body and a temperature-measuring resistor body which are formed between the insulating films. In a method for manufacturing the thermal type flowmeter, a thermal treatment is performed to grow a crystal grain size of the heating resistor body and a crystal grain size of the temperature-measuring resistor body by heating the thin film portion after forming the thin film portion.
摘要翻译： 提供了一种紧凑型热式流量计，其可以在不影响其他元件的情况下对传感器元件部分进行部分热处理，并且可以在提高传感器元件的灵敏度的同时提高传感器元件的可靠性。 一种热式流量计包括形成在半导体衬底中的中空部分，由覆盖中空部分的绝缘膜形成的薄膜部分，以及加热电阻体和温度测量电阻体， 绝缘膜。 在制造热式流量计的方法中，通过在形成薄膜部分之后加热薄膜部分进行热处理，以增加加热电阻体的晶粒尺寸和温度测量电阻体的晶粒尺寸 。
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65.发明申请Disconnection Detection Circuit for Bridge Circuit and System Including Disconnection Detecting Means 有权用于桥接电路和包括断路检测装置的系统的断路检测电路公开(公告)号：US20130093432A1
公开(公告)日：2013-04-18
申请号：US13806827
申请日：2011-06-21
IPC分类号： G01R31/02
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译： 在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。 提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。 根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自 其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。
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公开(公告)号：US20100242591A1
公开(公告)日：2010-09-30
申请号：US12708387
申请日：2010-02-18
IPC分类号： G01F1/692
摘要： The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
摘要翻译： 本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。 本发明提供一种热式流量传感器，包括：导入测定对象流体的通道; 以及传感器元件，其设置在通道内并测量测量对象流体的流量。 传感器元件1包括：半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。 传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。 当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度，Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离（外周边 在测量目标流体的流动方向上，隔膜的边缘）在Lh和Wd之间的关系中满足Wd≥0.4×Lh。
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公开(公告)号：US07457711B2
公开(公告)日：2008-11-25
申请号：US11442158
申请日：2006-05-30
IPC分类号： G01F1/00
CPC分类号： G01F1/6965 , G01F1/6845 , G01F1/696 , G01F1/72
摘要： In a thermal-type airflow meter that measures an intake airflow rate in an internal combustion engine of an automobile or the like, there has been a problem that pulsation errors caused by external fluctuations under the environment including a large pulsation and reverse flow in the intake valve are difficult to be reduced. In order to solve this problem, the invention provides a flowmeter comprising a detection element that outputs a non-linear signal corresponding to a flow rate, and a regulation means that regulates an output signal of the detection element for controlling. With this construction, the regulation means executes output regulation processing that regulates irregularities of the detection element in the output signal, and inequality linearization processing that regulates an average value of the output signal after the output regulation processing by means of regulating parameters.
摘要翻译： 在测量汽车等的内燃机中的进气量的热式气流计中，存在由于在进气中具有大的脉动和反向流动的环境下的外部波动引起的脉动误差的问题 阀门难以减少。 为了解决这个问题，本发明提供了一种流量计，其包括：输出对应于流量的非线性信号的检测元件;以及调节装置，用于调节用于控制的检测元件的输出信号。 利用这种结构，调节装置执行调节输出信号中的检测元件的不规则性的输出调节处理，以及通过调节参数来调节输出调节处理之后的输出信号的平均值的不等式线性化处理。
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68.发明授权Backup circuit for holding information in a storage circuit when power cut-off occurs 有权当断电发生时，用于将信息保存在存储电路中的备用电路公开(公告)号：US07376040B2
公开(公告)日：2008-05-20
申请号：US10563580
申请日：2003-09-18
IPC分类号： G11C5/14
CPC分类号： G11C5/141 , G11C5/143 , H02J7/345 , H02J9/061 , Y10T307/615
摘要： A backup circuit that can be fabricated by the standard CMOS process and has a small circuit scale. The backup circuit (10) is disposed between a digital circuit (20) including a storage circuit and a power supply terminal (TIN, TGND) for supplying power to the digital circuit. MOS transistors (MOS1, MOS2) connected in series are disposed between the power supply terminal (TIN, TGND) and a backup capacitor (C1). The MOS transistors (MOS1, MOS2) serve as resistors when the power is normally supplied to the power supply terminal, and as diodes each operating with its backward direction defined as the direction from the digital circuit toward the power supply terminal when the power is cut off.
摘要翻译： 一种备用电路，可以通过标准的CMOS工艺制造，并具有小的电路规模。 备用电路（10）设置在包括存储电路的数字电路（20）和电源端子（T INI IN，T SUB GND）之间，用于向 数字电路。 串联连接的MOS晶体管（MOS1，MOS2）配置在电源端子（T SUB，GND）与备用电容器（C 1）之间。 MOS晶体管（MOS1，MOS2）当电源正常地供给到电源端子时用作电阻器，并且当功率被定义为从数字电路朝向电源端子的方向时，其反向方向的二极管被定义为电源 被切断
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公开(公告)号：US07269999B2
公开(公告)日：2007-09-18
申请号：US10560896
申请日：2006-03-05
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/696
摘要： A thermal airflow meter excellent in flow-rate measurement accuracy is provided. The airflow meter has a flow-rate measuring element comprising a heat resistor and a temperature-compensating resistor which are formed on the a first base member. A second base member of the airflow meter, provided with a drive circuit and a signal processor, is housed in a casing holding the flow-rate measuring element. The flow-rate measuring element is disposed in an air passage. Of two temperature sensors for measuring temperature at each of two points in the thermal airflow meter, respectively, a first temperature sensor is provided on the fist substrate of the flow-rate measuring element, and a second temperature sensor is provided inside the casing. The signal processor has a function of computing an airflow rate, an air temperature, and an air passage wall face temperature on the basis of an output signal of the flow-rate measuring element and respective output signals of the first and second sensors.
摘要翻译： 提供流量测量精度优异的热气流计。 气流计具有流量测量元件，其包括形成在第一基底构件上的热电阻器和温度补偿电阻器。 具有驱动电路和信号处理器的气流计的第二基座容纳在保持流量测量元件的壳体中。 流量测量元件设置在空气通道中。 在用于在热气流计的两点测量温度的两个温度传感器中，分别在流量测量元件的第一基底上设置第一温度传感器，并且在壳体内部设置第二温度传感器。 信号处理器具有基于流量测量元件的输出信号和第一和第二传感器的各个输出信号来计算气流速率，空气温度和空气通道壁面温度的功能。
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公开(公告)号：US20070211394A1
公开(公告)日：2007-09-13
申请号：US11656994
申请日：2007-01-24
IPC分类号： H02H7/00
CPC分类号： H02H9/046 , H01L27/0248 , H02H11/002
摘要： An IC power protection circuit functions as a surge protection circuit and reverse connection protection circuit. The IC power protection circuit includes an error amplification circuit, positioned and integrated within an integrated circuit and a transistor, is positioned as a stand-alone element that is separate from the integrated circuit. The integrated circuit includes a sensor signal processing circuit that processes a signal of a sensor. A transistor protects the integrated circuit against a surge voltage from a battery terminal. A resistor is positioned between an output terminal of an error amplifier and a base terminal of the transistor to provide reverse connection protection. Another resistor is connected between a ground and a connection point between the above resistor and the output terminal to provide overvoltage protection for the integrated circuit. A starting resistor is connected between a collector and base of the transistor.
摘要翻译： IC电源保护电路用作浪涌保护电路和反向连接保护电路。 IC电源保护电路包括位于并集成在集成电路和晶体管内的误差放大电路，被定位为与集成电路分离的独立元件。 集成电路包括处理传感器的信号的传感器信号处理电路。 晶体管保护集成电路免受来自电池端子的浪涌电压的影响。 电阻器位于误差放大器的输出端子和晶体管的基极端子之间，以提供反向连接保护。 另一个电阻连接在上述电阻和输出端之间的接地点和连接点之间，为集成电路提供过压保护。 启动电阻连接在晶体管的集电极和基极之间。
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