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1.发明申请公开(公告)号：US20120192632A1
公开(公告)日：2012-08-02
申请号：US13360923
申请日：2012-01-30
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译： 能够高精度地且高速地检测进气温度的进气温度传感器。 本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。
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公开(公告)号：US20110023597A1
公开(公告)日：2011-02-03
申请号：US12844429
申请日：2010-07-27
IPC分类号： G01F1/69
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F1/699
摘要： Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
摘要翻译： 提供一种热流量计中的加热温度调节电路，其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。 热流量计包括：当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器，第二电阻器，第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻，并且通过控制发热电阻器的加热温度来测量流体的流量。 热流量计包括：第一串联电路，其中固定电阻，第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路，其中第三电阻器和第四电阻器串联连接，并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。
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公开(公告)号：US20100242591A1
公开(公告)日：2010-09-30
申请号：US12708387
申请日：2010-02-18
IPC分类号： G01F1/692
摘要： The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
摘要翻译： 本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。 本发明提供一种热式流量传感器，包括：导入测定对象流体的通道; 以及传感器元件，其设置在通道内并测量测量对象流体的流量。 传感器元件1包括：半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。 传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。 当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度，Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离（外周边 在测量目标流体的流动方向上，隔膜的边缘）在Lh和Wd之间的关系中满足Wd≥0.4×Lh。
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公开(公告)号：US20150377676A1
公开(公告)日：2015-12-31
申请号：US14411346
申请日：2012-06-27
摘要： There is provided a fluid measurement device that is high in measurement precision. The fluid measurement device has a circuit unit into which a first signal S1 output from a first detection element and a second signal S2 output from a second detection element are to he input, wherein the circuit unit includes signal processing means that outputs a third signal S3 according to the first signal and the second signal, state deciding means that decides a state of the first signal, and control means that controls an amount of change that a change of the first signal imparts to the third signal in accordance with a result of decision by the state deciding means.
摘要翻译： 提供了一种测量精度高的流体测量装置。 流体测量装置具有电路单元，从第一检测元件输出的第一信号S1和从第二检测元件输出的第二信号S2输入到该电路单元中，其中电路单元包括输出第三信号S3的信号处理装置 根据第一信号和第二信号，决定第一信号的状态的状态判定装置和控制装置，其根据判定结果控制第一信号的变化赋予第三信号的变化量 由国家决定手段。
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公开(公告)号：US20120192644A1
公开(公告)日：2012-08-02
申请号：US13361372
申请日：2012-01-30
IPC分类号： G01F1/692
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698
摘要： A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
摘要翻译： 热流传感器包括加热器温度控制器，其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。 传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器 设置在加热电阻附近的第二温敏电阻器; 以及流量检测器，其基于第二温度敏感电阻器的温度来检测流体的流量。 加热控制器基于第一和第二参考温度来控制加热电阻器的温度。
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公开(公告)号：US20090241660A1
公开(公告)日：2009-10-01
申请号：US12339485
申请日：2008-12-19
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/688 , G01F1/692 , G01F1/696 , G01F5/00
摘要： In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arranged, cantilever plate parts protruding from the facing wall toward the measuring element side are arranged, a gap is provided between the tip of the cantilever plate parts and the measuring element, and the cantilever plate parts are extended from the upper stream to the down stream of the measuring element.
摘要翻译： 在用于测量具有放热电阻器的测量元件和在基板表面侧形成的温度测量电阻器的流量的热式流量计中，布置了面向测量元件表面的面向壁，悬臂板 布置有从面向壁向测量元件侧突出的部分，在悬臂板部分的顶端和测量元件之间设置有间隙，并且悬臂板部分从测量元件的上游向下游延伸 。
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公开(公告)号：US20080282791A1
公开(公告)日：2008-11-20
申请号：US12121520
申请日：2008-05-15
IPC分类号： G01F5/00
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/699
摘要： A simply configured thermal flowmeter can provide high measurement accuracy over a long period of time by suppressing the characteristics degradation due to adhering contaminants. On the surface of a diaphragm part, a heater resistor is formed. Temperature difference sensors through are disposed on the two sides of the heater resistor (upstream and downstream sides in the flow direction of an air stream). The temperature difference sensors are disposed upstream of the heater resistor while the temperature difference sensors are disposed downstream of the heater resistor. Outside the temperature difference sensors, heating temperature sensors are formed. Control is performed so that the temperature of the heating temperature sensors is set higher than the air stream temperature by a certain degree. Therefore, even if contaminants adhere to the sensor device, the temperature of the heating temperature sensors is held constant. Since the temperature difference sensors to detect the flow rate is located between the heating temperature sensors, the temperature change due to the contamination is small. This suppresses the characteristics degradation, making it possible to provide high measurement accuracy over a long period of time.
摘要翻译： 简单配置的热流量计可以通过抑制由于污染物附着引起的特性劣化，从而在长时间内提供高测量精度。 在隔膜部件的表面上形成加热电阻器。 温差传感器通孔设置在加热电阻器的两侧（气流的流动方向的上游侧和下游侧）。 温度差传感器设置在加热电阻器的上游，而温差传感器设置在加热电阻器的下游。 在温差传感器之外，形成加热温度传感器。 进行控制，使得加热温度传感器的温度被设定为高于气流温度一定程度。 因此，即使污染物粘附到传感器装置上，加热温度传感器的温度也保持恒定。 由于用于检测流量的温差传感器位于加热温度传感器之间，因污染导致的温度变化小。 这抑制了特性劣化，从而可以在长时间内提供高测量精度。
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公开(公告)号：US20080229818A1
公开(公告)日：2008-09-25
申请号：US12020025
申请日：2008-01-25
CPC分类号： G01F1/6845 , G01F1/688
摘要： To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Phmax≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied.
摘要翻译： 为了在保持良好的流量检测灵敏度的同时通过热式流量计降低功耗，仅需要在预定条件下降低热电阻器的功耗。 具体地说，只要热电阻器的宽度Wh为100微米至400微米（100 <= Wh <= 400），则仅需要热电阻器的长度Lh，温度增加DeltaTh 为了保持良好的流量检测灵敏度，将加热电阻器和要供给到热电阻器的最大允许功率Phmax设定为满足公式1.4 <= DeltaTh.Lh / Phmax <= 2.8。 因此，热电阻器的长度和热电阻器的温度上升被设定为能够在满足公式的范围内降低最大功耗。
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公开(公告)号：US20080053215A1
公开(公告)日：2008-03-06
申请号：US11835981
申请日：2007-08-08
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： The invention provides a thermal type flow meter which has a high reliability and a low cost. In a thermal type flow meter provided with a flow rate detecting element in which at least a heat generating resistor and a lead electrode are formed on a surface of a tabular substrate, and a support body in which a concave portion accommodating the flow rate detecting element is formed on a surface, and in which the flow rate detecting element is firmly fixed and accommodated by an adhesive agent in a back surface of the tabular substrate and a part of a bottom surface of the concave portion, an approximately straight discharge groove which is deeper than a bottom surface of the concave portion and passes through both end surfaces in upward and downward sides of the concave portion is formed from the upstream side of the support body concave portion to the downstream side, between the cavity of the tabular substrate and the back surface region of the tabular substrate in which the lead electrode is formed. Accordingly, it is possible to achieve the thermal type flow meter which has the high reliability and the low cost.
摘要翻译： 本发明提供一种具有高可靠性和低成本的热式流量计。 在具有流量检测元件的热式流量计中，至少在片状基板的表面上形成有发热电阻体和引线电极，在支承体中容纳流量检测元件的凹部 形成在表面上，其中流量检测元件通过粘合剂牢固地固定并容纳在平板状基板的背面和凹部的底面的一部分中，大致直线的排出槽是 比凹部的底面更深且通过凹部的上下两侧的两个端面，从支撑体凹部的上游侧到下游侧，在片状基板的空腔与 形成引线电极的平板状基板的背面区域。 因此，可以实现具有高可靠性和低成本的热式流量计。
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公开(公告)号：US20070181554A1
公开(公告)日：2007-08-09
申请号：US11627111
申请日：2007-01-25
IPC分类号： H05B3/00
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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