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    METHOD AND SYSTEM FOR PACKAGING A MEMS DEVICE
    63.
    发明申请
    METHOD AND SYSTEM FOR PACKAGING A MEMS DEVICE 失效
    用于包装MEMS器件的方法和系统

    公开(公告)号：US20090257109A1

    公开(公告)日：2009-10-15

    申请号：US12423531

    申请日：2009-04-14

    申请人： Mark W. Miles ,  Jeffrey B. Sampsell

    发明人： Mark W. Miles ,  Jeffrey B. Sampsell

    IPC分类号： G02B26/02

    CPC分类号： B81C1/0023 ,  G02B26/001 ,  Y10T29/49002

    摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

    摘要翻译： 描述了基于MEMS的显示装置，其中干涉式调制器的阵列被配置为将光反射通过透明基板。 透明基板被密封到背板，并且背板可以包含用于控制干涉式调制器阵列的电子电路。 背板可以为诸如可用于控制显示器状态的电子部件等设备组件提供物理支持。 背板也可以用作设备的主要结构支撑。

    Interferometric modulation of radiation
    64.
    发明授权
    Interferometric modulation of radiation 失效
    辐射干涉调制

    公开(公告)号：US07471444B2

    公开(公告)日：2008-12-30

    申请号：US11150683

    申请日：2005-06-10

    申请人： Mark W. Miles

    发明人： Mark W. Miles

    IPC分类号： G02B26/00

    CPC分类号： G02B26/001 ,  B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B27/017 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/03 ,  G09G3/2074 ,  G09G3/3466 ,  G09G2300/0452

    摘要： An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

    摘要翻译： 干涉式调制器（IMod）是用于使用干扰来调制光的微机电装置。 可以以空间方式确定这些装置的颜色，并且可以使用若干光学补偿机构来补偿它们的固有色移。 IMods的亮度，寻址和驱动可以通过适当的包装以及可以使用许多技术之一附接和/或制造的外围电子装置以各种方式来实现。 这些设备可以在嵌入式和直接感知的应用中使用，后者提供多种观看模式以及从微观到结构范围内的大量产品概念。

    Photonic MEMS and structures
    65.
    发明授权
    Photonic MEMS and structures 失效
    光子MEMS和结构

    公开(公告)号：US07388706B2

    公开(公告)日：2008-06-17

    申请号：US11150682

    申请日：2005-06-10

    申请人： Mark W. Miles

    发明人： Mark W. Miles

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0841 ,  B82Y20/00 ,  G01J3/0256 ,  G01J3/26 ,  G01L5/0047 ,  G02B5/02 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/1225 ,  G02B6/13 ,  G02B6/266 ,  G02B6/3516 ,  G02B6/3522 ,  G02B6/353 ,  G02B6/3536 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/43 ,  G02B26/001 ,  G02B26/02 ,  G02B26/08 ,  G02B26/0833 ,  G02B2006/12104 ,  G02B2006/12109 ,  G02B2006/12126 ,  G02B2006/12159 ,  G02B2006/12164 ,  G09G3/3466 ,  G09G2310/02 ,  G09G2310/0254 ,  G09G2310/06

    摘要： An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

    摘要翻译： 干涉调制器（Imod）包含抗反射涂层和/或微制造补充光源。 为IMod或其他微机械设备的矩阵寻址阵列提供了有效的驱动方案。 改进的配色方案提供更大的灵活性。 电子硬件可以进行现场重新配置，以适应不同的显示格式和/或应用功能。 IMod的机电行为可以与其光学行为分离。 提供了一种改进的致动装置，其中一些可以隐藏在视野之内。 制造IMod或IMod阵列并与MEMS开关或开关阵列结合使用。 IMod可用于光开关和调制。 一些IMods包含2-D和3-D光子结构。 讨论了调制光的各种应用。 基于连续的网络馈送过程提供MEMS制造和封装方法。 可以将IMODs用作评估沉积材料残余应力的测试结构。

    Interferometric modulation of radiation
    68.
    发明授权
    Interferometric modulation of radiation 失效

    公开(公告)号：US07042643B2

    公开(公告)日：2006-05-09

    申请号：US10078282

    申请日：2002-02-19

    申请人： Mark W. Miles

    发明人： Mark W. Miles

    IPC分类号： G02B27/00

    CPC分类号： G09G3/3466 ,  B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B27/01 ,  G02B27/0101 ,  G02B27/017 ,  G02B2006/12104 ,  G02B2027/0112 ,  G02B2027/0118 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/03 ,  G09G3/2074 ,  G09G2300/0452

    摘要： An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope. In another aspect, a structure for modulating light comprises modulators of light each including an interference cavity for causing interference modulation of the light. The structure further comprises an optical compensation mechanism component coupled to the modulators which enhances the optical performance of the structure, the component comprising one or more of a photonic crystal array, a mutlilayer array of dielectric mirrors, and an array of microlenses. In another aspect, a device for modulating light comprises an array of interference modulators, each comprising a primary and a secondary mirror which in a quiescent state is spaced from the primary mirror by a first distance so that light reflected from the modulator is of a first color, and which in a second state, under influence of a bias voltage, is spaced from the primary mirror by a second distance which is less than the first distance so that the modulator reflects light of a second color. The device further comprises an optical compensation mechanism component coupled to the array to compensate for changes in a color of light reflected by the array due to changes in a angle at which the array is viewed. In another aspect, a method for fabricating a reflective display comprises fabricating an array of interference modulators, each comprising a primary and a secondary mirror which in a quiescent state is spaced on the primary mirror by a first distance so that light reflected from the modulator is of a first color, and which in a second state, under influence of a biased voltage is spaced from the primary mirror by a second distance which is less than the first distance so that the modulator reflects light of a second color. The method further comprises coupling an optical compensation mechanism component to the array of interference modulators to compensate for changes in a color of light reflected by the array due to changes in an angle at which the array is viewed.