公开(公告)号：US20100178597A1

公开(公告)日：2010-07-15

申请号：US12685218

申请日：2010-01-11

申请人： Hiroyuki ISHIDA ,  Tamiya Aiyama ,  Koichi Maruyama

发明人： Hiroyuki ISHIDA ,  Tamiya Aiyama ,  Koichi Maruyama

IPC分类号： G03F1/00

CPC分类号： G03F1/72 ,  C03C17/3607 ,  C03C17/3626 ,  C03C17/3649 ,  C03C17/3665 ,  C03C17/38 ,  C03C2218/355 ,  G03F1/84 ,  Y10T428/31616

摘要： A mask blank is provided by forming a plurality of films, including at least a thin film to be a transfer pattern, on a board. At the time of patterning a resist film of the mask blank according to pattern data, film information to check with a pattern is obtained for each of a plurality of the films.

摘要翻译： 通过在板上形成至少包括作为转印图案的薄膜的多个膜来提供掩模坯料。 在根据图案数据对掩模毛坯的抗蚀剂膜进行图案化时，对于多个膜中的每一个获得用于检查图案的胶片信息。

公开(公告)号：US07660456B2

公开(公告)日：2010-02-09

申请号：US10592320

申请日：2005-03-07

申请人： Hiroyuki Ishida ,  Tamiya Aiyama ,  Koichi Maruyama

发明人： Hiroyuki Ishida ,  Tamiya Aiyama ,  Koichi Maruyama

IPC分类号： G06K9/00 ,  G03F1/00 ,  G06F17/50

CPC分类号： G03F1/72 ,  C03C17/3607 ,  C03C17/3626 ,  C03C17/3649 ,  C03C17/3665 ,  C03C17/38 ,  C03C2218/355 ,  G03F1/84 ,  Y10T428/31616

摘要： A mask blank is provided by forming a plurality of films, including at least a thin film to be a transfer pattern, on a board. At the time of patterning a resist film of the mask blank according to pattern data, film information to check with a pattern is obtained for each of a plurality of the films.

摘要翻译： 通过在板上形成至少包括作为转印图案的薄膜的多个膜来提供掩模坯料。 在根据图案数据对掩模毛坯的抗蚀剂膜进行图案化时，对于多个膜中的每一个获得用于检查图案的胶片信息。

公开(公告)号：US07280276B2

公开(公告)日：2007-10-09

申请号：US10937290

申请日：2004-09-10

申请人： Daisuke Koreeda ,  Koichi Maruyama ,  Shuichi Takeuchi ,  Naohito Sasaki

发明人： Daisuke Koreeda ,  Koichi Maruyama ,  Shuichi Takeuchi ,  Naohito Sasaki

IPC分类号： G11B7/00 ,  G02B1/10

CPC分类号： G11B7/1374 ,  G02B1/11 ,  G02B13/18

摘要： An objective lens on which a beam having parallel light fluxes is incident includes a single element lens and a reflection suppressing coating formed on at least one surface of the single element lens. The reflection suppressing coating is formed such that the reflectivity across a radius of the objective lens exhibits a local maximal value, and the reflection suppressing coating is formed to achieve the following condition: 0.6

摘要翻译： 入射了具有平行光束的光束的物镜包括形成在单一元件透镜的至少一个表面上的单个元件透镜和反射抑制涂层。 形成反射抑制涂层，使得物镜半径的反射率呈现局部最大值，形成反射抑制涂层以达到以下条件：＆lt;线内公式描述=“在线公式 “end =”lead“？> 0.6 其中h 1表示光轴与 反射率呈现局部最大值的位置，hmax表示物镜的有效直径的光轴与最外侧位置之间的距离。

公开(公告)号：US07106525B2

公开(公告)日：2006-09-12

申请号：US10752707

申请日：2004-01-08

申请人： Shuichi Takeuchi ,  Koichi Maruyama

发明人： Shuichi Takeuchi ,  Koichi Maruyama

IPC分类号： G02B13/18 ,  G02B3/02 ,  G11B7/00 ,  G11B7/135

CPC分类号： G11B7/139 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006

摘要： There is provided an objective lens for an optical pick-up used for different types of optical discs. The objective lens has at least one surface on which a plurality of annular zones are formed. The at least one surface is divided into an inner area having a low NA and an outer area having high NA outside the inner area. Further, with regard to a light beam used for a second optical disc (e.g., a DVD), an optical path difference generated between at least one of steps formed between adjacent annular zones of the plurality of annular zones within the outer area is lower by a predetermined amount than an integral multiple of a wavelength of the light beam used for the second optical disc.

摘要翻译： 提供了用于不同类型光盘的光学拾取器的物镜。 物镜具有形成多个环形区域的至少一个表面。 所述至少一个表面被分成具有低NA的内部区域和在所述内部区域之外具有高NA的外部区域。 此外，关于用于第二光盘（例如DVD）的光束，在外部区域中的多个环形区域的相邻环形区域之间形成的至少一个台阶之间产生的至少一个台阶之间产生的光程差较小 比用于第二光盘的光束的波长的整数倍的预定量。

公开(公告)号：US07035193B2

公开(公告)日：2006-04-25

申请号：US11033741

申请日：2005-01-13

申请人： Shuichi Takeuchi ,  Koichi Maruyama ,  Daisuke Koreeda

发明人： Shuichi Takeuchi ,  Koichi Maruyama ,  Daisuke Koreeda

IPC分类号： G11B7/00

CPC分类号： G11B7/1374 ,  G11B7/1353 ,  G11B7/1367 ,  G11B7/13922 ,  G11B2007/0006

摘要： An objective lens for recording data to and/or reproducing data from first and second optical discs. The objective lens is provided with at least one surface including a plurality of annular zones divided by steps. The steps has functions of phase shifting a wavefront of light passing through the plurality of annular zones so that a beam spot formed at a converging point of an average wavefront of the wavefront phase shifted by the steps is used for the first and second optical discs. The plurality of annular zones of the at least one surface includes at least one annular zone structure which includes first and second annular zone groups, each of which has at least three steps for phase shifting the wavefront in a first direction, and a first return step which is a step formed at a boundary between the first and second annular zone groups. The first return step phase shifts the wavefront in a second direction opposite to the first direction. An absolute value |Δψ1| of a phase shifting amount of the first light beam given by the first return step satisfies a condition: 6π

摘要翻译： 用于将数据记录到第一和第二光盘和/或从第一和第二光盘再现数据的物镜。 物镜设置有至少一个表面，其包括被台阶分割的多个环形区域。 这些步骤具有使通过多个环形区域的光的波前相移的功能，使得在第一和第二光盘处使用由步骤偏移的波前相位的平均波前的聚光点处形成的束斑。 所述至少一个表面的多个环形区域包括至少一个环形区域结构，其包括第一和第二环形区域组，每个环形区域组具有至少三个步骤，用于沿第一方向相移所述波阵面;以及第一返回步骤 其是在第一和第二环形区域组之间的边界处形成的台阶。 第一返回阶段相对于与第一方向相反的第二方向偏移波前。 绝对值| Deltapsi1 | 由第一返回步骤给出的第一光束的相移量满足条件：6pi <| Deltapsi1 | <14pi。 。 。 （1）。 绝对值| Deltapsi1 | 由第一返回步骤给出的第一光束的相移量的值小于由第一环形区域组给出的相移量之和的绝对值和相移量之和的绝对值中的较大值 由第二个环形区组给出。

公开(公告)号：US20050281173A1

公开(公告)日：2005-12-22

申请号：US11155477

申请日：2005-06-20

申请人： Daisuke Koreeda ,  Koichi Maruyama

发明人： Daisuke Koreeda ,  Koichi Maruyama

IPC分类号： G11B7/00 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1367 ,  G11B7/1275 ,  G11B7/1374 ,  G11B7/139 ,  G11B7/13922 ,  G11B2007/0006

摘要： An objective lens for an optical pick-up which is used to record data to and/or to reproduce data from at least three types of optical discs by selectively using one of at least three light beams having different wavelengths is provided. When thicknesses of a first, second and optical discs are represented by t1, t2 and t3, respectively, a relationship t1≦t2 NA3 is satisfied. The first, second and third light beams are incident on the objective lens as substantially collimated light beams, respectively. In this configuration, at least one of surfaces of the objective lens includes a first area for attaining the numerical aperture required for recording data to and/or reproducing data from the third optical disc, and a second area located outside the first area. The first area includes an inner area including an optical axis of the objective lens, and an outer area located outside the inner area. The outer area is configured to converge the third light beam on a data recording layer of the third optical disc with an amount of an aberration being substantially zero. The objective lens satisfies a condition: 0.75

摘要翻译： 提供了一种用于通过选择性地使用具有不同波长的至少三个光束中的至少三种类型的光盘来记录数据和/或从至少三种类型的光盘再现数据的用于光学拾取器的物镜。 当第一，第二和光盘的厚度分别由t 1，t 2和t 3表示时，满足关系t 1 <= t 2 = NA 2> NA 3。 第一，第二和第三光束分别作为基本准直的光束入射在物镜上。 在该配置中，物镜的至少一个表面包括用于获得从第三光盘记录数据和/或再现数据所需的数值孔的第一区域和位于第一区域外的第二区域。 第一区域包括包括物镜的光轴的内部区域和位于内部区域外部的外部区域。 外部区域被配置为将第三光束会聚在第三光盘的数据记录层上，其像差量基本为零。 物镜满足条件：0.75

公开(公告)号：US20050157624A1

公开(公告)日：2005-07-21

申请号：US11036989

申请日：2005-01-19

申请人： Dalsuke Koreeda ,  Koichi Maruyama

发明人： Dalsuke Koreeda ,  Koichi Maruyama

IPC分类号： G02B13/00 ,  G02B13/18 ,  G11B7/00 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1353 ,  G11B7/1275 ,  G11B7/1374 ,  G11B2007/0006

摘要： There is provided an optical pick-up used for recording data to and/or reproducing data from at least three types of optical discs having at least two different thicknesses of cover layers. The optical pick-up includes light sources and an objective lens. A thickness t1 of a first optical disc, a thickness t2 of a second optical disc, and a thickness t3 of a third optical disc satisfy a relationship t1≦t2 NA3. Further, a first light beam for the first optical disc is incident on the objective lens as a converging light beam, and the second and third light beams for the second and third optical discs are incident on the objective lens as diverging light beams, respectively. Given that magnification of the objective lens is m1 when the first optical disc is used, magnification of the objective lens is m2 when the second optical disc is used, and magnification of the objective lens is m3 when the first optical disc is used, following conditions are satisfied: m1>0, m3

摘要翻译： 提供了一种用于将数据记录到至少三种类型的具有至少两个不同厚度的覆盖层厚度的光盘中的数据的光学拾取器。 光学拾取器包括光源和物镜。 第一光盘的厚度t 1，第二光盘的厚度t 2和第三光盘的厚度t 3满足关系t 1 <= t 2 = NA 2> NA 3。 此外，用于第一光盘的第一光束作为会聚光束入射在物镜上，并且用于第二和第三光盘的第二和第三光束分别作为发散光束入射在物镜上。 假设当使用第一光盘时物镜的放大倍数为m 1，当使用第二光盘时物镜的倍率为m 2，并且当使用第一光盘时物镜的倍率为m 3 满足以下条件：m 1> 0，m 3

公开(公告)号：US20050078593A1

公开(公告)日：2005-04-14

申请号：US10867736

申请日：2004-06-16

申请人： Koichi Maruyama ,  Daisuke Koreeda

发明人： Koichi Maruyama ,  Daisuke Koreeda

IPC分类号： G11B7/00 ,  G11B7/125 ,  G11B7/135

CPC分类号： G11B7/1367 ,  G11B7/1275 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006

摘要： There is provided an objective lens for an optical pick-up which is used to record/reproduce data to/from at least three types of optical discs. Thicknesses t1, t2 and t3 of cover layers of first, second third optical discs are t1≅0.6 mm, t2≅0.6 mm, and t3≅1.2 mm. Numerical apertures NA1, NA2 and NA3 for the first, second and third optical discs satisfy a relationship NA1≧NA2>NA3. When the first optical disc is used, a substantially collimated light beam is incident on the objective lens. When the second or third optical disc is used, a diverging beam is incident on the objective lens. With regard to magnifications M1, M2 and M3 and focal lengths f1, f2 and f3 of the objective lens for the first, second and third optical discs, the following conditions (1), (2) and (3) are satisfied: −0.02

摘要翻译： 提供了用于光学拾取器的物镜，其用于向/从至少三种类型的光盘记录/再现数据。 第一，第二第三光盘的覆盖层的厚度t1，t2和t3分别为t1≅0.6mm，t2≅0.6mm，t3≅1.2mm。 第一，第二和第三光盘的数值孔径NA1，NA2和NA3满足关系NA1> = NA2> NA3。 当使用第一光盘时，基本上准直的光束入射到物镜上。 当使用第二或第三光盘时，发散光束入射到物镜上。 关于第一，第二和第三光盘的物镜M1，M2和M3以及焦距f1，f2和f3，满足以下条件（1），（2）和（3）：-0.02

公开(公告)号：US06819504B2

公开(公告)日：2004-11-16

申请号：US10235643

申请日：2002-09-06

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G02B302

CPC分类号： G11B7/1374 ,  G11B7/0948 ,  G11B7/1376 ,  G11B7/13922 ,  G11B7/13927

摘要： A single-element objective lens for an optical pick-up directs an incident light beam to a data recording surface of an optical disc through a cover layer to form a beam spot thereon. A numerical aperture of the objective lens is 0.7 or more. The objective lens is configured to compensate for coma such that a characteristic of a change of spherical aberration due to a degree of divergence/convergence of the incident beam is comparable with respect to a characteristic of a change of spherical aberration due to variation of the cover layer so that the change of spherical aberration due to variation of the cover layer can be cancelled by the change of spherical aberration due to a degree of divergence/convergence of the incident beam.

摘要翻译： 用于光学拾取器的单元件物镜通过覆盖层将入射光束引导到光盘的数据记录表面，以在其上形成光束点。 物镜的数值孔径为0.7以上。 物镜被配置为补偿彗差，使得由于入射光束的发散/收敛程度引起的球面像差变化的特性与由于盖的变化引起的球面像差变化的特性相当 使得由于覆盖层的变化引起的球面像差的变化可以通过由入射光束的发散/收敛程度引起的球面像差的变化来抵消。

公开(公告)号：US06775064B2

公开(公告)日：2004-08-10

申请号：US09918440

申请日：2001-08-01

申请人： Koichi Maruyama

发明人： Koichi Maruyama

IPC分类号： G02B518

CPC分类号： G02B5/1895 ,  G02B5/1876 ,  G11B7/1353 ,  G11B7/1374 ,  G11B2007/0006 ,  G11B2007/13727

摘要： The objective lens is a biconvex plastic lens having first and second surfaces which are both aspheric. The objective lens is divided into an inside area which is inside of a circle of an effective diameter of the objective lens and an outside area which is outside of the circle of the effective diameter. A diffractive lens structure having a plurality of concentric ring-shaped steps is formed in the inside area. A surface of the outside area is continuous with no steps and corresponds to a macroscopic base curve of the inside area. The objective lens has a gap of a spherical aberration between the inside area and the outside area.

摘要翻译： 物镜是具有非球面的第一和第二表面的双凸透镜塑料透镜。 物镜被分成在物镜的有效直径的圆的内侧的内侧区域和位于有效直径的圆的外侧的外部区域。 在内部区域中形成具有多个同心环状台阶的衍射透镜结构。 外部区域的表面是连续的，没有步骤，对应于内部区域的宏观基础曲线。 物镜在内部区域和外部区域之间具有球面像差的间隙。