Three-dimensional imaging for semiconductor wafer inspection

    公开(公告)号:US10887580B2

    公开(公告)日:2021-01-05

    申请号:US15683077

    申请日:2017-08-22

    摘要: Methods and systems for improved detection and classification of defects of interest (DOI) on semiconductor wafers based on three-dimensional images are described herein. Three dimensional imaging of volumes of thick, layered structures enables accurate defect detection and estimation of defect location in three dimensions at high throughput. A series of images are acquired at a number of different wafer depths. A three dimensional image of a thick semiconductor structure is generated from the series of images. Defects are identified and classified based on an analysis of the three dimensional image of the thick semiconductor structure. In some examples, the three-dimensional image stack is visualized by contour plots or cross-sectional plots to identify a characteristic defect response. In some examples, the three-dimensional image is processed algorithmically to identify and classify defects. In another aspect, the location of a defect is estimated in three dimensions based on the three dimensional image.

    SYSTEM AND METHOD FOR REAL-TIME CAMERA TRACKING TO FORM A COMPOSITE IMAGE

    公开(公告)号:US20200344425A1

    公开(公告)日:2020-10-29

    申请号:US16857706

    申请日:2020-04-24

    申请人: Matthew Walker

    发明人: Matthew Walker

    摘要: A system and method for tracking the movement of a recording device to form a composite image is provided. The system has a a user device with a sensor array capturing motion data and velocity vector data of the recording device when the recording device is in motion, an attachment member for coupling the user device to the motion capturing device, and a server with program modules. The program modules described are a calibration module for calibrating a position of the user device relative to a position of a lens of the recording device, a recorder module for receiving the motion data and velocity vector data from the sensor array; and a conversion module for combining the position of the user device relative to the lens of the recording device, and the motion data and velocity vector data and transforming the data into a file that is usable by a compositing suite, a three-dimensional application, or both.

    Directed image capture
    63.
    发明授权

    公开(公告)号:US10681264B2

    公开(公告)日:2020-06-09

    申请号:US16040663

    申请日:2018-07-20

    申请人: HOVER INC.

    摘要: A process is provided for graphically guiding a user of a capture device (e.g., smartphone) to more accurately capture a series of images of a building. Images are captured as the picture taker moves around the building—taking a plurality (e.g., 4-16) of images from multiple angles and distances. Before capturing an image, a quality of the image may be determined to prevent low quality images from being captured or to provide instructions on how to improve the quality of the image capture. The series of captured images are uploaded to an image processing system to generate a 3D building model that is returned to the user. The returned 3D building model may incorporate scaled measurements of building architectural elements and may include a dataset of measurements for one or more architectural elements such as siding (e.g., aluminum, vinyl, wood, brick and/or paint), windows, doors or roofing.

    NAVIGATING AMONG IMAGES OF AN OBJECT IN 3D SPACE

    公开(公告)号:US20200065558A1

    公开(公告)日:2020-02-27

    申请号:US16671753

    申请日:2019-11-01

    摘要: A three-dimensional model of an object is employed to aid in navigation among a number of images of the object taken from various viewpoints. In general, an image of an object such as a digital photograph is displayed in a user interface or the like. When a user selects a point within the display that corresponds to a location on the surface of the object, another image may be identified that provides a better view of the object. In order to maintain user orientation to the subject matter while navigating to this destination viewpoint, the display may switch to a model view and a fly-over to the destination viewpoint may be animated using the model. When the destination viewpoint is reached, the display may return to an image view for further inspection, marking, or other manipulation by the user.

    Three-dimensional dense structure from motion with stereo vision

    公开(公告)号:US10469828B2

    公开(公告)日:2019-11-05

    申请号:US15202841

    申请日:2016-07-06

    摘要: Disclosed examples include three-dimensional imaging systems and methods to reconstruct a three-dimensional scene from first and second image data sets obtained from a single camera at first and second times, including computing feature point correspondences between the image data sets, computing an essential matrix that characterizes relative positions of the camera at the first and second times, computing pairs of first and second projective transforms that individually correspond to regions of interest that exclude an epipole of the captured scene, as well as computing first and second rectified image data sets in which the feature point correspondences are aligned on a spatial axis by respectively applying the corresponding first and second projective transforms to corresponding portions of the first and second image data sets, and computing disparity values of a stereo disparity map according to the rectified image data sets to construct.

    Image generating device and image generating method

    公开(公告)号:US10410562B2

    公开(公告)日:2019-09-10

    申请号:US14411675

    申请日:2013-04-23

    摘要: An image generating device configured to provide a cloud service to a head-mounted display via a network is provided. A photographed image receiving section 510 receives a plurality of photographed images photographed in different photographing directions. A panoramic image processing section 530 generates a panoramic image by synthesizing the plurality of photographed images photographed in the different photographing directions. A format converting section 540 converts the panoramic image into an image format suitable for specifications of the head-mounted display. A panoramic image transmitting section 550 transmits the panoramic image after format conversion to the head-mounted display.

    Information processing to generate depth information of an image

    公开(公告)号:US10375377B2

    公开(公告)日:2019-08-06

    申请号:US14476966

    申请日:2014-09-04

    申请人: SONY CORPORATION

    发明人: Tatsuo Fujiwara

    摘要: There is provided an information processing apparatus including an acquisition unit configured to acquire one standard image and images of lower resolution than resolution of the standard image, the standard image and images of lower resolution being acquired through image shooting by one camera, a camera posture estimating unit configured to estimate a first camera posture in which the standard image has been shot and second camera postures in which the images have been shot, a storage unit configured to store each of the images along with each of the second camera postures, and a depth information generating unit configured to generate depth information on the standard image by using the standard image, an image obtained by lowering the resolution of the standard image and the first camera posture, and at least a part of the images and a second camera posture for the part of the images.

    ROBOT-BASED 3D PICTURE SHOOTING METHOD AND SYSTEM, AND ROBOT USING THE SAME

    公开(公告)号:US20190208180A1

    公开(公告)日:2019-07-04

    申请号:US16205282

    申请日:2018-11-30

    IPC分类号: H04N13/221 H04N13/128

    摘要: The present disclosure provides a robot-based 3D picture shooting method and system and a robot using the same. The method includes: obtaining a distance between a photographed object and the photographing device of the robot based on a received shooting instruction; calculating an inter-axis distance based on the distance; obtaining the first picture after moving the robot for half of the inter-axis distance along the movement direction; obtaining the second picture after moving the robot for entire of the inter-axis distance from a current position along an opposite direction of the movement direction; and synthesizing the first picture and the second picture to obtain a 3D picture of the photographed object. In the process, the robot moves the photographing device according to the calculated inter-axis distance, and obtains two pictures of the left and right of the photographed object, which is not necessary to use a binocular camera.

    Systems and methods for processing a 2D video

    公开(公告)号:US10274735B2

    公开(公告)日:2019-04-30

    申请号:US15842389

    申请日:2017-12-14

    申请人: Unity IPR ApS

    摘要: A system includes one or more hardware processors, a head mounted display (HMD), a digital camera device, and a path extraction engine. The path extraction engine is configured to receive two-dimensional (2D) video from the digital camera device, the 2D video presenting a 2D view of a three-dimensional (3D) object, the digital camera device moving along a camera path as the digital camera device captures the 2D video, identify a plurality of 2D features associated with the 3D object within the 2D video, track the plurality of 2D features across multiple frames of the 2D video, estimate motion in pixels associated with each 2D feature of the plurality of 2D features, using the estimated motion in the pixels, identify 2D motion caused by the digital camera device moving along the camera path, and compute a first camera position of the digital camera device based on the identified 2D motion.