SOLID-STATE LASER DEVICE, SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE

    公开(公告)号:US20190305508A1

    公开(公告)日:2019-10-03

    申请号:US16446662

    申请日:2019-06-20

    申请人: Gigaphoton Inc.

    摘要: A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

    DUAL-COMB GENERATION FROM A SINGLE LASER CAVITY VIA SPECTRAL SUBDIVISION

    公开(公告)号:US20190280450A1

    公开(公告)日:2019-09-12

    申请号:US16296586

    申请日:2019-03-08

    摘要: A method for generating a single-cavity dualcomb or multicomb for laser spectroscopy, the method comprising the steps of providing a laser system comprising a pump source, a gain medium, and a resonator having a spectral filter; spectrally filtering, by the spectral filter, light in the resonator and attenuating, in particular blocking, by the spectral filter, one or more wavelength bands at least one of which being located completely within the gain bandwidth of the laser system such that two or more at least partially separated spectral regions are provided; mode-locking the two or more at least partially separated spectral regions.

    Solid-state laser device, solid-state laser system, and laser device for exposure device

    公开(公告)号:US10374382B2

    公开(公告)日:2019-08-06

    申请号:US16124434

    申请日:2018-09-07

    申请人: GIGAPHOTON INC.

    摘要: A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

    Method and apparatus for delivering the fiber laser radiation into dynamical waveguide

    公开(公告)号:US10371906B1

    公开(公告)日:2019-08-06

    申请号:US15873143

    申请日:2018-01-17

    摘要: A technique for delivery of a divergent laser beam emitted with a free-space laser fiber facet, the beam having an optical power, into an optical waveguide. An optical axis of the laser beam is aligned approximately along a propagation Z direction into the optical waveguide. The fiber facet is located in a first plane perpendicular to the Z direction. The waveguide includes an input, direction, and X-Y position of the input in a second plane. The waveguide includes fluctuations in a X-Y-Z position of the input and fluctuations in direction. The laser beam is transformed into a collimated beam by re-directing a propagation of the laser beam, shifting the laser beam parallel to the Z direction, and focusing the laser beam into the input. The speed of transformation of the laser beam is greater than an instant speed of the fluctuations. A maximum optical power is delivered into the waveguide.

    Pulse laser device
    67.
    发明授权

    公开(公告)号:US10367328B2

    公开(公告)日:2019-07-30

    申请号:US15643456

    申请日:2017-07-06

    发明人: Jin-Long Peng

    摘要: A laser device with a ring laser resonator includes a polarization maintaining (PM) fiber, a first quarter waveplate, and an optical isolator. The PM fiber has a light input end and a light output end and is configured to guide a first linearly polarized light with a first phase along a fast axis of the PM fiber from the light input end and a second linearly polarized light with a second phase along a slow axis of the PM fiber from the input end. The first quarter waveplate is disposed at the light output end of the PM fiber and configured to convert the first and the second linearly polarized lights into left-handed and right-handed (or right-handed and left-handed) circularly polarized lights, respectively. The optical isolator is configured to unidirectionally transmit a laser pulse in the ring laser resonator.

    Light source device and information acquisition apparatus

    公开(公告)号:US10348049B2

    公开(公告)日:2019-07-09

    申请号:US15367942

    申请日:2016-12-02

    发明人: Hideo Iwase

    摘要: Provided is a light source device including a fiber laser, an amplifier, and a nonlinear fiber. Group delay dispersions D1 and D2 are a positive value, the light velocity in a vacuum is denoted as c, a spectral full width at half maximum of the pulse light is denoted as Δλ, the center wavelength of the pulse light is denoted as λ, a coefficient based on a shape of the pulse light is denoted as a, a value of the spectral full width at half maximum Δλ at which a function T(Δλ): T ⁡ ( Δλ ) = ( a × λ 2 c × Δλ ) ⁢ 1 + [ ( D ⁢ ⁢ 1 + D ⁢ ⁢ 2 ) ⁢ ( c × Δλ a × λ 2 ) 2 ] 2 is the minimum is denoted as Δλ_min, and Δλ at which a change amount of T(Δλ) when Δλ increases by 1 nm of λ becomes −3 dB is denoted as Δλ_3 dB, and Δλ satisfies Δλ_3 dB≤Δλ≤Δλ_min×2.

    Graphene-based optical sub-system
    69.
    发明授权

    公开(公告)号:US10333266B2

    公开(公告)日:2019-06-25

    申请号:US15031872

    申请日:2014-10-27

    申请人: ATLA LASERS AS

    发明人: Irina T. Sorokina

    摘要: The present disclosure provides an optical sub-system for a passive, mode-locked laser optical system. The optical sub-system may include a graphene-based saturable absorber and an optical device configured to control dispersion properties of the laser optical system. The graphene-based saturable absorber may be supported by the optical device.

    ELECTROMAGNETIC RADIATION BEAM SCANNING SYSTEM AND METHOD

    公开(公告)号:US20190187461A1

    公开(公告)日:2019-06-20

    申请号:US16219801

    申请日:2018-12-13

    申请人: Avava, Inc.

    IPC分类号: G02B26/12 H01S3/11 G06K7/10

    摘要: An electromagnetic beam scanning system and corresponding method of use is provided. The system includes a motor, a reciprocating mechanism, and a focus optic. The motor is configured to generate a rotational movement. The reciprocating mechanism is operatively coupled with the motor and configured to convert the rotational movement to a reciprocating movement including a plurality of strokes along a first scanned axis. The reciprocating movement has a constant speed over a portion of at least one stroke of the plurality of strokes. The focus optic is operatively coupled to the reciprocating mechanism such that the focus optic moves experiences the reciprocating movement of the reciprocating mechanism. The focus optic is configured to focus an electromagnetic radiation (EMR) beam incident upon the focus optic to a focus along an optical axis substantially orthogonal to the first scanned axis.