公开(公告)号：US20060180897A1

公开(公告)日：2006-08-17

申请号：US11342564

申请日：2006-01-31

Applicant: Yun-kwon Park ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song

Inventor： Yun-kwon Park ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song

IPC: H01L29/06 ,  H01L21/30

CPC classification number: H01L25/165 ,  H01L2924/0002 ,  H01L2924/09701 ,  H03H9/1057 ,  H01L2924/00

Abstract: A RF system which includes a silicon substrate formed with at least one via-hole filled with conductive material so that both sides of the silicon substrate are electrically connected with one another; at least one flat device formed on one side of the silicon substrate; and at least one RF MEMS device formed on the other side of the silicon substrate.

Abstract translation: 一种RF系统，包括形成有填充有导电材料的至少一个通孔的硅衬底，使得硅衬底的两侧彼此电连接; 形成在所述硅衬底的一侧上的至少一个平面器件; 以及形成在硅衬底的另一侧上的至少一个RF MEMS器件。

公开(公告)号：US07020950B2

公开(公告)日：2006-04-04

申请号：US09955061

申请日：2001-09-19

Applicant: Soon-kyo Hong ,  Chul-woo Lee ,  Seung-tae Jung ,  Sung-hoon Choa

Inventor： Soon-kyo Hong ,  Chul-woo Lee ,  Seung-tae Jung ,  Sung-hoon Choa

IPC: G11B5/127 ,  H04R31/00

CPC classification number: G11B33/08 ,  B23K26/0823 ,  B23K26/1462 ,  Y10T29/49025 ,  Y10T29/49036 ,  Y10T29/53165

Abstract: A disc balancing device and a method thereof. The disc balancing device includes a disc assembly having a driving source, and a disc rotatably disposed at the driving source, a displacement measurement unit measuring vibration in the rotation of the disc assembly, a phase angle measurement unit measuring a phase angle from a reference point of the disc assembly in the rotation of the disc assembly, an operation/control unit calculating an eccentric mass and an eccentric position of the disc assembly, by using the biased vibration measured in the displacement measurement unit and the phase angle measured in the phase angle measurement unit, and a laser cutter tracking and laser-cutting the side portion of the disc corresponding to the eccentric position according to the information from the operation/control unit, whereby the eccentric mass of the disc assembly is balanced to reduce vibration in the rotation.

Abstract translation: 一种光盘平衡装置及其方法。 盘平衡装置包括具有驱动源的盘组件和可旋转地设置在驱动源处的盘，测量盘组件的旋转中的振动的位移测量单元，相位角测量单元，其从参考点 通过使用在位移测量单元中测量的偏置振动和在相位角测量的相位角来计算盘组件的偏心质量和偏心位置的操作/控制单元 测量单元和激光切割器根据来自操作/控制单元的信息跟踪和激光切割对应于偏心位置的盘的侧部，由此平衡盘组件的偏心质量以减少旋转中的振动 。

公开(公告)号：US20050001274A1

公开(公告)日：2005-01-06

申请号：US10838326

申请日：2004-05-05

Applicant: Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song ,  Young-tack Hong

Inventor： Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song ,  Young-tack Hong

IPC: H03H9/15 ,  H03H3/02 ,  H03H9/17 ,  H01L21/00 ,  H01L27/14 ,  H01L29/82

CPC classification number: H03H9/02133 ,  H03H3/02 ,  H03H9/172 ,  Y10T29/42

Abstract: A method of manufacturing a film bulk acoustic resonator and the resonator manufactured thereby. The method includes the laminating a sacrificial layer on a semiconductor substrate, removing a predetermined area from the sacrificial layer to realize electric contact between a signal line of the semiconductor substrate and a lower electrode, forming the lower electrode by depositing metal film for lower electrode on the sacrificial layer, by patterning based on a shape of the sacrificial layer, forming a piezoelectric layer by depositing a piezoelectric material on the lower electrode and by patterning based on a shape of the lower electrode, and forming an upper electrode by depositing metal film on the piezoelectric layer and by patterning based on a shape of the piezoelectric layer, wherein at least one of a deposition pressure and a deposition power is controlled to generate upward stress when depositing the metal film for the lower electrode.

Abstract translation: 一种制造薄膜体声波谐振器的方法和由此制造的谐振器。 该方法包括在半导体衬底上层叠牺牲层，从牺牲层去除预定区域以实现半导体衬底的信号线与下电极之间的电接触，通过在下电极上沉积金属膜形成下电极 牺牲层，通过基于牺牲层的形状进行图案化，通过在下电极上沉积压电材料并基于下电极的形状进行图案化形成压电层，并且通过将金属膜沉积在上而形成上电极 压电层和基于压电层的形状的图案化，其中当沉积用于下电极的金属膜时，沉积压力和沉积功率中的至少一个被控制以产生向上的应力。