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公开(公告)号：US5982709A
公开(公告)日：1999-11-09
申请号：US52818
申请日：1998-03-31
CPC分类号： H01L41/0973
摘要： There is provided an acoustic transducer which includes a membrane of selected size and shape supported at its edges spaced from a first conductive electrode by an integral support structure with the second conductive electrode comprising a thin metal film on the membrane. The active membrane area is undisturbed by etch vias.
摘要翻译： 提供了一种声换能器，其包括选定尺寸和形状的膜，其膜的边缘通过整体支撑结构与第一导电电极间隔开，第二导电电极在膜上包括薄金属膜。 活性膜面积不受蚀刻通孔的干扰。
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公开(公告)号：US5619476A
公开(公告)日：1997-04-08
申请号：US327210
申请日：1994-10-21
CPC分类号： B06B1/0292 , B06B1/0696 , H02N1/006
摘要： An electrostatic ultrasonic transducer formed on a semiconductor substrate by micro-machining wherein the transducer includes a silicon nitride membrane supported above the surface of the substrate by insulating supports; and the substrate and membrane define the electrodes of the transducer.
摘要翻译： 一种通过微加工形成在半导体衬底上的静电超声波换能器，其中所述换能器包括通过绝缘支撑件支撑在所述衬底的表面上方的氮化硅膜; 并且衬底和膜限定换能器的电极。
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公开(公告)号：US5339101A
公开(公告)日：1994-08-16
申请号：US815730
申请日：1991-12-30
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： A printhead for an acoustic ink printer has a piezoelectric transducer on one surface of a substrate. A layer of a dielectric material is provided on the surface of the transducer away from the substrate. A Fresnel lens is formed in the surface of the dielectric layer away from the transducer, for focusing sound energy near the surface of a body of ink adjacent the dielectric layer. Thus the transducer and lens are both on the same side of the substrate. A pit may be formed in the substrate under the transducer. The transducer may be a body of piezoelectric material sandwiched between a pair of electrodes, the lower electrode of which has a thickness that is a quarter wave at the excitation frequency of the transducer. An anti-reflective coating may be provided on the lower surface of the substrate, with a body of an absorptive material abutting the anti-reflective layer, or an absorptive material having an acoustic impedance approximately matching that of the substrate may be coated on the lower surface of the substrate.
摘要翻译： 用于声学墨水打印机的打印头在基板的一个表面上具有压电换能器。 介电材料层设置在远离基板的换能器表面上。 在电介质层的表面上形成菲涅尔透镜，远离换能器，用于将声能聚焦在靠近电介质层的墨体表面附近。 因此，传感器和透镜都在基板的相同侧上。 可以在换能器下方的基板中形成凹坑。 换能器可以是夹在一对电极之间的压电材料体，其下电极具有在换能器的激发频率下的四分之一波长的厚度。 可以在基板的下表面上设置抗反射涂层，吸收材料的主体邻接抗反射层，或者具有与基板大致匹配的声阻抗的吸收材料可以涂覆在下部 基板的表面。
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公开(公告)号：US5319977A
公开(公告)日：1994-06-14
申请号：US718234
申请日：1991-06-20
IPC分类号： G01B17/00 , G01N29/06 , G01N29/24 , G01N37/00 , G01Q10/00 , G01Q20/00 , G01Q60/04 , G01Q60/06 , G01Q60/22 , G01S15/89 , G01N29/08
CPC分类号： G01N29/0681 , G01H3/125 , G01Q60/32 , G01S15/8945 , G01N2291/02827 , G01N2291/048 , Y10S977/86
摘要： An acoustic microscope assembly for atomic level inspection of a target object includes a cantilever arm with a sharp tip on its lower surface and a zinc oxide piezoelectric thin film on its upper surface. High frequency excitation signals, having a frequency of at least 50 Megahertz, are applied to the piezoelectric thin film so as to generate high frequency acoustic signals that are transmitted through the sharp tip so as to impact on a target object. The assembly can either receive acoustic signals reflected by the target object, or it can receive acoustic signals that have propagated through the target object. One method of using this assembly is to apply a continuous wave signal to the piezoelectric thin film while scanning the target object, and measuring characteristics of the target object at various positions thereof by measuring the resonant frequency of the transmitted high frequency acoustic signals. Other methods include pulsed operation, and combining acoustic measurements with atomic force measurements and/or tunneling current measurements to characterize a target object. The acoustic microscope assembly can also be used for storing information on a substrate, by deforming the substrate at selected positions, and for reading such stored information by determining which positions on a substrate have been deformed.
摘要翻译： 用于目标物体的原子级检查的声学显微镜组件包括在其下表面具有尖锐尖端的悬臂和在其上表面上的氧化锌压电薄膜。 将具有至少50兆赫兹频率的高频激励信号施加到压电薄膜上，以便产生通过尖尖传输以便对目标物体产生影响的高频声信号。 组件可以接收由目标对象反射的声信号，或者它可以接收已传播通过目标对象的声信号。 使用该组件的一种方法是在扫描目标物体的同时向压电薄膜施加连续波信号，并且通过测量发射的高频声信号的谐振频率来测量其各个位置处的目标物体的特性。 其他方法包括脉冲操作，以及将声学测量与原子力测量和/或隧道电流测量结合以表征目标对象。 声学显微镜组件还可以用于在基板上存储信息，通过使基板在选定位置变形，并且通过确定基板上的哪些位置已经变形来读取这些存储的信息。
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公开(公告)号：US5268610A
公开(公告)日：1993-12-07
申请号：US815731
申请日：1991-12-30
CPC分类号： B06B1/067 , B41J2/14008
摘要： An acoustic ink printer transducer comprising a piezoelectric layer positioned between two suitable electrode materials. Also, a method for obtaining second harmonic operations from an acoustic ink printer transducer to enable ejection of a number of different ink droplet sizes from the acoustic ink printer thereby facilitating grey scale printing.
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公开(公告)号：US4620443A
公开(公告)日：1986-11-04
申请号：US681229
申请日：1984-12-13
CPC分类号： G01N29/06
摘要： A scanning acoustic microscope is disclosed for the detection and location of near surface flaws, inclusions or voids in a solid sample material. A focused beam of acoustic energy is directed at the sample with its focal plane at the subsurface flaw, inclusion or void location. The sample is scanned with the beam. Detected acoustic energy specularly reflected and mode converted at the surface of the sample and acoustic energy reflected by subsurface flaws, inclusions or voids at the focal plane are used for generating an interference signal which is processed and forms a signal indicative of the subsurface flaws, inclusions or voids.
摘要翻译： 公开了用于在固体样品材料中检测和定位近表面缺陷，夹杂物或空隙的扫描声学显微镜。 聚焦的声能光束以其表面缺陷，夹杂物或空隙位置处的焦平面指向样品。 样品用光束扫描。 在样品表面镜面反射和模式转换的检测到的声能被用于由焦平面上的地下瑕疵，夹杂物或空隙反射的声能，产生干涉信号，该干涉信号被处理并形成指示地下瑕疵，夹杂物 或空洞。
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77.发明授权
公开(公告)号：US4503708A
公开(公告)日：1985-03-12
申请号：US464394
申请日：1983-02-07
CPC分类号： G01N29/0681 , G01S15/8906
摘要： An acoustic microscope comprising a transducer for transmitting acoustic signals towards the surface to be studied, and means for receiving at least one reflected signal from the surface; in many embodiments of the invention, signals are received from two separate points. The signals received are passed to a synchronous phase detection system for analysis. The signals may be received at the same phase detector input and separated according to their expected time of receipt relative to their time of transmission, or they may be received at separated points on the transducer related to their separated points of transmission. The separated return signals are compared on the basis of phase (and in certain embodiments, magnitude) differential either to each other or to an internally generated reference signal to analyze the surface characteristics of the material.
摘要翻译： 一种声学显微镜，包括用于向待研究的表面传送声学信号的换能器，以及用于从所述表面接收至少一个反射信号的装置; 在本发明的许多实施例中，从两个分开的点接收信号。 接收到的信号被传递到同步相位检测系统进行分析。 信号可以在相同的相位检测器输入处接收，并根据其相对于其传输时间的预期接收时间分离，或者它们可以在与其分离的传输点相关的传感器上的分离点处被接收。 基于相位（和在某些实施例中的幅度）差分彼此或与内部产生的参考信号对分离的返回信号进行比较，以分析材料的表面特性。
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