公开(公告)号：US5389787A

公开(公告)日：1995-02-14

申请号：US137976

申请日：1993-10-19

申请人： Hideo Todokoro ,  Tadashi Otaka

发明人： Hideo Todokoro ,  Tadashi Otaka

IPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J31/256

CPC分类号： H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756 ,  H01J2237/057 ,  H01J2237/18 ,  H01J2237/204 ,  H01J2237/244

摘要： In a scanning electron microscope with such a structure that a retarding static field for an electron beam is produced between an objective lens and a sample, when the following three conditions can be satisfied, a switch for applying a superimposed voltage is closed to apply the superimposed voltage to the sample. In the first condition, a switch for applying an acceleration voltage is closed and the acceleration voltage 5 is applied. In the second condition, both of a valve and a valve are opened which are provided between a cathode and the sample. In the third condition, when the sample is mounted on a sample stage by a sample replacing mechanism 57, a valve through which the sample passes is closed. The sample stage is electrically connected via a discharge resistor to a sample holder, and when the switch is opened, electric charges charged on the sample are discharged through the sample holder and the sample stage. As a result, when the sample is mounted/released onto/from the sample stage, the application of the voltage to the sample is automatically interrupted.

摘要翻译： 在具有在物镜和样品之间产生电子束的延迟静电场的结构的扫描电子显微镜中，当满足以下三个条件时，关闭用于施加叠加电压的开关，以施加叠加的 样品电压。 在第一条件下，施加加速电压的开关闭合，施加加速电压5。 在第二条件下，打开阀和阀两者，其设置在阴极和样品之间。 在第三条件下，当通过样品更换机构57将样品安装在样品台上时，样品通过的阀关闭。 样品台通过放电电阻器与样品架电连接，当开关断开时，样品上的电荷通过样品架和样品台放电。 结果，当将样品安装/释放到样品台上或从样品台释放时，对样品的电压施加自动中断。

公开(公告)号：US5387793A

公开(公告)日：1995-02-07

申请号：US133860

申请日：1993-10-12

申请人： Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka

发明人： Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka

IPC分类号： G01T1/28 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/28

摘要： Provided between an optical axis of a primary electron beam directed to a specimen and a secondary electron detector for detecting secondary electrons emitted from the specimen is a shielding electrode which has a transparency for secondary electrons and has a shielding effect for an attracting electric field produced by the secondary electron detector. An opposed electrode is provided at a position facing the shielding electrode with the optical path of the electron beam disposed therebetween. Applied across the shielding electrode and the opposed electrode is a voltage which produces a deflecting electric field along the electron beam path in the vicinity of the secondary electron detector. The deflecting electric field deflects the secondary electrons to the shielding electrode side so that they pass therethrough before they are captured by the secondary electron detector. Optical axis correction coils are provided for generating a magnetic field to correct any bending effect on the trajectory of the primary electron beam by the deflecting electric field.

摘要翻译： 在被检测的一次电子束的光轴与用于检测从试样发出的二次电子的二次电子检测器之间设置有对二次电子具有透明性的屏蔽电极，并且具有对由吸收电场产生的吸引电场的屏蔽效果 二次电子检测器。 在面对屏蔽电极的位置处提供相对电极，其中电子束的光路设置在其间。 施加在屏蔽电极和相对电极两端的是在二次电子检测器附近沿着电子束路径产生偏转电场的电压。 偏转电场将二次电子偏转到屏蔽电极侧，使得它们在被二次电子检测器捕获之前通过它们。 光轴校正线圈用于产生磁场，以通过偏转电场来校正对一次电子束的轨迹的任何弯曲效应。

公开(公告)号：US5202564A

公开(公告)日：1993-04-13

申请号：US773729

申请日：1991-10-09

申请人： Hideo Todokoro ,  Kenji Takamoto ,  Tadashi Otaka

发明人： Hideo Todokoro ,  Kenji Takamoto ,  Tadashi Otaka

摘要： An SEM can inspect a groove or hole in the surface of a specimen by irradiating the specimen with a high energy electron beam. The SEM is used in the manufacturing process of a semiconductor device to observe the configuration of the bottom of a deep hole.

公开(公告)号：US5026995A

公开(公告)日：1991-06-25

申请号：US539810

申请日：1990-06-18

申请人： Eiichi Hazaki ,  Tadashi Otaka ,  Minoru Shimizu

发明人： Eiichi Hazaki ,  Tadashi Otaka ,  Minoru Shimizu

IPC分类号： F16K3/18 ,  H01J37/18

CPC分类号： H01J37/18 ,  F16K3/186 ,  F16K51/02

摘要： In a particle beam surface analyzer, having a partition wall separation a vacuum space, an opening that is provided in a partition wall through which the particle beam is taken out, a seal member which is moved along a seal surface of the seal member and seals the opening, a condenser lens which converges the particle beam onto the sample, and detector for detecting a physical quantity from the sample when the particle beam is irradiated on the sample, the surface analyzer further has a movable shift member that pushes one side surface of the seal member along the seal surface of the seal member and a stopping member which the other side surface of the seal member having a predetermined angle being larger than 55.degree. and smaller than 75.degree. to the seal surface is abutted so as to move the seal member along the other side surface till the seal member reaches the openings, whereby resultant forces between the seal member and the seal surface in the side of the one side surface is equal to that in the side of the other side surface. As the predetermined angle is larger than 55.degree. and smaller than 75.degree. to the seal surface, the abrasion and seizure of the seal member are prevented and the contamination of the sample is lessened.

摘要翻译： 在具有隔壁分离真空空间的分隔壁的粒子束表面分析装置中，设置在分隔壁中的用于取出粒子束的开口，密封构件沿密封构件的密封面移动并密封 开口，将粒子束收敛到样品上的聚光透镜，以及当将粒子束照射在样本上时用于检测来自样品的物理量的检测器，表面分析器还具有将移动部件的一侧表面 所述密封构件沿着所述密封构件的密封面被密封，所述密封构件的与所述密封面大于55度且小于75度的预定角度的另一侧面的止动构件抵接，以使所述密封件 构件沿着另一侧表面直到密封构件到达开口，由此密封构件和侧面中的密封表面之间的结合力等于t o在另一侧表面的一侧。 当预定角度大于55°且小于75°时，密封件的磨损和咬住被阻止，样品的污染减少。