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    Optical method of detecting defect and apparatus used therein
    7.
    发明授权
    Optical method of detecting defect and apparatus used therein 失效
    检测缺陷的光学方法及其中使用的装置

    公开(公告)号：US5894345A

    公开(公告)日：1999-04-13

    申请号：US859423

    申请日：1997-05-20

    申请人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    发明人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui ,  Kazumasa Takata

    IPC分类号： G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  G01N21/00

    CPC分类号： G01N21/8903

    摘要： An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.

    摘要翻译： 使用具有一维设置的半导体激光源的阵列光源1和投射透镜2来照射被检查物体，使得从阵列光源投射的光束在物体上形成虚线。 线传感器用于通过物镜3接收从成像区域11发出的远离照明区域12的光。图像信号，通过预处理单元7馈送到图像处理单元8，从预处理单元7产生来自 在承载物体6的台架5正在逐渐移动的同时，对线传感器4和台5进行处理，通过检测物体的光学非均匀部分来检查物体6的裂纹缺陷9和10。 该方法允许以高精度快速检测诸如陶瓷基板或烧结金属产品的物体的裂纹缺陷。

    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor
    8.
    发明授权
    Phase grating, its fabricating method, optical encoder, motor using the optical encoder, and robot using the motor 失效
    相位光栅，其制造方法，光学编码器，使用光学编码器的电动机和使用电动机的机器人

    公开(公告)号：US5754341A

    公开(公告)日：1998-05-19

    申请号：US661154

    申请日：1996-06-10

    申请人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    发明人： Kazumasa Takata ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito ,  Atsushi Fukui

    IPC分类号： G01D5/38 ,  G02B5/18 ,  G02B27/46

    CPC分类号： G02B5/1871 ,  G02B27/46 ,  Y10S359/90

    摘要： A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula .vertline.n-n.sub.0 .vertline..times.(p-d'/e)/p.times.d'=(.lambda./2).times.(1+2m) (where m=0, .+-.1, .+-.2, . . . ) in terms of center wavelength .lambda. of light having partial interference to be diffracted by the phase grating, pitch length p of the phase grating, refractive index n of base material of the phase grating, refractive index n.sub.0 of medium surrounding the phase grating, and shape ratio e as the ratio of grating depth to width of slope of the concave part.

    摘要翻译： 相位光栅具有基本上为矩形形状类型的凹部，光栅深度在与公式| n-n0 | x（p-d'/ e）/ pxd'=（ λ/ 2）x（1 + 2m）（其中m = 0，+/- 1，+/- 2，...）就具有待被相位光栅衍射的部分干涉的光的中心波长λ 相位光栅的长度p，相位光栅的基材的折射率n，围绕相位光栅的介质的折射率n0，以及作为凹部的光栅深度与斜率宽度的比率的形状比e。

    Optical encoder with dual diffraction grating
    9.
    发明授权
    Optical encoder with dual diffraction grating 失效
    具有双衍射光栅的光学编码器

    公开(公告)号：US5696373A

    公开(公告)日：1997-12-09

    申请号：US711513

    申请日：1996-09-10

    申请人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    发明人： Atsushi Fukui ,  Kanji Nishii ,  Kenji Takamoto ,  Masami Ito

    IPC分类号： G01B11/00 ,  G01D5/38 ,  G02B5/18 ,  G02B27/42 ,  G03F9/00 ,  H01J3/14

    CPC分类号： G03F9/70 ,  G01D5/38

    摘要： An optical encoder including a light source and a first grating plate having a first diffraction grating for diffracting a light beam emitted from the light source. The optical encoder further includes a second grating plate having a second diffraction grating including a blazed diffraction grating for further diffracting the light beam diffracted by the first diffraction grating so as to allow the light beam to be incident on the first grating plate. The optical encoder also includes a light-receiving portion for receiving the light beam reentering the first grating plate and diffracted by the first grating plate. The second diffraction grating is designed so that the greater part of the diffracted light is concentrated in diffracted light beam of a predetermined order among the light beams from the first diffraction grating, and the diffracted light beam of the predetermined order travels from the second diffraction grating in a direction which is parallel with a direction in which the light beam is incident on the second diffraction grating from the first grating plate. The light-receiving portion generates an electric signal in accordance with an amount of plus and minus mth-order diffracted light beams of the further diffracted light beam.

    摘要翻译： 一种光学编码器，包括光源和具有用于衍射从光源发射的光束的第一衍射光栅的第一光栅板。 光学编码器还包括具有第二衍射光栅的第二光栅板，第二衍射光栅包括闪耀的衍射光栅，用于进一步衍射由第一衍射光栅衍射的光束，以允许光束入射在第一光栅板上。 光学编码器还包括用于接收重新进入第一光栅板并被第一光栅板衍射的光束的光接收部分。 第二衍射光栅被设计成使得衍射光的大部分集中在来自第一衍射光栅的光束之间的预定次数的衍射光束中，并且预定次数的衍射光束从第二衍射光栅行进 在与第一光栅板上的光束入射到第二衍射光栅上的方向平行的方向上。 光接收部分根据进一步的衍射光束的正和负的第m级衍射光束的量产生电信号。

    Method and apparatus for optical inspection
    10.
    发明授权
    Method and apparatus for optical inspection 失效
    光学检测方法和装置

    公开(公告)号：US5699153A

    公开(公告)日：1997-12-16

    申请号：US550682

    申请日：1995-10-31

    申请人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui

    发明人： Kenji Takamoto ,  Kanji Nishii ,  Masami Ito ,  Atsushi Fukui

    IPC分类号： G01B11/00 ,  G01N21/88 ,  G01N21/896 ,  G01N21/952 ,  G01N21/958

    CPC分类号： G01N21/4795 ,  G01N21/88 ,  G01N2021/4735

    摘要： The present invention provides an inspecting method and an apparatus therefor. A light illuminates an object to be inspected having optical diffusive characteristics such as a ceramics plate. A part of the light diffuses in the object from an illumination area is reflected at or passes through a defect such as a crack and reaches an imaging area. An image sensor detects the image of the imaging area. A signal showing a larger change is processed thereby to inspect the defect. The object is displaced stepwise relative to the light source and the image sensor. Thus, a crack or the like in an object can be inspected with high accuracy and at a high speed.

    摘要翻译： 本发明提供一种检查方法及其装置。 光照射具有诸如陶瓷板的光漫射特性的待检查物体。 来自照明区域的物体中的光的一部分被反射或穿过诸如裂纹的缺陷，并到达成像区域。 图像传感器检测成像区域的图像。 处理显示较大变化的信号，从而检查缺陷。 物体相对于光源和图像传感器逐步移位。 因此，可以高精度和高速度地检查物体中的裂纹等。