Multiprobe and scanning probe microscope
    71.
    发明授权
    Multiprobe and scanning probe microscope 失效
    多功能和扫描探针显微镜

    公开(公告)号:US06469293B1

    公开(公告)日:2002-10-22

    申请号:US09514096

    申请日:2000-02-28

    IPC分类号: H01J516

    摘要: A multiprobe device is provided for a scanning probe instrument and has a plurality of individually-selectable probe members for conducting scanning probe operations. The multiprobe has a plurality of cantilever probes supported by a support member. Each of the cantilevers is individually-selectable for use in conducting scanning probe operations, and each has a different resonance frequency from the others. In a preferred embodiment, portions of the respective cantilevers that are brought into contact with a sample to conduct scanning probe operations are arranged in a substantially linear configuration. A given one of the cantilevers is selected by vibrating the multiprobe at the resonance frequency of the given cantilever.

    摘要翻译: 提供了一种用于扫描探针仪器的多探头装置,并具有用于进行扫描探针操作的多个可单独选择的探针部件。 多功能探头具有由支撑构件支撑的多个悬臂探针。 每个悬臂可单独选择用于进行扫描探针操作,并且每个具有与其他谐振频率不同的谐振频率。 在优选实施例中,与样品接触以进行扫描探针操作的各个悬臂的部分被布置成基本线性的构造。 通过在给定悬臂的共振频率下振动多重探针来选择给定的一个悬臂。

    Self-exciting and self-detecting probe and scanning probe apparatus
    72.
    发明授权
    Self-exciting and self-detecting probe and scanning probe apparatus 失效
    自激和自检探头和扫描探头装置

    公开(公告)号:US06422069B1

    公开(公告)日:2002-07-23

    申请号:US09526148

    申请日:2000-03-15

    IPC分类号: G01B528

    摘要: A scanning probe apparatus and a self-exciting cantilever probe therefor are provided for measuring a characteristic of a sample by scanning a lever of the probe across the sample surface. The probe has a deflectable lever extending from a base and formed integrally therewith, and a resistive body provided on the lever to excite the lever in response to a periodic bias signal applied to the resistive body. In addition, the resistive body has a resistance value that varies in response to deflection of the lever so that the resistance of the resistive body may be monitored to detect deflection of the lever.

    摘要翻译: 提供扫描探针装置和自激式悬臂探针,用于通过将探针的杆扫过样品表面来测量样品的特性。 探针具有从基座延伸并与其一体形成的可偏转杆,以及设置在杠杆上的电阻体,以响应于施加到电阻体的周期性偏置信号来激励杠杆。 此外,电阻体具有响应于杠杆的偏转而变化的电阻值,使得可以监视电阻体的电阻以检测杠杆的偏转。

    Method for processing ceramic green sheets
    73.
    发明授权
    Method for processing ceramic green sheets 失效
    陶瓷生片加工方法

    公开(公告)号:US06399008B1

    公开(公告)日:2002-06-04

    申请号:US09447352

    申请日:1999-11-22

    IPC分类号: B29C3508

    摘要: Processing along one circular path is performed by irradiating a laser beam to a ceramic green sheet attached on an outer peripheral surface of a rotating drum, and the processing path is changed by moving at least one of the rotating drum and a beam irradiated position through a predetermined distance in the direction of drum centerline each time the processing on one circular path is completed. If the laser beam is intermittently irradiated to the ceramic green sheet, a matrix of through holes or concave portions can be easily formed in the ceramic green sheet.

    摘要翻译: 沿着一个圆形路径的处理是通过将激光束照射到附接在旋转滚筒的外周表面上的陶瓷生片来进行的,并且通过使旋转滚筒和束照射位置中的至少一个移动通过旋转滚筒 每次在一个圆形路径上的处理完成时,在鼓中心线的方向上的预定距离。 如果激光束间歇地照射到陶瓷生片上,则可以容易地在陶瓷生片中形成通孔或凹部的基体。

    Simulator and computer-readable recordable medium having program for execution on computer realizing the simulator recorded thereon
    74.
    发明授权
    Simulator and computer-readable recordable medium having program for execution on computer realizing the simulator recorded thereon 失效
    具有用于在计算机上执行的程序的模拟器和计算机可读可记录介质,实现其上记录的模拟器

    公开(公告)号:US06370494B1

    公开(公告)日:2002-04-09

    申请号:US09241261

    申请日:1999-02-01

    IPC分类号: G06F9455

    CPC分类号: G06F17/5022

    摘要: A simulator capable of counting a number of events occurring in each of functional modules constituting an LSI and calculating an index value for selecting a simulation method for each functional module in simulation of an operation of the LSI with a first test vector set. The simulator further capable of selecting one simulation method among a plurality of simulation methods for each functional module based on the selection index value, and of controlling execution of simulation of the LSI operation with a second test vector set in the simulation method selected for each functional module.

    摘要翻译: 一种模拟器,其能够对构成LSI的功能模块中的每一个中发生的事件进行计数,并且在利用第一测试矢量集来模拟LSI的操作时,计算用于为每个功能模块选择模拟方法的指标值。 该模拟器还能够基于选择指标值,针对每个功能模块的多个模拟方法中选择一种模拟方法,并且利用为每个功能选择的模拟方法中设置的第二测试向量控制LSI操作的模拟执行 模块。

    Polishing simulation
    76.
    发明授权
    Polishing simulation 失效
    抛光模拟

    公开(公告)号:US06337271B1

    公开(公告)日:2002-01-08

    申请号:US09143052

    申请日:1998-08-28

    申请人: Hiroshi Takahashi

    发明人: Hiroshi Takahashi

    IPC分类号: H01L21302

    CPC分类号: B24B49/02 B24B37/04 B24B49/16

    摘要: The invention provides a polishing simulation in which calculation is proceeded while polishing rate parameter is successively updated as an offset shape of a substrate varies as polishing proceeds. When an uneven surface of a substrate is to be leveled by polishing, a deformation amount of a polishing cloth is determined on the assumption that a deformed shape of the polishing cloth by a convex of the substrate is a truncated cone, and a distribution of a polishing force is determined based on the deformation amount of the polishing cloth. Then, a distribution of a polishing amount of the substrate after a fixed interval of time is determined from the distribution of the polishing pressure, and a distribution of a height of the substrate is determined from the distribution of the polishing amount after the fixed interval of time. Finally, an expression for determination of an offset of the substrate is determined from the distribution of the height of the substrate.

    摘要翻译: 本发明提供了一种抛光模拟,其中当研磨进行时,随着基板的偏移形状的变化,连续更新抛光速率参数,进行计算。 当通过抛光使基板的不平坦表面平整时,抛光布的变形量是基于抛光布的凸起的基板的变形形状为截头圆锥,并且分布为 基于抛光布的变形量确定研磨力。 然后,根据研磨压力的分布求出固定时间间隔后的基板的研磨量的分布,并且根据研磨压力的固定间隔后的研磨量的分布来求出基板的高度分布 时间。 最后,从衬底的高度分布确定用于确定衬底偏移的表达式。

    Method of processing circular patterning
    78.
    发明授权
    Method of processing circular patterning 失效
    圆形图案化处理方法

    公开(公告)号:US06294099B1

    公开(公告)日:2001-09-25

    申请号:US09197586

    申请日:1998-11-19

    IPC分类号: B44C122

    CPC分类号: H01L21/31111

    摘要: A method of producing a circular island even if pollution by dirt or dust affects a mask pattern. A circular island is formed by etching silicon oxide film formed on a silicon substrate using a resist mask, and an acute angle portion of unevenness of the pattern outline comprising silicon oxide film is removed so as to obtain a smooth and substantially circular pattern by additional etching using buffered hydrofluoric acid solution (BHF) after removing the resist mask.

    摘要翻译: 即使污染或灰尘污染影响掩模图案,也可以制造圆形岛的方法。 通过使用抗蚀剂掩模蚀刻在硅衬底上形成的氧化硅膜来形成圆形岛,并且除去包含氧化硅膜的图案轮廓的不均匀的锐角部分,以通过附加蚀刻获得平滑且基本上圆形的图案 在去除抗蚀剂掩模后使用缓冲氢氟酸溶液(BHF)。

    Electromagnetic noise measurement apparatus
    80.
    发明授权
    Electromagnetic noise measurement apparatus 失效
    电磁噪声测量仪

    公开(公告)号:US06184693B2

    公开(公告)日:2001-02-06

    申请号:US09112365

    申请日:1998-07-09

    IPC分类号: G01R2926

    CPC分类号: G01R31/002 G01R29/0814

    摘要: A first substrate having a first electromagnetic noise sensor on its surface perpendicularly intersects with a second substrate having a second electromagnetic noise sensor on its surface, making up an integral structure. A first induced voltage value output from the first electromagnetic sensor at a position thereof directly before driving by a driving means is recorded, and a second induced voltage value output from the second electromagnetic noise sensor at a position thereof at a time of movement of the integral structure for only a predetermined distance by a driving means is recorded. Further, the first and second electromagnetic noise sensors are parallel connected at the position of movement, and a third induced voltage value output from a parallel connected electromagnetic noise sensor is also recorded. Based on the recorded first and second voltage values, an electromagnetic noise level in a vicinity of the integral substrate is determined. The first and second induced voltage values are compared, and based on comparison of the first and second induced voltage values, and whether a larger voltage value from among the first and second voltage values is larger than the third voltage value, a direction of an electromagnetic noise generating source in the vicinity of the integral substrate is computationally determined. The determined electromagnetic noise level and direction of the electromagnetic noise generating source are displayed at a position on a display device corresponding with a position of the first electromagnetic noise sensor.

    摘要翻译: 第一基板,其表面上具有第一电磁噪声传感器,其表面垂直地与具有第二电磁噪声传感器的第二基板相交,构成一体结构。 记录从驱动装置驱动前的位置处的第一电磁传感器输出的第一感应电压值,以及从第二电磁噪声传感器输出的第二感应电压值,该第二感应电压值在积分时移动时的位置 记录通过驱动装置仅预定距离的结构。 此外,第一和第二电磁噪声传感器在运动位置处并联,并且还记录了从并联的电磁噪声传感器输出的第三感应电压值。 基于记录的第一和第二电压值,确定整体基板附近的电磁噪声电平。 比较第一和第二感应电压值,并且基于第一和第二感应电压值的比较,以及第一和第二电压值中的较大电压值是否大于第三电压值,电磁方向 计算确定在一体基板附近的噪声发生源。 所确定的电磁噪声发生源的电磁噪声水平和方向被显示在对应于第一电磁噪声传感器的位置的显示装置上的位置处。