公开(公告)号：US5935644A

公开(公告)日：1999-08-10

申请号：US34458

申请日：1998-03-04

申请人： David Eugene Heim ,  Hugo Alberto Emilio Santini

发明人： David Eugene Heim ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/23 ,  G11B5/31 ,  G11B5/33 ,  G11B5/39 ,  B05D5/12

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/232

摘要： The present invention uncouples the dependence between the zero throat height and the flare point of a write head by recessing the first insulation layer within the first pole piece layer. The first pole piece layer and the first insulation layer have planar surfaces which preferably lie in a common plane, the zero throat height being defined at the point where the planar surface of the first pole piece layer first meets the planar surface of the first insulation layer within the head. It is also at this point that the first and second pole piece layers separate from one another. Accordingly, the zero throat height can be accurately placed relative to the stripe height of a magneto-resistive (MR) sensor. Further, when a photoresist layer is spun onto the partially completed head for the construction of the pole tip of the second pole piece light directed into the photoresist layer for photo-imaging the pole tip does not reflect into the photoresist layer adjacent the pole tip. Accordingly, there is substantially no reflective notching of the photoresist layer because of the flatness of the surfaces of the first pole piece layer and the first insulation layer thereby permitting construction of a well defined second pole tip.

摘要翻译： 本发明通过在第一极片层内凹陷第一绝缘层来解耦零喉部高度与写入头的扩张点之间的依赖关系。 第一极片层和第一绝缘层具有优选位于公共平面中的平坦表面，零喉部高度限定在第一极片层的平坦表面首先接触第一绝缘层的平坦表面的点处 在头内。 在这一点上，第一和第二极片层彼此分离。 因此，可以相对于磁阻（MR）传感器的条带高度准确地放置零喉部高度。 此外，当光致抗蚀剂层被旋转到部分完成的头部上用于构造第二极靴的极尖的光引导到用于光成像的光致抗蚀剂层中时，极尖不会反射到邻近极尖的光致抗蚀剂层中。 因此，由于第一极片层和第一绝缘层的表面的平坦度，因此允许构造良好限定的第二极端，因此基本上不存在光致抗蚀剂层的反射性凹陷。

公开(公告)号：US5930084A

公开(公告)日：1999-07-27

申请号：US672516

申请日：1996-06-17

申请人： Moris Musa Dovek ,  Robert E. Fontana ,  Richard Hsiao ,  Mohamad Towfik Krounbi ,  Hugo Alberto Emilio Santini ,  Virgil Simon Speriosu

发明人： Moris Musa Dovek ,  Robert E. Fontana ,  Richard Hsiao ,  Mohamad Towfik Krounbi ,  Hugo Alberto Emilio Santini ,  Virgil Simon Speriosu

IPC分类号： G01R33/09 ,  G03F7/00 ,  G11B5/31 ,  G11B5/39

CPC分类号： G11B5/3916 ,  G01R33/09 ,  G03F7/00 ,  G11B5/3903 ,  G11B5/3919 ,  G11B5/3932 ,  G11B5/3163

摘要： The back end of an MR sensor and a flux guide are joined by a contiguous self-aligned junction so that a predictable overlap of the flux guide on the back end of the MR sensor can be achieved for optimizing signal flux density in the MR sensor. Lead/longitudinal bias layers for the MR sensor are also joined by a contiguous self-aligned junction to the flux guide for stabilizing the flux guide. By employing a single lift off resist mask the MR sensor and the lead/longitudinal bias layers can be patterned followed by deposition of the flux guide. The flux guide is a bilayer of an insulation material layer and a flux guide material layer. The insulation material layer is sandwiched between the MR sensor and the flux guide material layer and between the lead/longitudinal bias layers and the flux guide material layer. A heat guide or combined flux guide and heat guide may be substituted for the aforementioned flux guide.

摘要翻译： MR传感器和磁通引导件的后端通过连续的自对准结连接，从而可以实现MR传感器后端的磁通引导件的可预测重叠，以优化MR传感器中的信号通量密度。 用于MR传感器的引线/纵向偏置层也通过连接的自对准结连接到通量引导件，用于稳定通量引导件。 通过使用单个剥离抗蚀剂掩模，MR传感器和引导/纵向偏置层可以被图案化，然后沉积助焊剂引导件。 助焊剂是绝缘材料层和助焊剂引导材料层的双层。 绝缘材料层被夹在MR传感器和磁通引导材料层之间以及引导/纵向偏置层与通量引导材料层之间。 导热或组合的磁通引导件和导热件可以代替上述的磁通引导件。

公开(公告)号：US5901432A

公开(公告)日：1999-05-11

申请号：US997957

申请日：1997-12-24

申请人： Michael Armstrong ,  David Heim ,  Richard Hsiao ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

发明人： Michael Armstrong ,  David Heim ,  Richard Hsiao ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/127

CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A method for making a merged thin film read/write head, where the first pole piece includes a pedestal or pole tip portion that extends up from the first pole piece layer, uses electroplating to form the gap so that the gap layer does not have to be removed later. After the first pole piece is deposited, the coil insulation structure is built over the first pole piece. Afterwards an electrically conductive seed layer of the same ferromagnetic material as the first pole piece is formed over the wafer to provide an electrically conductive path for subsequent electroplating. After the seed layer deposition, a photoresist pattern is then formed to define the shape of the second pole piece. Nonmagnetic nickel-phosphorous is then electroplated onto the seed layer in the region not covered by the photoresist pattern to form the gap layer. The second ferromagnetic layer is then electroplated onto the gap layer to define the shape of the second pole piece. The thickness of the second pole piece layer is deliberately made thicker than the desired final thickness because the second pole piece layer is used as a mask for subsequent ion beam milling to form the notched pole tip element of the first pole piece. The photoresist is removed and ion beam milling performed to remove the seed layer and a portion of the first pole piece layer to define the pedestal pole tip element of the first pole piece. The ion beam milling does not have to remove the gap layer because the electroplated gap has been defined by the photoresist pattern to have the desired trackwidth.

摘要翻译： 一种制造合并薄膜读/写头的方法，其中第一极片包括从第一极片层向上延伸的基座或极尖部分，使用电镀形成间隙，使得间隙层不必 稍后删除 在第一极片沉积之后，线圈绝缘结构被构建在第一极片上。 之后，在晶片上形成与第一极片相同的铁磁材料的导电种子层，以提供用于随后电镀的导电路径。 在种子层沉积之后，然后形成光刻胶图案以限定第二极片的形状。 然后将非磁性镍磷电镀在未被光致抗蚀剂图案覆盖的区域中的种子层上以形成间隙层。 然后将第二铁磁层电镀到间隙层上以限定第二极靴的形状。 由于第二极片层用作后续离子束铣削的掩模以形成第一极靴的切口极端部元件，所以第二极靴层的厚度被故意地制造得比期望的最终厚度更厚。 去除光致抗蚀剂，进行离子束研磨以除去种子层和第一极片层的一部分，以限定第一极片的基座极端部元件。 离子束铣削不必去除间隙层，因为电镀间隙已由光致抗蚀剂图案限定以具有期望的轨道宽度。

公开(公告)号：US5652687A

公开(公告)日：1997-07-29

申请号：US531530

申请日：1995-09-21

申请人： Mao-Min Chen ,  Kochan Ju ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

发明人： Mao-Min Chen ,  Kochan Ju ,  Neil Leslie Robertson ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/187 ,  G11B5/23 ,  G11B5/235 ,  G11B5/31 ,  G11B5/147

CPC分类号： G11B5/3103 ,  G11B5/3116 ,  G11B5/3133 ,  G11B5/3146 ,  G11B5/1872 ,  G11B5/232 ,  G11B5/235 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A thin film magnetic write head is provided with a notch structure located on top of one of two pole layers. The notch structure is a generally U-shaped thin film layer which forms a trench inside the U for the containment of one or more pole tip layers in the pole tip region of the head. The notch structure has front surfaces at the tips of the legs of the U which lie in a plane that forms a part of the air bearing surface. The thickness of the notch layer is substantially equal to the thickness or thicknesses of the one or more pole tip layers located in the trench. A method of manufacturing the write head includes forming a very thin photoresist layer for defining the notch structure. The notch structure is well-defined which in turn allows the one or more pole tip layers to be well-defined with a very narrow trackwidth in the trench.

摘要翻译： 薄膜磁性写头设置有位于两个极层之一的顶部上的凹口结构。 凹口结构是大致U形的薄膜层，其在U形内部形成沟槽，用于容纳头部的磁极尖端区域中的一个或多个极尖端层。 凹口结构在位于形成空气轴承表面的一部分的平面中的U形腿的顶端具有前表面。 切口层的厚度基本上等于位于沟槽中的一个或多个极尖端层的厚度或厚度。 一种制造写入头的方法包括形成非常薄的光致抗蚀剂层以限定凹口结构。 凹口结构是明确的，这又允许一个或多个极尖端层在沟槽中具有很窄的轨道宽度。