Tunable multi-channel optical attenuator (TMCOA)
    72.
    发明授权
    Tunable multi-channel optical attenuator (TMCOA) 失效
    可调谐多通道光衰减器(TMCOA)

    公开(公告)号:US06509998B2

    公开(公告)日:2003-01-21

    申请号:US09877367

    申请日:2001-06-07

    IPC分类号: G02F103

    CPC分类号: G02B26/02 G02B26/001

    摘要: A conductive substrate supports an array of multi-channel optical attenuating devices. Each attenuating device includes a membrane with an optically transparent portion And a flexible support for positioning the optically transparent portion of the membrane spaced from the substrate for defining an air gap. The air gap constitutes a cross-shaped gap-chamber having a horizontally and vertically elongated chambers extended from a central intersection area functioning as an optical active area. A voltage bias circuit applies an electrical bias between the conductive substrate and the membrane to adjust and control an air-gap thickness at the optical active area between the conductive substrate and the membrane. Each of the devices can be manufactured on the same silicon wafer using the same process and can be individually controlled to accommodate different wavelength attenuation at each channel. Production costs, and time and efforts required for aligning the array to optical fibers are also reduced.

    摘要翻译: 导电衬底支持多通道光衰减器件的阵列。 每个衰减装置包括具有光学透明部分的膜和柔性支撑件,用于将膜的光学透明部分与衬底间隔开以限定气隙。 气隙构成十字形间隙室,其具有从用作光学有源区域的中心交叉区域延伸的水平和垂直细长室。 电压偏置电路在导电基板和膜之间施加电偏压,以调节和控制导电基板和膜之间的光学有效面积处的气隙厚度。 每个器件可以使用相同的工艺在相同的硅晶片上制造,并且可以单独控制以适应每个通道的不同波长衰减。 生产成本以及将阵列对准光纤所需的时间和努力也减少了。

    Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
    73.
    发明授权
    Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor 有权
    制造飞行时间MEMS质量流量传感器的配置和方法

    公开(公告)号:US07797997B2

    公开(公告)日:2010-09-21

    申请号:US12229605

    申请日:2008-08-24

    IPC分类号: G01F1/68

    摘要: This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity.

    摘要翻译: 本发明公开了一种通过应用微机电系统(MEMS)工艺制造的质量流量传感器,以提供新的和改进的质量流量传感器,其是以飞行时间方式自动校准的配置,以直接测量流速 。 通过向流中的加热器提供电脉冲并确定流体的温度变化来实现质量流量传感器的自校准。 该方法还包括通过设置在与加热器短距离的温度传感器来测量温度变化的步骤。 该方法还包括将温度传感器处测量的温度变化与加热器的温度变化相关联以确定时间延迟和相应的流速的步骤。

    Dynamic gain equalization system design with adaptive spectrum decomposition methodology
    74.
    发明授权
    Dynamic gain equalization system design with adaptive spectrum decomposition methodology 失效
    具有自适应频谱分解方法的动态增益均衡系统设计

    公开(公告)号:US06775429B2

    公开(公告)日:2004-08-10

    申请号:US10177505

    申请日:2002-06-19

    IPC分类号: G02B626

    摘要: The present invention discloses an optical gain equalization system for receiving and equalizing a multiple-channel input optical signal. The optical gain equalization system includes a cascaded array of tunable optical filters filtering the multiple-channel input optical signal and generating a plurality of sub-signals and a residual signal and each of the sub-signals transmitted over a mutually exclusive filter-specific spectrum-range while a combination of all the filter-specific spectrums dynamically covering the spectral portions of said multi-channel input optical signal where power equalizations are required, and all said filter-specific spectrums together with the residual signal spectrum substantially covering an entire spectral range of the multi-channel input optical signal. The gain equalization system further includes a corresponding array of variable optical attenuators (VOAs) each connected to one of a corresponding tunable optical filter for attenuating the sub-signal transmitted over the filter-specific spectrum range for generating an equalized sub-signal. And, the gain equalization system further includes a multiplexing means for receiving and multiplexing the equalized sub-signals generated by the array of variable optical attenuators (VOAs) and the residual signal for generating an equalized output optical signal.

    摘要翻译: 本发明公开了一种用于接收和均衡多通道输入光信号的光增益均衡系统。 光学增益均衡系统包括可调谐滤光器的级联阵列,其对多通道输入光信号进行滤波,并产生多个子信号和残留信号,并且每个子信号通过互斥滤波器特定频谱 - 范围,同时所有滤波器特定频谱的组合动态地覆盖需要功率均衡的所述多信道输入光信号的频谱部分,并且所有所述滤波器特定频谱与残留信号频谱一起基本上覆盖整个频谱范围 多通道输入光信号。 增益均衡系统还包括相应的可变光衰减器阵列(VOA),每个可变光衰减器连接到相应的可调光滤波器之一,用于衰减通过滤波器专用频谱范围传输的子信号,用于产生均衡的子信号。 并且,增益均衡系统还包括多路复用装置,用于接收和复用由可变光衰减器阵列产生的均衡的子信号和用于产生均衡的输出光信号的残余信号。

    Magnetic recording medium comprising multilayered carbon-containing protective overcoats
    75.
    发明授权
    Magnetic recording medium comprising multilayered carbon-containing protective overcoats 失效
    包含多层含碳保护性外涂层的磁记录介质

    公开(公告)号:US06245417B1

    公开(公告)日:2001-06-12

    申请号:US09065014

    申请日:1998-04-21

    申请人: Liji Huang

    发明人: Liji Huang

    IPC分类号: G11B5725

    摘要: A magnetic recording medium is provided with multilayered carbon-containing protective overcoats having different surface polarities and electrical conductivities, thereby enabling optimum performance to be tailored for different drive programs. Embodiments include a first protective overcoat comprising hydrogenated carbon and a second protective overcoat comprising graphitic carbon or amorphous carbon nitride.

    摘要翻译: 磁记录介质设置有具有不同表面极性和电导率的多层含碳保护性外涂层,从而能够为不同的驱动程序定制最佳性能。 实施方案包括包含氢化碳的第一保护外涂层和包含石墨碳或无定形碳氮化物的第二保护外涂层。

    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices
    76.
    发明授权
    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices 失效
    用于微机电系统(MEMS)光子器件的稳健的多层薄膜膜

    公开(公告)号:US06724516B2

    公开(公告)日:2004-04-20

    申请号:US10062774

    申请日:2002-02-01

    IPC分类号: G02B2600

    摘要: This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.

    摘要翻译: 本发明公开了薄膜的结构。 该薄膜是独立的,可移动的,并且由多层不同的材料制成,例如氮化硅,多晶硅或这两者的组合。 该薄膜可以通过诸如静电力的外部控制力来致动。 该薄膜膜由奇数层组成,例如1层,3层,5层。 。 。 此外,该膜的层轮廓是对称的,例如,最底层与最顶层相同,下一个最下层被制成与下一个最上层相同,等等。

    Utility mass flow gas meter
    79.
    发明授权

    公开(公告)号:US09784607B2

    公开(公告)日:2017-10-10

    申请号:US15052823

    申请日:2016-02-24

    摘要: An electronic utility gas meter using MEMS thermal mass flow sensor to measure gas custody transfer data in city gas metering application is disclosed in the present invention. The meter is designed to have its mechanical connectors identical to those of the current diaphragm gas meters while the insertion metrology unit guided channel is placed coaxially in the main flow channel inside the meter body with gas flow conditioning apparatus. The mechanical installation of the electronic utility gas meter then can be fully compatible with the current mechanical utility gas meters, which allows a seamless replacement. The electronic utility gas meter provides gas metrology that significantly improves the accuracy of the city gas metering, and provides additional benefits for data safety, enhanced gas chemical safety, billing alternatives and full data management either locally or remotely.

    Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
    80.
    发明申请
    Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor 有权
    制造飞行时间MEMS质量流量传感器的配置和方法

    公开(公告)号:US20090049907A1

    公开(公告)日:2009-02-26

    申请号:US12229605

    申请日:2008-08-24

    IPC分类号: G01F1/692

    摘要: This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity.

    摘要翻译: 本发明公开了一种通过应用微机电系统(MEMS)工艺制造的质量流量传感器,以提供新的和改进的质量流量传感器,其是以飞行时间方式自动校准的配置,以直接测量流速 。 通过向流中的加热器提供电脉冲并确定流体的温度变化来实现质量流量传感器的自校准。 该方法还包括通过设置在与加热器短距离的温度传感器来测量温度变化的步骤。 该方法还包括将温度传感器处测量的温度变化与加热器的温度变化相关联以确定时间延迟和相应的流速的步骤。