Perpendicular magnetic recording media with improved crystallographic orientations and method of manufacturing same
    4.
    发明授权
    Perpendicular magnetic recording media with improved crystallographic orientations and method of manufacturing same 有权
    具有改善晶体取向的垂直磁记录介质及其制造方法

    公开(公告)号:US07175925B2

    公开(公告)日:2007-02-13

    申请号:US10663670

    申请日:2003-09-17

    IPC分类号: G11B5/66 G11B5/70

    摘要: A perpendicular magnetic recording medium, comprising: (a) a non-magnetic substrate having a surface; and (b) a layer stack formed over the substrate surface, comprising in overlying sequence from the substrate surface: (i) a magnetically soft underlayer; (ii) an interlayer structure for crystallographically orienting a layer of a perpendicular magnetic recording material formed thereon; and (iii) at least one crystallographically oriented magnetically hard perpendicular recording layer; wherein the magnetically soft underlayer is sputter-deposited at a sufficiently large target-to-substrate spacing and at a sufficiently low gas pressure selected to provide the underlayer with a smooth surface having a low average surface roughness Ra below about 0.3 nm, as measured by Atomic Force Microscopy (AFM).

    摘要翻译: 一种垂直磁记录介质,包括:(a)具有表面的非磁性基板; 和(b)形成在所述衬底表面上的层叠层,包括从所述衬底表面的重叠顺序:(i)磁软底层; (ii)用于晶体取向形成在其上的垂直磁记录材料层的层间结构; 和(iii)至少一个晶体取向的磁性硬垂直记录层; 其中所述磁软底层被溅射沉积在足够大的靶对衬底间隔处并且以足够低的气体压力被选择以使底层具有平均表面,其具有低于约0.3nm的低平均表面粗糙度Ra,如通过 原子力显微镜(AFM)。