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公开(公告)号：US20120216629A1
公开(公告)日：2012-08-30
申请号：US13035639
申请日：2011-02-25
申请人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
发明人： Liji Huang , Chih-Chang Chen , Yahong Yao , Xiaozhong Wu
IPC分类号： G01F1/708
CPC分类号： G01F1/7084 , G01F1/72
摘要： An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.
摘要翻译： 一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量 速度，在本发明中公开。 用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。 与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。 原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。 此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。
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2.发明申请Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor 有权制造飞行时间MEMS质量流量传感器的配置和方法公开(公告)号：US20090049907A1
公开(公告)日：2009-02-26
申请号：US12229605
申请日：2008-08-24
申请人： Xiaozhong Wu , Liji Huang
发明人： Xiaozhong Wu , Liji Huang
IPC分类号： G01F1/692
CPC分类号： G01F1/7084 , G01F1/6845 , G01F1/699 , G01F25/0007
摘要： This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity.
摘要翻译： 本发明公开了一种通过应用微机电系统（MEMS）工艺制造的质量流量传感器，以提供新的和改进的质量流量传感器，其是以飞行时间方式自动校准的配置，以直接测量流速 。 通过向流中的加热器提供电脉冲并确定流体的温度变化来实现质量流量传感器的自校准。 该方法还包括通过设置在与加热器短距离的温度传感器来测量温度变化的步骤。 该方法还包括将温度传感器处测量的温度变化与加热器的温度变化相关联以确定时间延迟和相应的流速的步骤。
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3.发明授权Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor 有权制造飞行时间MEMS质量流量传感器的配置和方法公开(公告)号：US07797997B2
公开(公告)日：2010-09-21
申请号：US12229605
申请日：2008-08-24
申请人： Xiaozhong Wu , Liji Huang
发明人： Xiaozhong Wu , Liji Huang
IPC分类号： G01F1/68
CPC分类号： G01F1/7084 , G01F1/6845 , G01F1/699 , G01F25/0007
摘要： This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity.
摘要翻译： 本发明公开了一种通过应用微机电系统（MEMS）工艺制造的质量流量传感器，以提供新的和改进的质量流量传感器，其是以飞行时间方式自动校准的配置，以直接测量流速 。 通过向流中的加热器提供电脉冲并确定流体的温度变化来实现质量流量传感器的自校准。 该方法还包括通过设置在与加热器短距离的温度传感器来测量温度变化的步骤。 该方法还包括将温度传感器处测量的温度变化与加热器的温度变化相关联以确定时间延迟和相应的流速的步骤。
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公开(公告)号：US08794082B2
公开(公告)日：2014-08-05
申请号：US13035639
申请日：2011-02-25
申请人： Liji Huang , Xiaozhong Wu , Yahong Yao , Chih-Chang Chen
发明人： Liji Huang , Xiaozhong Wu , Yahong Yao , Chih-Chang Chen
CPC分类号： G01F1/7084 , G01F1/72
摘要： An apparatus comprising a micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon flow sensor, a flow channel package, and a driving circuitry, which operates in a working principle of thermal time-of-flight (TOF) to measure gas or liquid flow speed, is disclosed in the present invention. The micromachining technique for fabricating this MEMS time-of-flight silicon thermal flow sensor can greatly reduce the sensor fabrication cost by batch production. This microfabrication process for silicon time-of-flight thermal flow sensors provides merits of small feature size, low power consumption, and high accuracy compared to conventional manufacturing methods. Thermal time-of-flight technology in principle can provide accurate flow speed measurements for gases regardless of its gas compositions. In addition, the present invention further discloses the package design and driving circuitry which is utilized by the correlated working principle.
摘要翻译： 一种包括微加工（也称为MEMS，微机电系统）硅流量传感器，流动通道封装和驱动电路的装置，其以热时间飞行（TOF）的工作原理工作以测量气体或液体流量 速度，在本发明中公开。 用于制造这种MEMS飞行时间硅热流量传感器的微加工技术可以通过批量生产大大降低传感器制造成本。 与传统的制造方法相比，这种用于硅时间飞行热流传感器的微加工工艺具有小特征尺寸，低功耗和高精度的优点。 原理上，热时间飞行技术可以为气体提供准确的流速测量，无论其气体成分如何。 此外，本发明还公开了通过相关工作原理利用的封装设计和驱动电路。
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5.发明公开公开(公告)号：US20230218228A1
公开(公告)日：2023-07-13
申请号：US17573944
申请日：2022-01-12
申请人： Yidong Wu , Liji Huang , Zhuo Zeng , Hanying Wu
发明人： Yidong Wu , Liji Huang , Zhuo Zeng , Hanying Wu
CPC分类号： A61B5/682 , A61B5/6833 , A61B5/097 , A61B5/0836 , A61B5/002 , A61B5/0878 , A61M16/024 , A61B2560/0209 , A61M2230/205 , A61B2562/028
摘要： The invention discloses a noninvasive spontaneous respiratory monitoring device, which comprises a sensing patch that can be placed in proximity to the nasal airway of a patient. The sensing patch measures both the flow profile and carbon dioxide concentration of a patient and wirelessly transmits the acquired data to the control circuitry for synchronizing the respiratory support of a mechanical ventilator. The device can also be used as a standalone unit for monitoring for the diagnosis purposes the spontaneous respiratory function of a patient with respiratory dysfunction.
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公开(公告)号：US11512990B2
公开(公告)日：2022-11-29
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US11428596B2
公开(公告)日：2022-08-30
申请号：US17022988
申请日：2020-09-16
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L21/12
摘要： The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermopile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.
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公开(公告)号：US11353336B2
公开(公告)日：2022-06-07
申请号：US16903825
申请日：2020-06-17
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.
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公开(公告)号：US20220003584A1
公开(公告)日：2022-01-06
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US20210379323A1
公开(公告)日：2021-12-09
申请号：US16896643
申请日：2020-06-09
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a fully automatic oxygen therapy apparatus is exhibited in this disclosure. The apparatus integrates a MEMS mass flow meter, an oximeter, a proportional valve and a smart liquid bottle. The control unit of the apparatus is embedded with a wireless communication device and powered by a battery pack. This apparatus is designed to replace the mechanical oxygen rotameter used in today's hospital or homecare oxygen therapy applications. With a set recipe or parameters locally or remotely, the disclosed apparatus can perform a fully automatic oxygen therapy for recovering the blood oxygen level of patient, without the frequent attention of the therapy administrator, and especially it significantly reduces the possibility of cross infection to the administrator during the attendance of the oxygen therapy process. The therapy process data are relayed to local users as well as a designated cloud or data center. This disclosure will be beneficial for both medical staffs and patient.
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