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公开(公告)号：US20110193501A1
公开(公告)日：2011-08-11
申请号：US12819564
申请日：2010-06-21
申请人： Tamio Ikehashi
发明人： Tamio Ikehashi
IPC分类号： H02N1/08
CPC分类号： H02N1/006
摘要： According to one embodiment, a method of driving an electrostatic actuator includes a first electrode provided on a substrate, a second electrode arranged above the first electrode to be movable in a vertical direction, and an insulating film provided between the first electrode and the second electrode, includes boosting a power supply voltage to generate a driving voltage of the electrostatic actuator, and applying the driving voltage to each of the first electrode and the second electrode when setting the electrostatic actuator in an up state.
摘要翻译： 根据一个实施例，一种驱动静电致动器的方法包括：设置在基板上的第一电极，设置在第一电极上方的可在垂直方向上移动的第二电极，以及设置在第一电极和第二电极之间的绝缘膜 包括升高电源电压以产生静电致动器的驱动电压，并且当将静电致动器设置在向上状态时，将驱动电压施加到第一电极和第二电极中的每一个。
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公开(公告)号：US20110063774A1
公开(公告)日：2011-03-17
申请号：US12883660
申请日：2010-09-16
IPC分类号： H01G5/011
摘要： According to one embodiment, a MEMS devise includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.
摘要翻译： 根据一个实施例，MEMS设备包括在基板上的电极，可移动结构，其通过基板上的第一和第二锚固部分支撑在电极之上的空中，并且朝向电极移动;第一弹簧结构，其将第一 锚定部分到可移动结构并使用延性材料;以及第二弹簧结构，其将第二锚固部分连接到可移动结构并使用脆性材料。
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73.发明授权Electrostatic actuator driving system having plural actuators and a temperature detector 有权具有多个致动器和温度检测器的静电致动器驱动系统公开(公告)号：US07795778B2
公开(公告)日：2010-09-14
申请号：US11851784
申请日：2007-09-07
申请人： Tamio Ikehashi
发明人： Tamio Ikehashi
CPC分类号： B81B3/0021 , B81B2201/038 , H01H59/0009 , H02N1/008
摘要： An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.
摘要翻译： 本发明的致动器包括移动部件和驱动电极，驱动电极由彼此电隔离的电极部分组成并驱动移动部件。 驱动电压被选择性地施加到一些电极部分，以控制作用在移动部件上的静电力。
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74.发明授权Semiconductor device, nonvolatile semiconductor memory, system including a plurality of semiconductor devices or nonvolatile semiconductor memories, electric card including semiconductor device or nonvolatile semiconductor memory, and electric device with which this electric card can be used 有权半导体器件，非易失性半导体存储器，包括多个半导体器件或非易失性半导体存储器的系统，包括半导体器件或非易失性半导体存储器的电卡，以及可以使用该电卡的电子器件公开(公告)号：US07633826B2
公开(公告)日：2009-12-15
申请号：US11938756
申请日：2007-11-12
IPC分类号： G11C7/00
摘要： A semiconductor device of this invention includes a first circuit for initializing a predetermined circuit in accordance with the level of a power source voltage, a second circuit for controlling the output from the first circuit by activation or deactivation, and an activation control circuit for activating or deactivating the second circuit in accordance with external input.
摘要翻译： 本发明的半导体器件包括用于根据电源电压的电平初始化预定电路的第一电路，用于通过激活或去激活来控制来自第一电路的输出的第二电路，以及用于激活或去激活的激活控制电路， 根据外部输入禁用第二电路。
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公开(公告)号：US20090231778A1
公开(公告)日：2009-09-17
申请号：US12402031
申请日：2009-03-11
申请人： Shigeru Hiura , Hiroaki Yamazaki , Tamio Ikehashi
发明人： Shigeru Hiura , Hiroaki Yamazaki , Tamio Ikehashi
CPC分类号： H01P1/127 , H01H59/0009
摘要： A high frequency MEMS 1 as a high frequency electrical element has a silicon substrate 2 wholly formed with an insulation film, a first signal line 4 provided on the silicon substrate 2, a second signal line 5 provided on the silicon substrate 2, the second signal line 5 crossing the first signal line 4 within a first region above the silicon substrate 2, and a dielectric film 9 interposed between the first signal line 4 and the second signal line 5, and provided on one of the first signal line 4 and the second signal line 5, within the first region, the first signal line 4 and the second signal line 5 being relatively movable in directions for a contacting approach and a mutual spacing in between.
摘要翻译： 作为高频电气元件的高频MEMS1具有完全由绝缘膜形成的硅基板2，设置在硅基板2上的第一信号线4，设置在硅基板2上的第二信号线5，第二信号 线5在硅衬底2上方的第一区域内与第一信号线4交叉，以及介于第一信号线4和第二信号线5之间的电介质膜9，并且设置在第一信号线4和第二信号线4之一上 信号线5在第一区域内，第一信号线4和第二信号线5在接触方向的方向和相互间的相互间隔相对移动。
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76.发明申请SEMICONDUCTOR INTEGRATED CIRCUIT INCLUDING CIRCUIT FOR DRIVING ELECTROSTATIC ACTUATOR, MICRO-ELECTRO-MECHANICAL SYSTEMS, AND DRIVING METHOD OF ELECTROSTATIC ACTUATOR 有权半导体集成电路，其中包括驱动静电激励器的电路，微机电系统和静电激励器的驱动方法公开(公告)号：US20070181411A1
公开(公告)日：2007-08-09
申请号：US11672773
申请日：2007-02-08
申请人： Tamio Ikehashi , Hiroaki Yamazaki
发明人： Tamio Ikehashi , Hiroaki Yamazaki
CPC分类号： H01H59/0009 , H01H2001/0063 , H01H2059/0018 , H02N1/006
摘要： A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
摘要翻译： 半导体集成电路包括静电致动器，估计电路，存储电路和偏置电路。 静电致动器具有顶部电极，底部电极和设置在顶部电极和底部电极之间的绝缘膜。 估计电路估计在静电致动器的绝缘膜中累积的电荷的量。 存储电路通过估计电路存储对电荷量的估计结果。 偏置电路根据存储在存储电路中的估计结果，改变驱动静电致动器的驱动电压。
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公开(公告)号：US07145284B2
公开(公告)日：2006-12-05
申请号：US11178494
申请日：2005-07-12
申请人： Tamio Ikehashi
发明人： Tamio Ikehashi
IPC分类号： H01K41/053 , H01K41/09 , H02N2/00
CPC分类号： H01G5/16 , H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/0946
摘要： An actuator includes a movable beam supported on a substrate by a supporting portion, and having a first movable end and a second movable end. The second movable end is opposite to the first movable end with respect to the supporting portion. A first drive beam is connected to the movable beam at around the second movable end. The first drive beam is fixed on the substrate at an end portion of the first drive beam. A second drive beam is connected to the movable beam at a location between the supporting portion and the first movable end. The second drive beam is fixed on the substrate at another end portion of the second drive beam.
摘要翻译： 致动器包括通过支撑部支撑在基板上的可动梁，并且具有第一可动端和第二可动端。 第二可移动端相对于支撑部分与第一可动端相对。 第一驱动梁在第二可移动端周围连接到可动梁。 第一驱动梁在第一驱动梁的端部固定在基板上。 第二驱动梁在支撑部分和第一可移动端之间的位置处连接到可移动梁。 第二驱动光束在第二驱动光束的另一端部固定在基板上。
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公开(公告)号：US20060226735A1
公开(公告)日：2006-10-12
申请号：US11280385
申请日：2005-11-17
申请人： Tamio Ikehashi
发明人： Tamio Ikehashi
IPC分类号： H01L41/00
CPC分类号： H01G5/16 , H01G5/18 , H01H59/0009 , H01H2001/0063 , H01H2057/006 , H01H2059/0018 , H01L41/094 , H01L41/0946 , H02N1/006
摘要： A semiconductor device includes an elastic member, first and second electrodes, a piezoelectric actuator, and an electrostatic actuator. One end of the elastic member is fixed on a substrate through an anchor so as to form a gap between the elastic member and the substrate. The first and second electrodes are placed to face the other end of the elastic member and the substrate, respectively. The piezoelectric actuator deforms the other end of the elastic member to bring it close to the substrate. The electrostatic actuator includes a third electrode placed in the elastic member and a fourth electrode placed on the substrate so as to face the third electrode, and deforms the other end of the elastic member so as to bring it close to the substrate. The distance between the first and second electrodes is changed by driving the piezoelectric actuator and the electrostatic actuator.
摘要翻译： 半导体器件包括弹性构件，第一和第二电极，压电致动器和静电致动器。 弹性构件的一端通过锚固件固定在基板上，以在弹性构件和基底之间形成间隙。 第一和第二电极被分别放置成面对弹性构件和衬底的另一端。 压电致动器使弹性构件的另一端变形，使其靠近基板。 静电致动器包括放置在弹性构件中的第三电极和位于基板上以与第三电极相对的第四电极，并使弹性构件的另一端变形使其靠近基板。 通过驱动压电致动器和静电致动器来改变第一和第二电极之间的距离。
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79.发明授权SEMICONDUCTOR DEVICE, NONVOLATILE SEMICONDUCTOR MEMORY, SYSTEM INCLUDING A PLURALITY OF SEMICONDUCTOR DEVICES OR NONVOLATILE SEMICONDUCTOR MEMORIES, ELECTRIC CARD INCLUDING SEMICONDUCTOR DEVICE OR NONVOLATILE SEMICONDUCTOR MEMORY, AND ELECTRIC DEVICE WITH WHICH THIS ELECTRIC CARD CAN BE USED 有权半导体器件，非易失性半导体存储器，包括多个半导体器件或非易失性半导体存储器的系统，包括半导体器件或非易失性半导体存储器的电子卡，以及可以使用该电卡的电子器件公开(公告)号：US07057947B2
公开(公告)日：2006-06-06
申请号：US10322785
申请日：2002-12-18
IPC分类号： G11C7/00
摘要： A semiconductor device of this invention includes a first circuit for initializing a predetermined circuit in accordance with the level of a power source voltage, a second circuit for controlling the output from the first circuit by activation or deactivation, and an activation control circuit for activating or deactivating the second circuit in accordance with external input.
摘要翻译： 本发明的半导体器件包括用于根据电源电压的电平初始化预定电路的第一电路，用于通过激活或去激活来控制来自第一电路的输出的第二电路，以及用于激活或去激活的激活控制电路， 根据外部输入禁用第二电路。
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公开(公告)号：US06999353B2
公开(公告)日：2006-02-14
申请号：US10968303
申请日：2004-10-20
申请人： Junichiro Noda , Tamio Ikehashi , Kenichi Imamiya
发明人： Junichiro Noda , Tamio Ikehashi , Kenichi Imamiya
CPC分类号： G11C29/02
摘要： A semiconductor memory device having a data latch circuit has plural bit lines to which a reprogrammable memory cell is connected, a data bus on which data is transferred, a latch circuit latching the data transferred on the data bus, a read out circuit connected to the data bus, and a data transfer circuit group to directly transfer the data latched in the latch circuit to the read out circuit without transferring it to the memory cell.
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