摘要:
According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.
摘要:
According to one embodiment, a MEMS devise includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.
摘要:
According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.
摘要:
According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.
摘要:
According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.
摘要:
A luminous flux control member that controls travelling direction of light emitted from a light source includes an incident area, an emission area, and a plurality of projecting sections. The plurality of projecting sections are constituted by an inner area, an intermediate area, and a peripheral area defined in the radial direction, and a first specific projecting section disposed in the inner area is configured such that a planar section that is used to measure the height of the first specific projecting section and is perpendicular to the optical axis is connected to an inner peripheral end and an outer peripheral end of a base end portion of the first specific projecting section. The projecting sections other than the first specific projecting section, in principle, come into contact internally or externally with another projecting section other than the first specific projecting section.
摘要:
A manufacturing method of a hermetic container includes an assembling step of assembling the hermetic container and a sealing step of sealing by first and second sealing materials. Thus, in a case where local heating light is scanned toward an already-sealed portion of the second sealing material, since a separation portion of an unsealed state is located between the already-sealed portion and a downstream end of scanning, a load due to expansion/contraction of a frame body is applied to the first sealing material which is present in the separation portion of the unsealed state. After then, since the local heating light is irradiated to the first sealing material to which the load has been applied so as to heat and melt it, the load is relieved, whereby it is possible to suppress deterioration of joining strength and airtightness of the hermetic container.
摘要:
The invention is capable of easily suppressing deterioration of light distribution characteristics caused by unnecessary light with certainty, using a design that is not difficult to manufacture, and improving efficiency of light utilization.A projecting section 11 has a third surface 23 between a first surface 14 (incident surface) and a second surface 15 (total reflection surface). The third surface 23 is formed into an angled surface that is angled in relation to an optical axis OA, of which one end section joined with the first surface 14 is positioned further to a light source 6 side than another end section joined with the second surface 15. The overall light that has entered the third surface 23 of each of a plurality of projecting sections 11 is refracted by the third surfaces 23 towards an exit surface 5 side with positive power.
摘要:
A fuel cell system is provided with a fuel cell, an electric storage device, and a controller which determines a directed drive amount for a drive device. In the case where a drive request is input during a low-efficiency drive period in which power is supplied from the electric storage device, the directed drive amount after power generation by the fuel cell is begun is restrained. This arrangement allows a driving state to be smoothly changed even when power supply to the drive device is changed from power supply using the electric storage device alone to that using both the fuel cell and the electric storage device.
摘要:
The present invention has a theme of a mobile body capable of securing reliability of the mobile body at a time of start. The mobile body includes a driving force generation device which generates a driving force of the mobile body; a power accumulation device and a fuel cell capable of supplying a power to the driving force generation device; and a control device which controls driving of the driving force generation device. The control device prohibits to start driving the driving force generation device by the power supply of the power accumulation device, in a case where there is a possibility of failure in startup of the fuel cell when starting the mobile body.