MEMS device having a movable structure
    1.
    发明授权
    MEMS device having a movable structure 失效
    具有可移动结构的MEMS器件

    公开(公告)号:US08564928B2

    公开(公告)日:2013-10-22

    申请号:US12883660

    申请日:2010-09-16

    IPC分类号: H01G5/16 H01G7/00 H01G5/00

    CPC分类号: H01G5/16 H01G5/011

    摘要: According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

    摘要翻译: 根据一个实施例,MEMS器件包括在基板上的电极,可移动结构,其通过基板上的第一和第二锚固部分支撑在电极之上的空中,并且朝向电极移动;第一弹簧结构,其将第一 锚定部分到可移动结构并使用延性材料;以及第二弹簧结构,其将第二锚固部分连接到可移动结构并使用脆性材料。

    MEMS DEVICE
    2.
    发明申请
    MEMS DEVICE 失效
    MEMS器件

    公开(公告)号:US20110063774A1

    公开(公告)日:2011-03-17

    申请号:US12883660

    申请日:2010-09-16

    IPC分类号: H01G5/011

    CPC分类号: H01G5/16 H01G5/011

    摘要: According to one embodiment, a MEMS devise includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

    摘要翻译: 根据一个实施例,MEMS设备包括在基板上的电极,可移动结构,其通过基板上的第一和第二锚固部分支撑在电极之上的空中,并且朝向电极移动;第一弹簧结构,其将第一 锚定部分到可移动结构并使用延性材料;以及第二弹簧结构,其将第二锚固部分连接到可移动结构并使用脆性材料。

    MEMS device and method of manufacturing the same
    3.
    发明授权
    MEMS device and method of manufacturing the same 有权
    MEMS器件及其制造方法

    公开(公告)号:US09230744B2

    公开(公告)日:2016-01-05

    申请号:US13621982

    申请日:2012-09-18

    IPC分类号: H01G5/00 H01G5/16 H01G5/011

    CPC分类号: H01G5/16 H01G5/011 Y10T29/42

    摘要: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

    摘要翻译: 根据一个实施例,MEMS元件包括固定在基板上的第一电极,形成在第一电极上面以面对它并且可垂直移动的第二电极,形成在基板上并构造成支撑第二电极的第一锚定部分,以及 构造成连接第二电极和第一锚定部分的第一弹簧部分。 第一弹簧部分包括:衬垫层,包括与第二电极和第一锚定部分接触的脆性材料,以及形成在衬垫层上的基底层,包括具有不同于衬垫层的组成的脆性材料,以及 其膜厚度大于衬层的膜厚。

    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    MEMS器件及其制造方法

    公开(公告)号:US20130182366A1

    公开(公告)日:2013-07-18

    申请号:US13621982

    申请日:2012-09-18

    IPC分类号: H01G5/01

    CPC分类号: H01G5/16 H01G5/011 Y10T29/42

    摘要: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

    摘要翻译: 根据一个实施例,MEMS元件包括固定在基板上的第一电极,形成在第一电极上面以面对它并且可垂直移动的第二电极,形成在基板上并构造成支撑第二电极的第一锚定部分,以及 构造成连接第二电极和第一锚固部分的第一弹簧部分。 第一弹簧部分包括:衬垫层,包括与第二电极和第一锚定部分接触的脆性材料,以及形成在衬垫层上的基底层,包括具有不同于衬垫层的组成的脆性材料,以及 其膜厚度大于衬层的膜厚。

    MEMS and method of manufacturing the same
    5.
    发明授权
    MEMS and method of manufacturing the same 有权
    MEMS及其制造方法

    公开(公告)号:US09287050B2

    公开(公告)日:2016-03-15

    申请号:US13413889

    申请日:2012-03-07

    申请人: Tomohiro Saito

    发明人: Tomohiro Saito

    IPC分类号: H01L29/84 H01G5/18 B81C1/00

    摘要: According to one embodiment, a MEMS includes a first electrode, a first auxiliary structure and a second electrode. The first electrode is provided on a substrate. The first auxiliary structure is provided on the substrate and adjacent to the first electrode. The first auxiliary structure is in an electrically floating state. The second electrode is provided above the first electrode and the first auxiliary structure, and is driven in a direction of the first electrode.

    摘要翻译: 根据一个实施例,MEMS包括第一电极,第一辅助结构和第二电极。 第一电极设置在基板上。 第一辅助结构设置在基板上并与第一电极相邻。 第一辅助结构处于电浮动状态。 第二电极设置在第一电极和第一辅助结构之上,并且沿第一电极的方向被驱动。

    Luminous flux control member and light-emitting apparatus including the same
    6.
    发明授权
    Luminous flux control member and light-emitting apparatus including the same 有权
    光通量控制部件和包括该光通量控制部件的发光装置

    公开(公告)号:US08905593B2

    公开(公告)日:2014-12-09

    申请号:US13601735

    申请日:2012-08-31

    申请人: Tomohiro Saito

    发明人: Tomohiro Saito

    摘要: A luminous flux control member that controls travelling direction of light emitted from a light source includes an incident area, an emission area, and a plurality of projecting sections. The plurality of projecting sections are constituted by an inner area, an intermediate area, and a peripheral area defined in the radial direction, and a first specific projecting section disposed in the inner area is configured such that a planar section that is used to measure the height of the first specific projecting section and is perpendicular to the optical axis is connected to an inner peripheral end and an outer peripheral end of a base end portion of the first specific projecting section. The projecting sections other than the first specific projecting section, in principle, come into contact internally or externally with another projecting section other than the first specific projecting section.

    摘要翻译: 控制从光源射出的光的行进方向的光束控制部件具有入射面积,发光面积,以及多个突出部。 多个突出部分由沿径向限定的内部区域,中间区域和周边区域构成,并且设置在内部区域中的第一特定突出部分被构造成使得用于测量 第一特定突出部的高度,与光轴垂直的高度与第一特定突出部的基端部的内周端和外周端连接。 原理上,除了第一特定突出部分之外的突出部分在内部或外部与除第一特定突出部分之外的另一个突出部分接触。

    Manufacturing method of hermetic container
    7.
    发明授权
    Manufacturing method of hermetic container 失效
    密封容器的制造方法

    公开(公告)号:US08475618B2

    公开(公告)日:2013-07-02

    申请号:US13198867

    申请日:2011-08-05

    IPC分类号: B32B37/16

    摘要: A manufacturing method of a hermetic container includes an assembling step of assembling the hermetic container and a sealing step of sealing by first and second sealing materials. Thus, in a case where local heating light is scanned toward an already-sealed portion of the second sealing material, since a separation portion of an unsealed state is located between the already-sealed portion and a downstream end of scanning, a load due to expansion/contraction of a frame body is applied to the first sealing material which is present in the separation portion of the unsealed state. After then, since the local heating light is irradiated to the first sealing material to which the load has been applied so as to heat and melt it, the load is relieved, whereby it is possible to suppress deterioration of joining strength and airtightness of the hermetic container.

    摘要翻译: 密封容器的制造方法包括组装密封容器的组装步骤和通过第一和第二密封材料密封的密封步骤。 因此,在向第二密封材料的已经密封的部分扫描局部加热光的情况下,由于未密封状态的分离部位于已经密封的部分和扫描的下游端之间,所以由于 将框体的伸缩进行施加到存在于未密封状态的分离部中的第一密封材料。 然后,由于局部加热光被照射到已经施加负载的第一密封材料上以加热和熔化,所以负载被释放,从而可以抑制密封件的接合强度和气密性的劣化 容器。

    Light Beam Controlling Member and Optical Device including Light Beam Controlling Member
    8.
    发明申请
    Light Beam Controlling Member and Optical Device including Light Beam Controlling Member 有权
    光束控制元件及光束控制元件

    公开(公告)号:US20120081910A1

    公开(公告)日:2012-04-05

    申请号:US13250601

    申请日:2011-09-30

    申请人: Tomohiro Saito

    发明人: Tomohiro Saito

    IPC分类号: F21V5/00

    摘要: The invention is capable of easily suppressing deterioration of light distribution characteristics caused by unnecessary light with certainty, using a design that is not difficult to manufacture, and improving efficiency of light utilization.A projecting section 11 has a third surface 23 between a first surface 14 (incident surface) and a second surface 15 (total reflection surface). The third surface 23 is formed into an angled surface that is angled in relation to an optical axis OA, of which one end section joined with the first surface 14 is positioned further to a light source 6 side than another end section joined with the second surface 15. The overall light that has entered the third surface 23 of each of a plurality of projecting sections 11 is refracted by the third surfaces 23 towards an exit surface 5 side with positive power.

    摘要翻译: 本发明能够使用不难制造的设计,提高光利用效率,能够容易地抑制由不必要的光引起的配光特性的劣化。 突出部分11具有在第一表面14(入射表面)和第二表面15(全反射表面)之间的第三表面23。 第三表面23形成为相对于光轴OA成角度的成角度的表面,其中与第一表面14接合的一个端部部分进一步位于与第二表面接合的另一端部分的光源6侧 已经进入多个突出部分11中的每一个的第三表面23的总体光被第三表面23以正向力朝向出射表面5侧折射。

    Fuel cell system and mobile body
    9.
    发明授权
    Fuel cell system and mobile body 有权
    燃料电池系统和移动体

    公开(公告)号:US08088522B2

    公开(公告)日:2012-01-03

    申请号:US12439397

    申请日:2007-08-30

    申请人: Tomohiro Saito

    发明人: Tomohiro Saito

    IPC分类号: H01M8/04

    摘要: A fuel cell system is provided with a fuel cell, an electric storage device, and a controller which determines a directed drive amount for a drive device. In the case where a drive request is input during a low-efficiency drive period in which power is supplied from the electric storage device, the directed drive amount after power generation by the fuel cell is begun is restrained. This arrangement allows a driving state to be smoothly changed even when power supply to the drive device is changed from power supply using the electric storage device alone to that using both the fuel cell and the electric storage device.

    摘要翻译: 燃料电池系统设置有燃料电池,蓄电装置和确定驱动装置的定向驱动量的控制器。 在从蓄电装置供给电力的低效率驱动期间输入驱动要求的情况下,限制燃料电池发电后的定向驱动量开始。 这种布置允许即使当驱动装置的电源从使用蓄电装置的电力改变为使用两个燃料电池和蓄电装置的电力供给时,也能够平稳地改变驱动状态。

    Mobile body
    10.
    发明授权
    Mobile body 有权
    移动体

    公开(公告)号:US08018085B2

    公开(公告)日:2011-09-13

    申请号:US12280043

    申请日:2007-07-26

    申请人: Tomohiro Saito

    发明人: Tomohiro Saito

    IPC分类号: B60L1/00 B60L3/00 H02G3/00

    摘要: The present invention has a theme of a mobile body capable of securing reliability of the mobile body at a time of start. The mobile body includes a driving force generation device which generates a driving force of the mobile body; a power accumulation device and a fuel cell capable of supplying a power to the driving force generation device; and a control device which controls driving of the driving force generation device. The control device prohibits to start driving the driving force generation device by the power supply of the power accumulation device, in a case where there is a possibility of failure in startup of the fuel cell when starting the mobile body.

    摘要翻译: 本发明的主题是能够在起动时确保移动体的可靠性的移动体。 移动体包括产生移动体的驱动力的驱动力产生装置; 功率积蓄装置和能够向驱动力产生装置供电的燃料电池; 以及控制驱动力产生装置的驱动的控制装置。 在启动移动体时,在燃料电池启动失败的情况下,控制装置禁止通过蓄电装置的电源开始驱动驱动力产生装置。