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公开(公告)号:US20110215384A1
公开(公告)日:2011-09-08
申请号:US12673550
申请日:2008-08-14
申请人: Tadahiro Ohmi , Takaaki Matsuoka , Atsutoshi Inokuchi , Kohei Watanuki , Tadashi Koike , Tatsuhiko Adachi
发明人: Tadahiro Ohmi , Takaaki Matsuoka , Atsutoshi Inokuchi , Kohei Watanuki , Tadashi Koike , Tatsuhiko Adachi
IPC分类号: H01L29/78 , H01L29/06 , H01L21/762 , H01L21/336
CPC分类号: H01L21/02255 , H01L21/02118 , H01L21/02126 , H01L21/02164 , H01L21/02167 , H01L21/0217 , H01L21/022 , H01L21/02271 , H01L21/02282 , H01L21/3121 , H01L21/316 , H01L21/76807 , H01L21/76828 , H01L21/76835 , H01L21/76897 , H01L21/823425 , H01L21/823475 , H01L21/823481 , H01L21/823871 , H01L21/823878 , H01L23/53295 , H01L24/19 , H01L24/96 , H01L2224/32145 , H01L2924/13091 , H01L2924/14 , H01L2924/1461 , H01L2924/181 , H01L2924/19105 , H01L2924/3511 , H01L2924/00
摘要: In manufacturing processes of a semiconductor device including a shallow trench element isolation region and an interlayer insulating film of a multilayer structure, it is necessary to repeatedly use CMP, but since the CMP itself is costly, the repeated use of the CMP is a cause to increase the manufacturing cost.As an insulating film for use in a shallow trench (ST) element isolation region and/or a lowermost-layer interlayer insulating film, use is made of an insulating coating film that can be coated by spin coating. The insulating coating film has a composition expressed by ((CH3)nSiO2-n/2)x(SiO2)1-x(where n=1 to 3 and 0≦x≦1.0) and a film with a different relative permittivity k is formed by selecting heat treatment conditions. The STI element isolation region can be formed by modifying the insulating coating film completely to a SiO2 film, while the interlayer insulating film with a small relative permittivity k can be formed by converting it to a state not completely modified.
摘要翻译: 在包括浅沟槽元件隔离区域和多层结构的层间绝缘膜的半导体器件的制造工艺中,需要重复使用CMP,但是由于CMP本身是昂贵的,所以重复使用CMP是造成 增加制造成本。 作为用于浅沟槽(ST)元件隔离区域和/或最下层层间绝缘膜的绝缘膜,可以使用可通过旋涂进行涂覆的绝缘涂膜。 绝缘涂膜具有由((CH 3)n SiO 2 -n / 2)x(SiO 2)1-x(其中n = 1至3和0≦̸ x≦̸ 1.0)表示的组成,并且具有不同相对介电常数k的膜 通过选择热处理条件形成。 可以通过将绝缘涂膜完全改性为SiO 2膜来形成STI元件隔离区域,而具有小相对介电常数k的层间绝缘膜可以通过将其转换为未完全改性的状态来形成。
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公开(公告)号:USD625071S1
公开(公告)日:2010-10-05
申请号:US29354214
申请日:2010-01-20
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公开(公告)号:USD622391S1
公开(公告)日:2010-08-24
申请号:US29344018
申请日:2009-09-22
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公开(公告)号:US20100130831A1
公开(公告)日:2010-05-27
申请号:US12452022
申请日:2008-06-03
申请人: Tetsuya Sato , Feilang Tseng , Tadashi Koike
发明人: Tetsuya Sato , Feilang Tseng , Tadashi Koike
CPC分类号: G01G19/50 , A61B5/0537 , G01G19/4146 , G01G23/3728
摘要: A weight scale includes weight measurement means, storage means for storing a weight measurement value along with a measurement day and time, determination means for determining whether a fluctuation range of the weight measurement value in the same day is within a predetermined reference range, and display means for displaying a percentage of days determined that the daily weight fluctuation is within the reference range. In this manner, a trend in weight change can be grasped even with the measurement of a relatively short period.
摘要翻译: 重量级包括重量测量装置,用于存储与测量日期和时间一起的重量测量值的存储装置,用于确定同一天中的重量测量值的波动范围是否在预定参考范围内的确定装置,以及显示 用于显示确定每日体重波动在参考范围内的天数的百分比的方法。 以这种方式,即使测量相对较短的时间,也可以掌握重量变化的趋势。
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75.
公开(公告)号:US20100059820A1
公开(公告)日:2010-03-11
申请号:US12520317
申请日:2007-12-19
申请人: Tadahiro Ohmi , Koichi Sugitani , Tadashi Koike , Akinori Bamba , Akihiro Kobayashi , Kohei Watanuki
发明人: Tadahiro Ohmi , Koichi Sugitani , Tadashi Koike , Akinori Bamba , Akihiro Kobayashi , Kohei Watanuki
IPC分类号: H01L29/786 , H01L21/28 , C09D7/12
CPC分类号: H01L29/4908 , H01L27/1292 , H01L29/78639
摘要: A thin-film transistor (TFT) has a gate insulating film excellent in transparency and flatness. The gate insulating film is formed by a transparent insulating film (131) which is composed of an oxide represented by RxMOy and which is arranged between a gate electrode and a semiconductor layer. The transparent insulating film (131) is made of a coating agent which is composed of one mixed liquid obtained by dissolving or dispersing a condensate, which is obtained by subjecting a compound represented by RxMXm-x (where R represents a non-hydrolyzable substituent, M represents Si, Ti, Al, Zr, Zn, Sn or In, X represents a hydrolyzable substituent, x represents an integer of 0-3, and m represents the valence of M) to a hydrolysis-condensation reaction, in an organic solvent, water or their mixed solvent, or alternatively a coating agent which is obtained by mixing two or more of such mixed liquids.
摘要翻译: 薄膜晶体管(TFT)具有透明性和平坦度优异的栅极绝缘膜。 栅极绝缘膜由透明绝缘膜(131)形成,该绝缘膜由RxMOy表示的氧化物构成,并且配置在栅电极和半导体层之间。 透明绝缘膜(131)由涂布剂构成,该涂布剂是将通过使由RxMXm-x(其中R表示不可水解取代基的R表示不可水解取代基)表示的化合物 在有机溶剂中,M表示Si,Ti,Al,Zr,Zn,Sn或In,X表示可水解取代基,x表示0-3的整数,m表示M表示水解缩合反应的化合价) ,水或其混合溶剂,或者通过混合两种或更多种这样的混合液而获得的涂层剂。
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公开(公告)号:US07664356B2
公开(公告)日:2010-02-16
申请号:US11133433
申请日:2005-05-20
申请人: Akihito Hongo , Tadashi Koike
发明人: Akihito Hongo , Tadashi Koike
IPC分类号: G02B6/032
CPC分类号: G02B6/032 , Y10T29/49002 , Y10T29/49016 , Y10T29/49117
摘要: A hollow waveguide has a metal-clad pipe having an inside metal layer and an outside metal layer, and a hollow region formed inside of the metal-clad pipe. The metal-clad pipe is formed by pressure-bonding metal pipes each of which is made of a metal material different from each other.
摘要翻译: 中空波导管具有内金属层和外侧金属层的金属包覆管和形成在金属包覆管内部的中空区域。 金属包覆管由各自由彼此不同的金属材料制成的金属管进行压接而形成。
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公开(公告)号:US20090264790A1
公开(公告)日:2009-10-22
申请号:US12091674
申请日:2006-10-11
申请人: Tameo Ashida , Tadashi Koike , Takashi Shigeno
发明人: Tameo Ashida , Tadashi Koike , Takashi Shigeno
IPC分类号: A61B5/053
CPC分类号: A61B5/0537 , A61B2560/0406 , A61B2560/0468
摘要: A body composition measuring apparatus includes electrodes for a right hand to be contacted with the right hand of a subject and electrodes for a left hand to be contacted with the left hand of the subject in an apparatus body for measuring an impedance of the body of the subject. The apparatus body includes a right hand grip having electrodes for a right hand and extending like a rod, a left hand grip having electrodes for a left hand and extending like a rod, and a base to which right hand grip and left hand grip are attached. Right hand grip is attached to base in a freely rotatable manner, and the extending direction of right hand grip and the direction along which the rotation axis of right hand grip extends are arranged to be different from each other. Thus, a small-sized, thin body composition measuring apparatus capable of being carried along can be obtained.
摘要翻译: 身体成分测量装置包括用于与受试者的右手接触的右手的电极和用于测量对象的身体的阻抗的装置主体中用于与受试者的左手接触的左手的电极 学科。 装置本体包括右手把手,其具有用于右手的电极并且像棒一样延伸,左手柄具有用于左手的电极并且像棒一样延伸,以及附接有右手把手和左手把手的基座 。 右手把手以可自由旋转的方式安装在基座上,右手把手的延伸方向和右手把手的旋转轴线沿着其延伸的方向彼此不同。 因此,可以获得能够携带的小型,薄体组成测量装置。
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公开(公告)号:US20090247897A1
公开(公告)日:2009-10-01
申请号:US12091442
申请日:2006-10-11
申请人: Tameo Ashida , Tadashi Koike , Kazuya Andachi
发明人: Tameo Ashida , Tadashi Koike , Kazuya Andachi
IPC分类号: A61B5/053
CPC分类号: A61B5/0537 , A61B5/4869 , A61B5/6825
摘要: A body composition measuring apparatus includes a right hand grip having electrodes to be contacted with the right hand of a subject, and a left hand grip having electrodes to be contacted with the left hand of the subject. The right hand grip and the left hand grip are disposed such that their respective axis lines overlap with each other on the same straight line. The left hand grip is coupled to the right hand grip in a freely movable manner such that the left hand grip can move in the axis line direction. This configuration allows a small-sized body composition measuring apparatus suitable for carrying along to be achieved.
摘要翻译: 身体成分测量装置包括具有与被检体的右手接触的电极的右手把手和具有与被检体的左手接触的电极的左手把手。 右手把手和左手把手被设置成使得它们各自的轴线在相同的直线上彼此重叠。 左手把手以可自由移动的方式联接到右手把手,使得左手把手能够沿轴线方向移动。 这种构造允许实现适合携带的小型身体成分测量装置。
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公开(公告)号:USD553023S1
公开(公告)日:2007-10-16
申请号:US29262499
申请日:2006-07-05
申请人: Tetsuya Nakada , Masaki Tomioka , Tadashi Koike , Fumie Shibata , Yuki Shibata , Dongmei Wang , Wei Zheng , Shigeto Niiyama
设计人: Tetsuya Nakada , Masaki Tomioka , Tadashi Koike , Fumie Shibata , Yuki Shibata , Dongmei Wang , Wei Zheng , Shigeto Niiyama
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公开(公告)号:USD550835S1
公开(公告)日:2007-09-11
申请号:US29252087
申请日:2006-01-19
申请人: Shinya Tanaka , Satoshi Kurata , Tadashi Koike , Fumie Shibata , Yuki Shibata
设计人: Shinya Tanaka , Satoshi Kurata , Tadashi Koike , Fumie Shibata , Yuki Shibata
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