Multi-fluid calibration
    71.
    发明授权

    公开(公告)号:US10809107B2

    公开(公告)日:2020-10-20

    申请号:US15847445

    申请日:2017-12-19

    Abstract: A flow meter system includes a flow meter configured to enable a first flow of a first fluid; and transmitter electronics coupled to the flow meter and configured to calculate a PF of the first fluid, calculate an MF corresponding to the first PF based on a correlation between PFs and MFs, and calculate a first volume of the first fluid using the first MF. A method includes establishing a correlation between MFs and PFs for a first fluid and a second fluid; storing the correlation in transmitter electronics of a flow meter system; testing the flow meter system using the correlation; and performing measurements using the correlation.

    WIDE RANGE. LOW FLOW RATE OF DECAY, TEMPERATURE DETERMINATION FLOW CONTROLLER

    公开(公告)号:US20200319658A1

    公开(公告)日:2020-10-08

    申请号:US16758031

    申请日:2018-10-25

    Abstract: Mass flow control methods and systems are described enabling rate of decay measurements with an orifice (or flow restrictor) located between the control volume and the outlet valve such that the outlet valve acts as the valve restricting backpressure. The system may include a main flow path and a reduced flow path that split the gas flow based on the received set point and backpressure. Measuring valve coil temperature may be used by measuring voltage and current of the valve of known resistance at room temperature and using copper coefficient of thermal resistivity delta. This temperature data may improve adjacent transducer temperature data and adjust the transducer output. Flow calculation during a long ROD pressure drop (in reduced flow rate) by making smaller flow calculation during sub section of the same, adjusting the control loop of delivered flow in real time while the ROD is still going and repeating.

    WATER FLOW MONITORING DEVICE
    74.
    发明申请

    公开(公告)号:US20200300680A1

    公开(公告)日:2020-09-24

    申请号:US16088409

    申请日:2017-03-24

    Abstract: A fluid flow, particularly water, monitoring device that envelopes the body of a fluid conducting channel, where the inner volume of the device provides sufficient space for accommodating water flow sensors, controlling means on the sensors and wireless communication means for communicating the water flow data to a remote control center. The device comprises fluid flow sensors for external monitoring of water flow in a fluid conducting channel, where each flow sensor comprises controller for controlling and supervising operation of the flow sensor; communication module for wirelessly communicating the signals from the water flow sensors to a remote control unit; and housing for accommodating the water flow sensors and communication module and protectively enveloping them against tampering, vandalism and sabotaging.

    Flow rate measurement device
    76.
    发明授权

    公开(公告)号:US10704942B2

    公开(公告)日:2020-07-07

    申请号:US16065136

    申请日:2016-11-15

    Abstract: Flow rate measurement device includes flow rate measurement unit that measures a flow rate of gas at a prescribed time interval, and arithmetic unit that calculates a characteristic flow rate from the flow rates measured within a predetermined period, and calculates a ratio of each flow rate measured at multiple times within the predetermined period with respect to the characteristic flow rate. In addition, flow rate measurement device includes appliance characteristic extraction unit that extracts an appliance characteristic quantity which indicates a characteristic of a flow rate change in currently using gas appliances within the predetermined period, the appliance characteristic quantity being the ratio or information obtained from the ratio, and appliance inherent characteristic information holding unit that holds an appliance inherent characteristic quantity indicating a characteristic flow rate state of a specific gas appliance. Furthermore, flow rate measurement device includes appliance discrimination unit that discriminates the currently using gas appliance by comparing the appliance characteristic quantity with the appliance inherent characteristic quantity.

    Apparatus for controlling flow and method of calibrating same

    公开(公告)号:US10663337B2

    公开(公告)日:2020-05-26

    申请号:US15858689

    申请日:2017-12-29

    Abstract: Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. Specifically, the apparatus may be calibrated on installation using a two-step process of measuring the volume of gas box downstream from the apparatus by flowing nitrogen gas into the gas box and measuring the resulting temperature and rate of pressure rise. Using the computed volume of the gas box, a sweep of several mass flow rates may be performed using the process gas and the gas map for the process gas. The apparatus is calibrated based on the measured temperature and pressure values, which allow calculation of the actual mass flow rate for the process gas as compared with the commanded mass flow rates.

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