公开(公告)号：US07798174B2

公开(公告)日：2010-09-21

申请号：US10644135

申请日：2003-08-20

申请人： Greg E. Ford ,  Harold L. Bowman

发明人： Greg E. Ford ,  Harold L. Bowman

IPC分类号： F16K11/24

CPC分类号： F15B13/0821 ,  F15B13/0814 ,  F15B13/0828 ,  F15B13/0832 ,  F15B13/0853 ,  F15B13/0857 ,  F15B13/086 ,  F16H61/0009 ,  F16H2059/683 ,  F16K27/003 ,  F16K37/005 ,  Y10T137/87885

摘要： A solenoid operated valve has a separate pressure sensing port communicating with the valve outlet port. A circuit board with a pressure transducer mounted over a sensing orifice in the board is attached to the valve body with the sensing orifice communicating with the sensing port in the valve body. The transducer thus provides a feedback signal indicative of the valve outlet pressure.

摘要翻译： 电磁阀具有与阀出口连通的单独压力传感口。 具有安装在板上的感测孔上的压力传感器的电路板通过与阀体中的感测端口连通的感测孔连接到阀体。 因此，换能器提供指示阀出口压力的反馈信号。

公开(公告)号：US07775236B2

公开(公告)日：2010-08-17

申请号：US11678622

申请日：2007-02-26

申请人： Ezra Robert Gold ,  Richard Charles Fovell ,  James Patrick Cruse ,  Jared Ahmad Lee ,  Bruno Geoffrion ,  Douglas Arthur Buchberger ,  Martin J. Salinas

发明人： Ezra Robert Gold ,  Richard Charles Fovell ,  James Patrick Cruse ,  Jared Ahmad Lee ,  Bruno Geoffrion ,  Douglas Arthur Buchberger ,  Martin J. Salinas

IPC分类号： F16K11/24

CPC分类号： H01J37/3244 ,  H01J37/32449 ,  H01L21/67098 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67115 ,  Y10T137/7761 ,  Y10T137/87249

摘要： A method and apparatus for delivering gases to a semiconductor processing system are provided. In one embodiment, an apparatus for delivering gases to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports. Connecting lines couple respective pairs of the gas input and gas output lines. Connecting valves are arranged to control flow through the respective connecting lines. Mass gas flow controllers are arranged to control flow into respective inlet ports. In another embodiment, a method includes providing a manifold having at least a plurality of inlet that may be selectively coupled to at least one of a plurality of outlets, flowing one or more gases through the manifold to a vacuum environment by-passing the processing chamber prior to processing or to a calibration circuit, and flowing the one or more gases into the processing chamber during substrate processing.

摘要翻译： 提供了一种用于将气体输送到半导体处理系统的方法和装置。 在一个实施例中，用于将气体输送到半导体处理系统的装置包括具有入口和出口的多个气体输入和输出线。 连接线耦合各对气体输入和气体输出线。 连接阀布置成控制通过相应连接线的流动。 质量气体流量控制器布置成控制流入相应入口的流量。 在另一个实施例中，一种方法包括提供具有至少多个入口的歧管，歧管可以选择性地联接到多个出口中的至少一个，将一个或多个气体通过歧管流动到真空环境，旁路处理室 在处理之前或校准电路，并且在衬底处理期间使一种或多种气体流入处理室。

公开(公告)号：US07389793B2

公开(公告)日：2008-06-24

申请号：US11476970

申请日：2006-06-27

申请人： Hsiang Hung Wang

发明人： Hsiang Hung Wang

IPC分类号： F16K11/24

CPC分类号： F16K11/076 ,  E03C1/05 ,  F16K11/0743 ,  F16K27/045 ,  F16K27/048 ,  Y10T137/87249 ,  Y10T137/87281 ,  Y10T137/87322 ,  Y10T137/87692

摘要： A faucet device includes a block disposed in a faucet member and having two passages for receiving hot and cold water and having an entrance and an exit coupled to a solenoid valve, a housing disposed in the faucet member and having two ports aligned with the entrance and the exit of the block and an outlet for supplying the water out of the faucet member. A controlling device may control the water to selectively flow through the ports of the housing to allow the faucet device to be selectively operated either manually or automatically. A valve shank may control the hot water and the cold water to flow through the passages and to be mixed in the block.

摘要翻译： 水龙头装置包括设置在水龙头构件中并具有用于接收热水和冷水的两个通道的块，并且具有连接到电磁阀的入口和出口，设置在水龙头构件中并具有与入口对准的两个端口的壳体， 块的出口和用于将水从水龙头构件供给的出口。 控制装置可以控制水选择性地流过壳体的端口，以允许手动或自动地选择性地操作水龙头装置。 阀杆可以控制热水和冷水流过通道并在块中混合。

公开(公告)号：US07028713B2

公开(公告)日：2006-04-18

申请号：US10743439

申请日：2003-12-23

申请人： Katsumi Koyama

发明人： Katsumi Koyama

IPC分类号： F16K11/24

CPC分类号： F16K31/406 ,  F16K11/105 ,  F25B41/046 ,  Y10T137/87861 ,  Y10T137/87877

摘要： The object of the present invention is to provide a switching valve capable of increasing the opening stroke of a valve operated by a differential pressure while saving space, thereby reducing pressure loss. A first valve is disposed between an inlet port and a first outlet port. A pilot valve is provided between a back pressure chamber for a movable plug that holds a valve sheet disposed in a manner opposed to a valve seat, and the first outlet port, such that the first valve is operated by a solenoid. A second valve is arranged between the inlet port and a second outlet port. A back pressure chamber for a movable plug that holds a valve sheet disposed in a manner opposed to a valve seat and the first outlet port are communicated with each other. The second valve is opened by the differential pressure generated by closing of the first valve, and when the first valve is opened, the second valve is closed by the spring since the differential pressure is reduced to zero. After the second valve is closed, the valve-closed state thereof is maintained by the difference between pressure-receiving areas. The second valve is formed to have a sealing structure using a slidable X packing, whereby the valve-opening stroke can be increased.

摘要翻译： 本发明的目的是提供一种切换阀，其能够在节省空间的同时增加由差压操作的阀的打开行程，从而减小压力损失。 第一阀设置在入口和第一出口之间。 在用于可动塞的背压室之间设置有先导阀，所述后压室保持以与阀座相对的方式设置的阀片和第一出口，使得第一阀由螺线管操作。 第二阀布置在入口和第二出口之间。 用于保持以与阀座和第一出口相对的方式设置的阀片的可移动塞的背压室彼此连通。 第二阀由于通过关闭第一阀而产生的压差打开，当第一阀打开时，第二阀被弹簧关闭，因为差压被减小到零。 在第二阀关闭之后，阀关闭状态由压力接收区域之间的差保持。 第二阀形成为具有使用可滑动的X填料的密封结构，从而能够增加开阀行程。

公开(公告)号：US20050126642A1

公开(公告)日：2005-06-16

申请号：US10707390

申请日：2003-12-10

申请人： Mark Lillis

发明人： Mark Lillis

IPC分类号： F16K11/24

CPC分类号： H01M8/04089 ,  C25B15/08 ,  H01M8/04201 ,  H01M8/04388 ,  H01M8/04619 ,  H01M8/04649 ,  H01M8/04753 ,  Y10T137/469 ,  Y10T137/4857 ,  Y10T137/87684

摘要： A gas regulation system includes a manifold, a plurality of control modules in fluid communication with the manifold, and a power source. Each control module includes an actuatable valve that is in fluid communication with an associated gas storage device and in electrical communication with the power source. The power source is adapted to prevent more than one of the actuatable valves from simultaneously having an actuated state.

摘要翻译： 气体调节系统包括歧管，与歧管流体连通的多个控制模块和电源。 每个控制模块包括与相关联的气体存储装置流体连通并与电源电连通的可致动阀。 电源适于防止多于一个致动阀同时具有致动状态。

公开(公告)号：US06883541B2

公开(公告)日：2005-04-26

申请号：US10394043

申请日：2003-03-24

申请人： Su Hwang

发明人： Su Hwang

IPC分类号： E03C1/05 ,  F16K11/076 ,  F16K11/078 ,  F16K11/18 ,  F16K11/24

CPC分类号： F16K11/076 ,  E03C1/05 ,  F16K11/078 ,  Y10T137/87137 ,  Y10T137/87145 ,  Y10T137/87322 ,  Y10T137/87507 ,  Y10T137/87692

摘要： A manual-automatic water faucet includes a shell installed inside with a water intake base, a water outlet valve, an electromagnetic valve, an induction device and a control device. The control device is composed of a valve rod, a spindle and a revolving button. The revolving button is able to actuate the valve rod to rotate or actuate the spindle to shift axially. When the valve rod is actuated to rotate, it can control water temperature, and when the spindle is actuated to shift axially, it can control the faucet to supply water automatically or manually.

摘要翻译： 手动自动水龙头包括安装有进水基座的外壳，出水阀，电磁阀，感应装置和控制装置。 控制装置由阀杆，主轴和旋转按钮构成。 旋转按钮能够致动阀杆以旋转或致动主轴以轴向移动。 当阀杆启动旋转时，可以控制水温，并且当主轴被致动以轴向移动时，它可以控制水龙头自动或手动供水。

公开(公告)号：USH1962H

公开(公告)日：2001-06-05

申请号：US70995496

申请日：1996-09-09

申请人： US NAVY

发明人： PETERSON GUS G ,  FISHER AMNON

IPC分类号： F16K31/06 ,  F16K11/24

CPC分类号： F16K31/06 ,  Y10T137/8158 ,  Y10T137/87161

摘要： The valve is designed for the ejection of a plurality of different gases from within the valve, simultaneously, by having a plurality of plenum chambers within the chamber of the valve, and a poppet therein, that are charged with gases under pressure. The gases are sealed within the respective plenum chambers by the action of a spring that urges the poppet against a gas exit port associated with each plenum chamber. Ejection of the gases is accomplished by the application of an electrical current into a coil surrounding the poppet which produces an electromagnetic field that causes a non-ferrous hammer to be driven away from the coil and strike the poppet. Upon being struck by the hammer, the poppet is driven off of the plurality of gas exit ports thereby allowing the gases to be ejected, simultaneously, from the respective plenum chambers into a region of lower pressure.

摘要翻译： 该阀被设计用于通过在阀的腔室内具有多个增压室以及在其中的提升阀，在压力下对气体进行充气，同时从阀内排出多种不同的气体。 气体通过弹簧的作用被密封在相应的增压室内，该弹簧促使提升阀抵靠与每个增压室相关联的气体出口。 气体的喷射通过将电流施加到围绕提升阀的线圈中来实现，其产生电磁场，其使得有色金属锤被驱动离开线圈并撞击提升阀。 当被锤撞击时，提升阀从多个排气口被驱除，从而允许气体同时从相应的增压室排出到较低压力的区域。

公开(公告)号：US6152422A

公开(公告)日：2000-11-28

申请号：US247762

申请日：1999-02-09

申请人： Horst Staib ,  Wolfgang Rudolph ,  Mathias Niebergall ,  Lothar Krauter ,  Klaus Schudt ,  Michael Weiss

发明人： Horst Staib ,  Wolfgang Rudolph ,  Mathias Niebergall ,  Lothar Krauter ,  Klaus Schudt ,  Michael Weiss

IPC分类号： H01F7/16 ,  F16K11/056 ,  F16K11/24 ,  F16K31/06

CPC分类号： F16K31/0637

摘要： An electromagnetic directional control valve has a magnetic part including a coil body, a coil arrangement of the coil body, a magnetic pole mounted on the coil body, a flux guiding element, and an armature, and a hydraulic part provided with passages and at least one valve which controls a pressure medium flow to the passages, and an outwardly mounted fixing element which fixes the magnetic pole on the coil body.

摘要翻译： 电磁方向控制阀具有包括线圈体，线圈体的线圈装置，安装在线圈体上的磁极，磁通引导元件和电枢的磁性部分，以及至少具有通道的液压部件 控制压力介质流向通道的一个阀，以及将磁极固定在线圈体上的向外安装的固定元件。

公开(公告)号：US5704399A

公开(公告)日：1998-01-06

申请号：US678758

申请日：1996-07-11

申请人： Bunya Hayashi ,  Shinji Miyazoe

发明人： Bunya Hayashi ,  Shinji Miyazoe

IPC分类号： F16K27/00 ,  F15B13/00 ,  F15B13/08 ,  F16K11/24 ,  F16K11/20

CPC分类号： F15B13/0821 ,  F15B13/0817 ,  F15B13/0832 ,  F15B13/0857 ,  F15B13/0875 ,  Y10T137/5283 ,  Y10T137/87885

摘要： A chained multiple connection change-over valve assembly of an extremely compact form in thickness, formed by connecting a plural number of multiplex change-over valve units of a flatly thin shape successively in a lateral direction, each change-over valve unit containing a plural number of fluid switching mechanisms within a valve casing side by side in a transverse direction and having a plural number of output ports on a front face of the valve casing in a row in the transverse direction.

摘要翻译： 通过在横向连续地连接多个平坦薄形状的多个多路转换阀单元而形成的厚度非常紧凑的链式多重连接转换阀组件，每个转换阀单元包含多个 阀壳体内的流体切换机构的数量在横向上并排并且在横向上排列在阀壳体的前表面上的多个输出端口。

公开(公告)号：US5611370A

公开(公告)日：1997-03-18

申请号：US337613

申请日：1994-11-10

申请人： Hamid Najmolhoda

发明人： Hamid Najmolhoda

IPC分类号： F16K27/04 ,  F16H61/00 ,  F16K11/22 ,  F16K11/24 ,  F16K31/06 ,  F16K31/08 ,  G05D16/20 ,  F15B13/043

CPC分类号： F16K31/0613 ,  F16K31/062 ,  F16K31/082 ,  G05D16/2093 ,  Y10T137/8659 ,  Y10T137/86614 ,  Y10T137/87209 ,  Y10T137/87885

摘要： A proportional variable force solenoid valve for controlling the pressure of a pressurized fluid in a fluid control system in proportion to the current level of an electrical input signal comprises a movable valve for controlling the pressure of pressurized fluid in the fluid control system and a solenoid for controlling movement of the valve in linear proportion to the current level of the electrical signal. The movable valve and the solenoid are disposed in a common substantially non-magnetic housing to provide a fluid control unit. The housing may comprise an aluminum casting for insertion in an aluminum transmission body. A movable armature of the solenoid may comprise a cylindrical shaped permanent magnet, rather than a ferromagnetic armature, in order to eliminate the need for a axially magnetized permanent magnet ring. A simplified armature suspension structure, fluid diverting valve mechanism, and electromagnetic flux washer are incorporated.

摘要翻译： 用于根据电输入信号的当前水平来控制流体控制系统中的加压流体的压力的比例可变力电磁阀包括用于控制流体控制系统中的加压流体的压力的可动阀和用于 控制阀的运动与电信号的当前水平成线性比例。 可移动阀和螺线管设置在通用的基本上非磁性的壳体中以提供流体控制单元。 壳体可以包括用于插入铝传动体的铝铸件。 螺线管的可移动电枢可以包括圆柱形永磁体，而不是铁磁衔铁，以便不需要轴向磁化的永磁体环。 结合了简化的电枢悬挂结构，流体转向阀机构和电磁通量清洗器。