公开(公告)号：US20050215271A1

公开(公告)日：2005-09-29

申请号：US11127881

申请日：2005-05-12

Applicant: Seng-Wook Sim ,  Joung-Kyou Park ,  Ki-Sang Jeon ,  Yong-Jin Lee

Inventor： Seng-Wook Sim ,  Joung-Kyou Park ,  Ki-Sang Jeon ,  Yong-Jin Lee

IPC: H04B1/40 ,  H03H9/30 ,  H03M7/30 ,  H04W4/14 ,  H04W88/02 ,  H04Q7/20

CPC classification number: H04W88/02 ,  H04W4/14

Abstract: Disclosed is an apparatus and method of communicating data for a digital mobile station, and more particularly a data transmitting and receiving apparatus and method capable of transmitting and receiving graphic and/or data using a Short Message Service(SMS). According to the present invention, an SMS message comprises an SMS header field and an SMS user data field, wherein the SMS user data field comprises a data transmission header field and a data field. The data transmission header field comprises a code field to indicate one of plural types of data associated with data contained in the data field of the SMS user data field, a data transmitting and receiving apparatus and method capable of transmitting and receiving graphic and/or audio data using a Short Message Service(SMS). Further, an SMS message comprises an SMS header field and an SMS user data field, wherein the SMS user data field comprises a data transmission header field and a data field. The data transmission header field comprises a code field to indicate one of plural types of data associated with data contained in the data field of the SMS user data field. The SMS message is communicated though SMS network.

Abstract translation: 公开了一种用于数字移动台的数据通信的装置和方法，特别是能够使用短消息服务（SMS）发送和接收图形和/或数据的数据发送和接收装置和方法。 根据本发明，SMS消息包括SMS报头字段和SMS用户数据字段，其中SMS用户数据字段包括数据发送报头字段和数据字段。 数据发送报头字段包括代码字段，用于指示与包含在SMS用户数据字段的数据字段中的数据相关联的多种类型的数据之一，能够发送和接收图形和/或音频的数据发送和接收装置和方法 使用短消息服务（SMS）的数据。 此外，SMS消息包括SMS头字段和SMS用户数据字段，其中SMS用户数据字段包括数据传输头字段和数据字段。 数据传输头字段包括代码字段，用于指示与包含在SMS用户数据字段的数据字段中的数据相关联的多种类型的数据之一。 短信通过SMS网络进行通信。

公开(公告)号：US06762208B2

公开(公告)日：2004-07-13

申请号：US09968204

申请日：2001-10-01

Applicant: Joel Schwartz ,  Charles James Reader ,  Wim Peter Stout ,  Yong Jin Lee ,  Christine Marie Kretz

Inventor： Joel Schwartz ,  Charles James Reader ,  Wim Peter Stout ,  Yong Jin Lee ,  Christine Marie Kretz

IPC: B01D1904

CPC classification number: B01D19/04

Abstract: The present invention pertains to a method for controlling the foaming of a waterborne composition or an industrial process by the incorporation of a foam controlling agent. The method comprises utilizing as the foam controlling agent a compound of the formula: HOR1R3C—[CH2]n—CR2R4OH R1 and R2 are independently selected from the group of alkyl radicals having from 3 to 6 carbon atoms. R3 and R4 are independently alkyl radicals having from 1 to 2 carbon atoms. n is an integer from 1 to 6. The compound generates an initial (t=0 min.) or a final (t=10 min.) foamed density at least 30% greater than that of a 0.5 wt % aqueous solution of a 12 mole ethoxylate of a C12-C15 primary alcohol (C12-C15E12) when added at 0.2 wt % to the C12-C15E12 solution. The present invention also pertains to an aqueous composition comprising the foam controlling agent.

Abstract translation: 本发明涉及通过掺入泡沫控制剂来控制水性组合物或工业方法的发泡的方法。 该方法包括使用下式化合物作为泡沫控制剂：R 1和R 2独立地选自具有3至6个碳原子的烷基。 R3和R4独立地为具有1至2个碳原子的烷基。 n是1至6的整数。该化合物产生的初始（t = 0分钟）或最终（t = 10分钟）发泡密度比12重量％的0.5重量％水溶液的发泡密度大至少30％ 当以0.2重量％添加到C12-C15E12溶液时，C12-C15伯醇（C12-C15E12）的摩尔乙氧基化物。 本发明还涉及包含泡沫控制剂的水性组合物。

公开(公告)号：US06444103B1

公开(公告)日：2002-09-03

申请号：US09662575

申请日：2000-09-15

Applicant: Mehrdad M. Moslehi ,  Yong Jin Lee ,  Cecil J. Davis ,  Ajit P. Paranjpe

Inventor： Mehrdad M. Moslehi ,  Yong Jin Lee ,  Cecil J. Davis ,  Ajit P. Paranjpe

IPC: C23C1434

CPC classification number: H01J37/3447 ,  C23C14/3464 ,  C23C14/564

Abstract: Material is deposited from an active shutter onto a substrate located in a processing chamber housing with a shutter target coupled to a shutter target assembly. A first target assembly located in the housing supports a target for physical-vapor deposition of a first material onto the substrate. A shutter is selectively moveable to extend into a closed or activated position and to retract into an open position. The shutter target assembly is coupled to the shutter such that when the shutter is in the closed position, the shutter target assembly is positioned to allow deposition of material from the shutter target onto the substrate. When the shutter is in the open position, the first target is positioned to deposit material onto the substrate. Alternating layers of materials may be deposited by the shutter target and first target by cycling the shutter between an open position and a closed position.

Abstract translation: 材料从活动快门沉积到位于处理室壳体中的基板上，其中快门目标件联接到快门目标组件。 位于壳体中的第一目标组件支撑用于将第一材料物理 - 气相沉积到衬底上的靶。 快门选择性地可移动以延伸到关闭或启动位置并缩回到打开位置。 快门目标组件联接到快门，使得当快门处于关闭位置时，快门目标组件被定位成允许材料从快门目标物体沉积到基板上。 当快门处于打开位置时，第一目标定位成将材料沉积到基板上。 通过在打开位置和关闭位置之间循环活门，可以通过快门目标和第一目标来沉积材料的交替层。

公开(公告)号：US06188044B1

公开(公告)日：2001-02-13

申请号：US09067142

申请日：1998-04-27

Applicant: Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

Inventor： Yong Jin Lee ,  Mehrdad M. Moslehi ,  Jalil Kamali ,  Sergey Belikov

IPC: F27B514

CPC classification number: H01L21/67115 ,  C23C16/481

Abstract: An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer device 40, which has a first set of energy transfer regions comprised of an emissive and thermally conductive material, and a second set of thermally insulating regions comprised of a reduced emissivity and reduced thermal conductivity material or free space. A multi-zone radiant energy source 30 provides radiative energy to energy transfer device 40, with a process controller 36, preferably a multi-zone controller, altering the amount of energy provided by each heat zone associated with each emissive region of energy transfer device 40. Sensors detect the thermal energy level of each energy transfer region to allow controller 36 to adjust the secondary radiation emitted by each region in real time, resulting in a predetermined and controlled distribution of thermal energy on substrate 20. Energy transfer device 40 can have plural emissive and thermally conductive concentric rings separated from each other by reduced emissivity and reduced thermal conductivity regions such as free space gaps 42. Alternatively, a solid plate 54 having an emissive coating or emissive surface 52 can have reduced emissivity and reduced conductivity isolation regions such as trenches 56 for defining the multi-zone high-emissivity and high thermal conductivity energy transfer regions.

Abstract translation: 一种装置和方法通过用来自能量转移装置40的二次辐射加热衬底来支持诸如半导体芯片之类的微电子器件的热处理，该能量转移装置具有由发射和导热材料组成的第一组能量转移区 以及由减少的发射率和降低的热导率材料或自由空间组成的第二组热绝缘区域。 多区域辐射能源30向能量传递装置40提供辐射能，其中过程控制器36，优选多区域控制器，改变与能量传递装置40的每个发射区域相关联的每个加热区域提供的能量的量 传感器检测每个能量传递区域的热能级别，以允许控制器36实时地调整每个区域发射的次级辐射，从而导致基板20上预定和受控的热能分布。能量传递装置40可以具有多个 发射和导热的同心环通过降低的发射率和降低的热导率区域（例如自由空间间隙42）彼此分离。或者，具有发射涂层或发射表面52的固体板54可以具有降低的发射率和降低的电导率隔离区域，例如 用于定义多区高发射率和高导热性的沟槽56 ergy转移区域。

公开(公告)号：US6004029A

公开(公告)日：1999-12-21

申请号：US680244

申请日：1996-07-10

Applicant: Mehrdad M. Moslehi ,  Yong Jin Lee

Inventor： Mehrdad M. Moslehi ,  Yong Jin Lee

IPC: G01J5/10 ,  G01J5/52 ,  G01K1/14 ,  G01K15/00 ,  F27D11/00 ,  H01L21/02

CPC classification number: G01K1/146 ,  G01J5/10 ,  G01J5/522 ,  G01K15/00

Abstract: This invention presents an automatic calibration system and method for calibration of a substrate temperature sensor in a thermal processing equipment, such as a rapid thermal processing system. The calibration system includes a temperature-sensitive probe associated with the substrate temperature sensor to calibrate the substrate temperature sensor and an actuator to position the temperature-sensitive probe relative to the substrate during a calibration cycle. The actuator and temperature-sensitive probe of the automatic calibration system can be incorporated into the thermal processing equipment in order to maintain the thermal processing equipment cleanliness and integrity during a calibration cycle, and to allow rapid automated calibration. In the preferred embodiment of this invention, the temperature-sensitive probe and its actuator are implemented in the gas showerhead assembly of a rapid thermal processing system.

Abstract translation: 本发明提出了一种用于在诸如快速热处理系统的热处理设备中校准衬底温度传感器的自动校准系统和方法。 校准系统包括与衬底温度传感器相关联的温度敏感探针以校准衬底温度传感器，以及在校准周期期间相对于衬底定位温度敏感探针的致动器。 自动校准系统的致动器和温度敏感探头可以并入热处理设备，以便在校准周期内保持热处理设备的清洁度和完整性，并允许快速自动校准。 在本发明的优选实施例中，温度敏感探针及其致动器被实现在快速热处理系统的气体喷头组件中。

公开(公告)号：US5871588A

公开(公告)日：1999-02-16

申请号：US677980

申请日：1996-07-10

Applicant: Mehrdad M. Moslehi ,  Yong Jin Lee

Inventor： Mehrdad M. Moslehi ,  Yong Jin Lee

IPC: C23C16/44 ,  C23C16/458 ,  H01L21/205 ,  H01L21/683 ,  H01L21/687 ,  H02K21/14 ,  C23C16/00

CPC classification number: H01L21/68792 ,  C23C16/4584

Abstract: An apparatus and method for wafer rotation in microelectronics manufacturing equipment is presented. The present invention combines an external stator assembly having a plurality of electromagnetic actuator coils with an internal rotor assembly having a plurality of multipolar permanent magnets or ferromagnetic coupling tabs. The rotor assembly supports the semiconductor wafer or any other substrate inside the process chamber. The electromagnetic actuator coils of the stator assembly receive a plurality of multi-phase, controlled frequency electrical currents to create magnetic fields around the actuator coils that interact with the multipolar permanent magnets or ferromagnetic coupling tabs of the rotor assembly to provide the rotational force to rotate the rotor assembly and thus, rotate the semiconductor wafer or any other substrate within the process chamber.

Abstract translation: 介绍了微电子制造设备中晶圆旋转的装置和方法。 本发明将具有多个电磁致动器线圈的外部定子组件与具有多个多极永磁体或铁磁耦合片的内部转子组件组合。 转子组件支撑半导体晶片或处理室内部的任何其它基板。 定子组件的电磁致动器线圈接收多个多相控制频率电流，以产生围绕致动器线圈的磁场，该磁场与转子组件的多极永磁体或铁磁耦合接头相互作用以提供旋转力 转子组件并因此使半导体晶片或处理室内的任何其它基板旋转。