公开(公告)号：US08640538B2

公开(公告)日：2014-02-04

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/68

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：US20130192388A1

公开(公告)日：2013-08-01

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/34

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：USD674303S1

公开(公告)日：2013-01-15

申请号：US29411773

申请日：2012-01-26

申请人： Takayuki Saito ,  Keiji Hanzawa ,  Takayuki Yogo

设计人： Takayuki Saito ,  Keiji Hanzawa ,  Takayuki Yogo

公开(公告)号：US20110072897A1

公开(公告)日：2011-03-31

申请号：US12829105

申请日：2010-07-01

申请人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa ,  Yasuo Onose

发明人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa ,  Yasuo Onose

IPC分类号： G01F1/692

CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01F15/006 ,  G01F15/12

摘要： A temperature of the heating resistor is set at a temperature equal to or higher than a temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Alternatively, when a heating resistance type air flow rate measuring device starts to operate or stops operating, the temperature of the heating resistor may be set at a temperature equal to or higher than the temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Moreover, a water-repellent and oil-repellent protective coating may be provided on the surface of the heating resistor.

摘要翻译： 加热电阻器的温度被设定为等于或高于与加热电阻器的表面接触的液滴蒸发并通过薄膜沸腾而消失的温度。 或者，当加热电阻型空气流量测量装置开始运行或停止运行时，加热电阻器的温度可以设定在等于或高于液滴接触加热电阻器的表面的温度 通过薄膜沸腾蒸发并消失。 此外，可以在加热电阻器的表面上设置防水和防油涂层。

公开(公告)号：US07472591B2

公开(公告)日：2009-01-06

申请号：US11781569

申请日：2007-07-23

申请人： Yasuhiro Kanamaru ,  Keiji Hanzawa

发明人： Yasuhiro Kanamaru ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/688 ,  G01F15/006

摘要： An object of the invention is to realize a thermal gas flow sensor capable of reducing time fluctuation of a heating resistor. A heating resistor 3 and thermometric resistors 4 and 14 are formed on a surface of a thin-wall portion 2. Electrode drawn wires 18 to 23 and pad portions 8 to 13 are formed so as to draw signal lines from the heating resistor 3 and the thermometric resistors 4 and 14. Contact portions 24 to 29 are formed to come in contact with the heating resistor 3, the thermometric resistors 4 and 14, and the electrode drawn wires 18 to 23. The heating resistor 3 and the thermometric resistors 4 and 14 are covered with protective films 30a, 30b, and 31a and insulating films 31b and 30c. The protective films 31a and 31b are formed of a dense film formed of nitride or the like. A part coming in contact with a drawn wire portion 34 and the heating resistor 3 is covered with a contact barrier metal film 36 (titanium-based electrical conductor such as titanium nitride, titanium tungsten, and titanium). The titanium-based electrical conductor is a dense film and resistant to hydrogen. Therefore, it is possible to reduce a time fluctuation of the heating resistor.

摘要翻译： 本发明的目的是实现能够减少加热电阻器的时间波动的热气流量传感器。 在薄壁部分2的表面上形成加热电阻器3和温度测量电阻器4和14.形成电极拉丝18至23和焊盘部分8至13，以便从加热电阻器3和 形成温度计电阻器4和14.接触部分24至29与加热电阻器3，测温电阻器4和14以及电极拉丝18至23接触。加热电阻器3和测温电阻器4和14 覆盖有保护膜30a，30b和31a以及绝缘膜31b和30c。 保护膜31a和31b由氮化物等形成的致密膜形成。 与拉丝部分34和加热电阻器3接触的部分被接触阻挡金属膜36（钛基电导体，例如氮化钛，钛钨和钛）覆盖。 钛基电导体是致密膜并且耐氢。 因此，可以减少加热电阻器的时间波动。

公开(公告)号：US20050072225A1

公开(公告)日：2005-04-07

申请号：US10953608

申请日：2004-09-30

申请人： Atsushi Kanke ,  Izumi Watanabe ,  Keiji Hanzawa

发明人： Atsushi Kanke ,  Izumi Watanabe ,  Keiji Hanzawa

IPC分类号： G01F1/698 ,  G01F1/68 ,  G01F1/684 ,  G01F1/696 ,  F01P7/14

CPC分类号： G01F1/696 ,  G01F1/6845

摘要： In regard to an output of an intake flow meter for an internal combustion engine, a pulsation error can be reduced and dispersion in correction at the time of correction of response delay (a recovering of response delay) is reduced. A digital device is used for pre-processing of a control unit for inputting a flow rate measuring signal. An output voltage of the flow sensor is converted into a digital value, the digital value is converted into a flow rate and adds a response delay. The control unit detects a degree of response delay in reference to dispersion in a clock signal so as to perform response delay recovering and reduce dispersion of the response delay.

摘要翻译： 关于用于内燃机的进气流量计的输出，可以减小脉动误差，并且在响应延迟校正时（响应延迟的恢复）减小时的校正偏差。 数字装置用于预处理用于输入流量测量信号的控制单元。 流量传感器的输出电压被转换为数字值，数字值被转换为流量并增加响应延迟。 控制单元根据时钟信号中的色散来检测响应延迟的程度，以便执行响应延迟恢复并减少响应延迟的偏差。

公开(公告)号：US06564643B1

公开(公告)日：2003-05-20

申请号：US09807325

申请日：2001-04-12

申请人： Junichi Horie ,  Atsushi Miyazaki ,  Satoshi Shimada ,  Akihiko Saitou ,  Yasuo Onose ,  Norio Ichikawa ,  Keiji Hanzawa

发明人： Junichi Horie ,  Atsushi Miyazaki ,  Satoshi Shimada ,  Akihiko Saitou ,  Yasuo Onose ,  Norio Ichikawa ,  Keiji Hanzawa

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor comprising, on a semiconductor substrate 10, an active capacitor 100 whose capacitance varies as the surrounding pressure varies, a reference capacitor 200 whose capacitance will not vary substantially as the surrounding pressure varies, and a circuit which is electrically connected to both said active and reference capacitors 100 and 200, detects the difference or ratio thereof, and uses the potential of a semiconductor substrate, wherein an electrode 30a of said reference capacitor is formed on the semiconductor substrate 10 with a dielectric 20 therebetween.

摘要翻译： 一种消除参考电容器和半导体衬底之间的寄生电容的高精度高稳定性电容式压力传感器。 一种电容式压力传感器，包括在半导体衬底10上的电容随着周围压力变化而变化的有源电容器100，其电容量不会随周围压力变化而变化不大的参考电容器200以及电连接到 所述有源和参考电容器100和200都检测其差异或比例，并且使用半导体衬底的电位，其中所述参考电容器的电极30a形成在半导体衬底10上，其间具有电介质20。

公开(公告)号：US20140284753A1

公开(公告)日：2014-09-25

申请号：US14355104

申请日：2011-11-28

申请人： Norio Ishitsuka ,  Keiji Hanzawa ,  Yasuo Onose ,  Noriyuki Sakuma

发明人： Norio Ishitsuka ,  Keiji Hanzawa ,  Yasuo Onose ,  Noriyuki Sakuma

IPC分类号： G01F1/69

CPC分类号： G01F1/69 ,  G01F1/692

摘要： A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.

摘要翻译： 提供了产生较少测量误差的热空气流量传感器。 热空气流量传感器包括：半导体衬底; 加热电阻器，电阻温度检测器和包括氧化硅膜的电绝缘体，其中在半导体衬底上形成有加热电阻器，电阻温度检测器和电绝缘体; 以及通过去除半导体衬底的一部分而形成的膜片部分。 加热电阻器和电阻温度检测器形成在隔膜部分上。 热空气流量传感器还包括形成为加热电阻器上方的电绝缘体的电阻温度检测器的氮化硅膜。 氮化硅膜具有符合加热电阻器和电阻温度检测器的图案的步骤。 氮化硅膜具有多层结构。

公开(公告)号：US20140216146A1

公开(公告)日：2014-08-07

申请号：US14240946

申请日：2012-07-31

申请人： Takayuki Yogo ,  Takayuki Saito ,  Keiji Hanzawa

发明人： Takayuki Yogo ,  Takayuki Saito ,  Keiji Hanzawa

IPC分类号： F02M35/10

CPC分类号： F02M35/10373 ,  F02D41/187 ,  F02M35/10393 ,  G01F1/684 ,  G01F15/14

摘要： To prevent dew condensation on a sensor element, an air physical quantity sensing device which has a housing structural component integrally provided with a connector and a connector terminal member that perform input and output with the outside, an electronic circuit board mounted on the housing structural component, and an air physical quantity sensing element provided on the electronic circuit board and capable of detecting physical quantity of air. The housing structural component formed with a communication hole which allows the inside and outside of the main air flow passage to communicate with each other. The electronic circuit board has the communication hole separated into two and the surface on the side where the air physical quantity sensing element is provided faces the main air flow passage side.

摘要翻译： 为了防止传感器元件上的结露，具有一体地设置有连接器的壳体结构部件和与外部进行输入和输出的连接器端子部件的空气物理量检测装置，安装在壳体结构部件上的电子电路板 以及设置在电子电路板上并且能够检测空气的物理量的空气物理量感测元件。 壳体结构部件形成有连通孔，其允许主空气流动通道的内部和外部彼此连通。 电子电路板具有分离为两个的连通孔，并且设置有空气物理感测元件的一侧的表面面向主空气流动通道侧。

公开(公告)号：US08763452B2

公开(公告)日：2014-07-01

申请号：US13209883

申请日：2011-08-15

申请人： Ryosuke Doi ,  Keiji Hanzawa

发明人： Ryosuke Doi ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692 ,  G01F5/00 ,  G01F15/10 ,  G01F15/105

摘要： In a thermal air flow sensor according to the invention, a hollow formed in a detecting element is communicated with a circuit chamber, in which driving circuit parts of the detecting element are mounted, or an intake duct exterior. Thereby, pressure in the hollow balances with pressure on the outside. Also, since the circuit chamber is provided to be isolated from a detection chamber, in which a detecting part of the detecting element is arranged, that is, a passage chamber, through which air being a measuring object flows, air flowing in the passage chamber can be restrained from flowing into the hollow to have an influence on flow output characteristics.

摘要翻译： 在根据本发明的热空气流量传感器中，形成在检测元件中的中空与安装有检测元件的驱动电路部分的电路室或进气管外部连通。 因此，空心中的压力与外部的压力平衡。 此外，由于电路室被设置为与检测元件的检测部分配置的检测室隔离，即，作为测量对象的空气流过的通道室，在通道室中流动的空气 可以抑制流入中空部分以对流量输出特性产生影响。