Method of forming a gate insulating layer of a semiconductor device using deuterium gas
    82.
    发明申请
    Method of forming a gate insulating layer of a semiconductor device using deuterium gas 审中-公开
    使用氘气形成半导体器件的栅极绝缘层的方法

    公开(公告)号:US20060134925A1

    公开(公告)日:2006-06-22

    申请号:US11302892

    申请日:2005-12-13

    IPC分类号: H01L21/31 H01L21/469

    摘要: In an exemplary embodiment of the invention a method of forming a gate oxide layer of a semiconductor device uses deuterium gas. The method includes introducing a semiconductor substrate, and depositing an insulating layer on the semiconductor substrate by supplying an oxidation reaction gas and a deuterium gas to the semiconductor substrate. Thus, a high quality gate oxide layer can be formed and resistance to degradation from the hot carrier effect can be improved. Further, when the method is applied to a tunnel oxide layer process of a flash memory, problems such as an increasing dispersion of the threshold voltage can be mitigated.

    摘要翻译: 在本发明的示例性实施例中,形成半导体器件的栅极氧化物层的方法使用氘气。 该方法包括:通过向半导体衬底提供氧化反应气体和氘气,引入半导体衬底,并在半导体衬底上沉积绝缘层。 因此,可以形成高质量的栅极氧化物层,并且可以提高耐热载流子效应的降解性。 此外,当将该方法应用于闪速存储器的隧道氧化物层处理时,可以减轻诸如阈值电压的增加的色散的问题。

    Cleaning device of corona charging unit in image forming apparatus
    83.
    发明授权
    Cleaning device of corona charging unit in image forming apparatus 失效
    成像设备中电晕充电单元的清洁装置

    公开(公告)号:US5697019A

    公开(公告)日:1997-12-09

    申请号:US579598

    申请日:1995-12-26

    申请人: Jung-Hwan Kim

    发明人: Jung-Hwan Kim

    IPC分类号: G03G15/02 G03G21/10 H01T19/00

    CPC分类号: G03G15/0258 G03G15/0291

    摘要: A cleaning device of a charging unit in an image forming apparatus using an electrophotographic process for cleaning a corona wire. The cleaning device comprises an elongated shield case having a guide slit in a central portion extending in a lengthwise direction of a photosensitive drum; a cleaning shaft guide containing a bore therein, mounted to the guide slit and adapted to slide along the guide slit, a cleaning shaft having a handle and an integrally connected body inserted into the bore and adapted to maintain a cleaning member at a distance from the corona wire during non-cleaning of the corona wire, and to allow, upon application of force, the cleaning member to resiliently press against the corona wire and move along the corona wire while being held in frictional contact with the corona wire during cleaning of the corona wire by way of an elastic spring disposed between the handle of the cleaning shaft and the cleaning shaft guide.

    摘要翻译: 一种使用电子照相方法清洁电晕丝的图像形成装置中的充电单元的清洁装置。 所述清洁装置包括细长的屏蔽壳体,所述细长的屏蔽壳体具有沿着感光鼓的长度方向延伸的中心部分的引导狭缝; 清洁轴引导件,其中包含孔,安装到引导狭缝并且适于沿着引导狭缝滑动;清洁轴,其具有手柄和插入孔中的整体连接体,并且适于将清洁构件保持在距离 电晕线在电镀线的不清洁期间,并且在施加力时允许清洁构件弹性地压靠电晕丝并沿着电晕丝移动,同时在清洁电晕线期间与电晕丝保持摩擦接触 通过布置在清洁轴的手柄和清洁轴引导件之间的弹性弹簧来形成电晕丝。