公开(公告)号：US07538932B2

公开(公告)日：2009-05-26

申请号：US11776422

申请日：2007-07-11

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

Abstract translation: 通过将高有效反射区域填充率和非衍射微镜阵列与高静电效率和低表面粘附控制基板耦合来制造用于显示和印刷的高对比度空间光调制器。

公开(公告)号：US07468830B2

公开(公告)日：2008-12-23

申请号：US11427327

申请日：2006-06-28

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  B81C2201/112

Abstract: A method for applying anti-stiction material to a micro device on a substrate includes introducing anti-stiction material on a surface of an encapsulation device or a surface of the substrate and sealing at least a portion of the encapsulation device to the surface of the substrate to form a chamber to encapsulate the micro device and the anti-stiction material. The micro device includes a first component and a second component. The first component is moveable and is configured to contact the second component. The method also includes vaporizing the anti-stiction material and depositing the anti-stiction material on a surface of the first component or a surface of the second component after vaporizing the anti-stiction material to prevent stiction between the first component and the second component.

Abstract translation: 将抗静电材料施加到基板上的微器件的方法包括将抗静电材料引入到封装装置的表面或基板的表面上，并将至少一部分封装装置密封到基板的表面 以形成包封微型装置和抗静电材料的室。 微型装置包括第一部件和第二部件。 第一组件是可移动的并被配置成与第二组件接触。 该方法还包括在蒸发抗静电材料之后蒸发抗静电材料并将抗静电材料沉积在第一组分或第二组分的表面上，以防止第一组分和第二组分之间的粘结。

公开(公告)号：US20080273233A1

公开(公告)日：2008-11-06

申请号：US11735469

申请日：2007-04-15

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/08

CPC classification number: G02B26/0833

Abstract: An encapsulated micro device includes a micro device on a substrate within a chamber, a transparent encapsulation cover in part defining the chamber, an opaque layered structure on the encapsulation cover and inside the chamber. The layered structure includes an opening over the micro device and is configured to absorb light and moisture In the chamber. A spacer wall between the substrate and the encapsulation cover in part defines the chamber.

Abstract translation: 封装的微器件包括在腔室内的衬底上的微器件，部分限定腔室的透明封装盖，在封装盖和腔室内部的不透明分层结构。 分层结构包括微型装置上的开口，并且构造成在室中吸收光和水分。 衬底和封装盖之间的间隔壁部分地限定了腔室。

公开(公告)号：US07443572B2

公开(公告)日：2008-10-28

申请号：US11297162

申请日：2005-12-07

Applicant: Shaoher X. Pan ,  Vlad Novotny ,  Xuchun Liu

Inventor： Shaoher X. Pan ,  Vlad Novotny ,  Xuchun Liu

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and a hinge component supported by the hinge support post and in connection with the mirror plate; and a landing tip having a laterally extended upper portion and a vertically extended lower portion in connection with the substrate and the vertically extended lower portion. The laterally extended upper portion can contact the lower surface of the mirror plate to limit the rotation of the mirror plate. The hinge component extends into the cavity and can facilitate a rotation of the mirror plate.

Abstract translation: 一种空间光调制器包括一个反射镜板，该反射板包括反射上表面，下表面和在下表面上具有开口的空腔; 包括上表面的衬底，与所述上表面相关的铰链支撑柱以及由所述铰链支撑柱支撑并与所述镜板连接的铰链部件; 以及具有与基底和垂直延伸的下部相连的横向延伸的上部和垂直延伸的下部的着陆尖端。 横向延伸的上部可以接触镜板的下表面以限制镜板的旋转。 铰链部件延伸到空腔中并且可以促进镜板的旋转。

公开(公告)号：US07423798B2

公开(公告)日：2008-09-09

申请号：US11465106

申请日：2006-08-16

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00 ,  G02B26/08 ,  G09G3/34 ,  B41J2/47

CPC classification number: G02B26/0841

Abstract: A control substrate of spatial light modulator for a bi-directional micro mirror array includes a plurality of unit cells, each includes a common electrode at a fixed constant potential and an addressing electrode under the mirror plate on opposite sides of a pivot point of the mirror hinge, a pair of micro landing tips, a single CMOS transistor electrically connected to a storage capacitor, and a word-line/bit-line interconnection structure for communicating signals.

Abstract translation: 用于双向微反射镜阵列的空间光调制器的控制基板包括多个单元电池，每个单元电池包括固定恒定电位的公共电极和位于镜面的反射镜下方的寻址电极 铰链，一对微着地尖端，与存储电容器电连接的单个CMOS晶体管，以及用于传送信号的字线/位线互连结构。

公开(公告)号：US20080198372A1

公开(公告)日：2008-08-21

申请号：US11677482

申请日：2007-02-21

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G01M11/06

CPC classification number: G01C21/365 ,  B60Q1/38 ,  B60Q1/50 ,  B60Q2300/32 ,  B60Q2300/42 ,  B60Q2400/50 ,  F21S41/135 ,  F21S41/645

Abstract: A vehicle includes a headlight comprising a light source configured to emit light and a device to produce an image pixel in a display image in front of the vehicle. The image projected by the headlight can provide the driver with information, such as onto a roadway on which the vehicle is traveling.

Abstract translation: 车辆包括头灯，其包括被配置为发光的光源和用于在车辆前方的显示图像中产生图像像素的装置。 由大灯投影的图像可以向驾驶员提供诸如车辆行驶的道路上的信息。

公开(公告)号：US07405862B2

公开(公告)日：2008-07-29

申请号：US11366195

申请日：2006-03-01

Applicant: Shaoher X. Pan ,  Vlad Novotny

Inventor： Shaoher X. Pan ,  Vlad Novotny

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/0841

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower portion of the mirror plate. The mirror plate can tilt around a hinge component extending into the first cavity. The hinge component is supported by a stationary substrate. The tilt movement of the mirror plate can be stopped when the cantilever comes to contact with a stationary object.

Abstract translation: 一种空间光调制器包括一个镜面板，该反射镜板包括反射的上表面，下表面在下表面具有一个凹槽，一个在下表面上具有一个开口的第一腔，以及位于该凹槽下方并与 镜面板。 镜板可以围绕延伸到第一腔中的铰链部件倾斜。 铰链部件由固定基板支撑。 当悬臂与静止物体接触时，可以停止镜板的倾斜运动。

公开(公告)号：US07391554B2

公开(公告)日：2008-06-24

申请号：US11467367

申请日：2006-08-25

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap.

Abstract translation: 空间光调制器包括以基板上的蜂窝图案设置的六角镜板的二维阵列。 每个六角镜板由一个或多个结构构件支撑。 相邻的六角镜板之间有间隙。 结构件不在间隙内。

公开(公告)号：US20080003784A1

公开(公告)日：2008-01-03

申请号：US11427272

申请日：2006-06-28

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L21/20

CPC classification number: B81C1/00246 ,  B81B2201/047 ,  B81C2201/0176 ,  B81C2203/0721 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/0262

Abstract: A method of fabricating a micro structure includes depositing amorphous silicon over a substrate having an electric circuit at a temperature below 550° C. to form a first structure portion, wherein at least part of the first structure portion is configured to receive an electrical signal from the electric circuit.

Abstract translation: 制造微结构的方法包括在低于550℃的温度下在具有电路的衬底上沉积非晶硅，以形成第一结构部分，其中第一结构部分的至少一部分被配置为从 电路。

公开(公告)号：US07034984B2

公开(公告)日：2006-04-25

申请号：US10849404

申请日：2004-05-18

Applicant: Shaoher X. Pan ,  Xiao (Charles) Yang

Inventor： Shaoher X. Pan ,  Xiao (Charles) Yang

IPC: H01L21/00 ,  G02B26/00

CPC classification number: G02B26/0841 ,  Y10S359/90

Abstract: Fabrication of a micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array is fabricated from a substrate that is a first substrate of a single crystal material. Cavities are formed in a first side of the first substrate. Separately, electrodes and addressing and control circuitry are fabricated on a first side of a second substrate. The first side of the first substrate is bonded to the first side of the second substrate. The sides are aligned so the electrodes on the second substrate are in proper relation with the mirror plates that will be formed on the first substrate and that the electrodes will control. The first substrate is thinned to a pre-determined, desired thickness, a hinge is etched, a sacrificial material is deposited, the upper surface of the first substrate is planarized, a reflective surface is deposited to cover the hinge, a mirror is released by etching and the sacrificial layer around the hinge is removed to release the hinge so the hinge can rotate about an axis in line with the hinge.

Abstract translation: 具有隐藏铰链的微反射镜阵列的制造，其例如在反射空间光调制器中是有用的。 在一个实施例中，微反射镜阵列由作为单晶材料的第一衬底的衬底制成。 在第一基板的第一侧形成有凹穴。 另外，在第二衬底的第一侧上制造电极和寻址和控制电路。 第一衬底的第一侧被结合到第二衬底的第一侧。 侧面对准，使得第二基板上的电极与将在第一基板上形成的反射板成正确的关系，并且电极将被控制。 将第一衬底减薄至预定的期望厚度，蚀刻铰链，沉积牺牲材料，第一衬底的上表面被平坦化，沉积反射表面以覆盖铰链，镜由第 蚀刻和围绕铰链的牺牲层被去除以释放铰链，因此铰链可以围绕与铰链一致的轴线旋转。