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    Servo-control system
    81.
    发明授权
    Servo-control system 有权

    公开(公告)号：US11830760B2

    公开(公告)日：2023-11-28

    申请号：US17954227

    申请日：2022-09-27

    Applicant: Applied Materials, Inc.

    Inventor： Paul Wirth ,  Behzad Taheri

    IPC: H01L21/687 ,  F15B9/03 ,  F15B11/076 ,  F15B9/14

    CPC classification number: H01L21/68742 ,  F15B9/03 ,  F15B9/14 ,  F15B11/076

    Abstract: Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

    Device for dampening the oscillation of the arm of a handling equipment of the swingable lever type
    83.
    发明申请
    Device for dampening the oscillation of the arm of a handling equipment of the swingable lever type 审中-公开
    用于抑制可摆动杆式操纵装置的臂的摆动的装置

    公开(公告)号：US20040065194A1

    公开(公告)日：2004-04-08

    申请号：US10460250

    申请日：2003-06-13

    Applicant: VEP AUTOMATION S.R.L

    Inventor： Ener Varetto ,  Lio Piccolo

    IPC: F01B031/00

    CPC classification number: F15B15/227 ,  F15B11/076 ,  F15B15/1466 ,  F15B2211/40507 ,  F15B2211/41536 ,  F15B2211/7055 ,  F15B2211/75 ,  F15B2211/863

    Abstract: A handling equipment of the swingable lever type comprises a driving double acting cylinder (5) having a chamber (18) in which a main piston (15) is sealingly mounted, which is slidable as a result of the selective delivery of fluid under pressure from opposite zones of the chamber (18) of the cylinder (5). The main piston (15) is connected to a rod (10) having a driving end (10a) which projects from the cylinder (5) and is associated with a movable arm (7). The equipment (1) is provided with a device for dampening the oscillation of the arm (7), which comprises an axial cavity (27) formed in the rod (10) and containing a service fluid. A stem (30) rigidly connected to the cylinder (5) and provided with at least one orifice (31, 31a) for the service fluid is sealingly and slidably mounted in the cavity (27), so that the movement of the rod (10) with respect to the stem (30) is slowed down as a consequence of the flowing of the service fluid through said orifice (31, 31a), if the sliding speed of the main piston (15) inside the cylinder (5) exceeds a threshold speed set by the cross-section of said orifice (31, 31a).

    Abstract translation: 可摆动杆式的处理设备包括一个具有腔室（18）的驱动双作用缸（5），其中密封地安装有主活塞（15），由于在压力下选择性地输送流体 气缸（5）的腔室（18）的相对区域。 主活塞（15）连接到具有从气缸（5）突出并与可动臂（7）相关联的驱动端（10a）的杆（10）。 设备（1）设置有用于抑制臂（7）的振荡的装置，其包括形成在杆（10）中并包含服务流体的轴向空腔（27）。 刚性地连接到气缸（5）并且设置有用于使用流体的至少一个孔口（31,31a）的杆（30）被密封地和可滑动地安装在空腔（27）中，使得杆（10）的运动 如果主缸体（5）内部的主活塞（15）的滑动速度超过一个（1），则相对于阀杆（30）的流量减慢，这是由于服务流体流过所述孔口（31,31a） 由所述孔口（31,31a）的横截面设定的阈值速度。

    Linear-acting controllable pneumatic motion control apparatus and control method therefor
    85.
    发明申请
    Linear-acting controllable pneumatic motion control apparatus and control method therefor 审中-公开
    线性作用可控气动运动控制装置及其控制方法

    公开(公告)号：US20020014380A1

    公开(公告)日：2002-02-07

    申请号：US09901354

    申请日：2001-07-09

    Inventor： Mark R. Jolly ,  Richard Wilder

    IPC: F16F009/06

    CPC classification number: F16D57/002 ,  F15B11/076 ,  F15B15/26 ,  F15B21/065 ,  F15B21/08 ,  F15B2211/30525 ,  F15B2211/327 ,  F15B2211/41536 ,  F15B2211/6336 ,  F15B2211/6654 ,  F15B2211/6656 ,  F15B2211/7055 ,  F15B2211/75 ,  F15B2211/7656 ,  F15B2211/885 ,  F15B2211/8855 ,  F16D55/00 ,  F16D63/008

    Abstract: A controllable pneumatic apparatus including a pneumatic actuator coupled with a linear-acting brake including a field responsive medium. The pneumatic actuator has a housing with a gas cavity, a first piston slidably disposed in the gas cavity subdividing the gas cavity into first and second gas chambers, and an output member coupled to the first piston. The linear-acting controllable brake includes a medium containing cavity subdivided into a first and second chambers, and a second piston rigidly interconnected with, and longitudinally aligned with, the first piston. A passageway interconnects the first and the second chambers and a field responsive medium (e.g., a magnetic fluid) is contained in the passageway. A field generator produces a field to change a rheology of the medium and cause a braking force to be applied to the output member to control motion thereof. A preferable control method implements motion control based upon the kinetic energy and the braking force in the system.

    Abstract translation: 一种可控气动装置，包括与包括场响应介质的线性作动制动器联接的气动致动器。 气动致动器具有带有气体腔的壳体，可滑动地设置在气腔中的第一活塞，将气腔细分成第一和第二气体室，以及联接到第一活塞的输出构件。 线性作用可控制动器包括细分为第一和第二腔室的介质容纳空腔，以及与第一活塞刚性地互连并且与第一活塞纵向对齐的第二活塞。 通道将第一和第二室互连，并且通道中包含场响应介质（例如，磁性流体）。 场发生器产生场以改变介质的流变性，并且使制动力施加到输出构件以控制其运动。 优选的控制方法基于系统中的动能和制动力来实现运动控制。

    Pneumatic actuator with hydraulic control
    86.
    发明授权
    Pneumatic actuator with hydraulic control 失效
    带液压控制的气动执行机构

    公开(公告)号：US5161449A

    公开(公告)日：1992-11-10

    申请号：US719436

    申请日：1991-06-24

    Applicant: Hobart R. Everett, Jr.

    Inventor： Hobart R. Everett, Jr.

    IPC: F15B11/072 ,  F15B11/076

    CPC classification number: F15B11/076 ,  F15B11/0725 ,  F15B2211/216 ,  F15B2211/40515 ,  F15B2211/7051 ,  F15B2211/75

    Abstract: The present invention provides a pneumatically powered actuator having hydraulic control for both locking and controlling the velocity of an output rod without any sponginess. The invention includes a double-acting pneumatic actuator having a bore, a piston slidably engaged within the bore, and a control rod connected to the piston. The double-acting pneumatic actuator is mounted to a frame. A first double-acting hydraulic actuator having a bore, a piston slidably engaged within the bore, and a follower rod mounted to the piston is mounted to the frame such that the follower rod is fixedly connected to the control rod. The maximum translation of the piston within the bore of the first double-acting hydraulic actuator provides a volumetric displacement V.sub.1. The present invention also includes a second double-acting hydraulic actuator having a bore, a piston slidably engaged within the bore, and an output rod mounted to the piston. The maximum translation of the piston within the bore of the second double-acting hydraulic actuator provides a volumetric displacement V.sub.2, where V.sub.2 =V.sub.1. A pair of fluid ports in each of the first and second double-acting hydraulic cylinders are operably connected by fluid conduits, one of which includes a valve circuit which may be used to control the velocity of the output rod or to lock the output rod in a static position by regulating the flow of hydraulic fluid between the double-acting cylinders.

    Abstract translation: 本发明提供一种具有液压控制的气动致动器，用于锁定和控制输出杆的速度，而没有任何海绵状。 本发明包括具有孔的双作用气动致动器，可滑动地接合在孔内的活塞和连接到活塞的控制杆。 双作用气动执行器安装在框架上。 具有孔的第一双作用液压致动器，可滑动地接合在孔内的活塞和安装到活塞的从动杆安装到框架上，使得从动杆固定地连接到控制杆。 活塞在第一双作用液压致动器的孔内的最大平移提供了体积位移V1。 本发明还包括具有孔的第二双作用液压致动器，可滑动地接合在孔内的活塞和安装到活塞的输出杆。 活塞在第二双作用液压致动器的孔内的最大平移提供了体积位移V2，其中V2 = V1。 第一和第二双重作用液压缸中的每一个中的一对流体端口通过流体管道可操作地连接，其中一个流体端口包括可用于控制输出杆的速度或将输出杆锁定的阀电路 通过调节双作用气缸之间的液压流体的流动而产生静态位置。

    Pneumatic actuator with hydraulic control
    87.
    发明授权
    Pneumatic actuator with hydraulic control 失效
    带液压控制的气动执行机构

    公开(公告)号：US5058385A

    公开(公告)日：1991-10-22

    申请号：US456023

    申请日：1989-12-22

    Applicant: Hobart R. Everett, Jr.

    Inventor： Hobart R. Everett, Jr.

    IPC: F15B11/076

    CPC classification number: F15B11/076 ,  F15B2211/455 ,  F15B2211/46 ,  F15B2211/7056 ,  F15B2211/7128 ,  F15B2211/72 ,  F15B2211/75

    Abstract: The present invention provides a pneumatically powered actuator having hydraulic control for both locking and controlling the velocity of an output rod without any sponginess. The invention includes a double-acting pneumatic actuator having a bore, a piston slidably engaged within the bore, and a control rod connected to the piston. The double-acting pneumatic actuator is mounted to a frame. A first double-acting hydraulic actuator having a bore, a piston slidably engaged within the bore,and a follower rod mounted to the piston is mounted to the frame such that the follower rod is fixedly connected to the control rod. The maximum translation of the piston within the bore of the first double-acting hydraulic actuator provides a volumetric displacement V.sub.1. The present invention also includes a second double-acting hydraulic actuator having a bore, a piston slidably engaged within the bore, and an output rod mounted to the piston. The maximum translation of the piston within the bore of the second double-acting hydraulic actuator provides a volumetric displacement V.sub.2, where V.sub.2 =V.sub.1. A pair of fluid ports in each of the first and second double-acting hydraulic cylinders are operably connected by fluid conduits, one of which includes a valve circuit which may be used to control the velocity of the output rod or to lock the output rod in a static position by regulating the flow of hydraulic fluid between the double-acting cylinders.

    Abstract translation: 本发明提供一种具有液压控制的气动致动器，用于锁定和控制输出杆的速度，而没有任何海绵状。 本发明包括具有孔的双作用气动致动器，可滑动地接合在孔内的活塞和连接到活塞的控制杆。 双作用气动执行器安装在框架上。 具有孔的第一双作用液压致动器，可滑动地接合在孔内的活塞和安装到活塞的从动杆安装到框架上，使得从动杆固定地连接到控制杆。 活塞在第一双作用液压致动器的孔内的最大平移提供了体积位移V1。 本发明还包括具有孔的第二双作用液压致动器，可滑动地接合在孔内的活塞和安装到活塞的输出杆。 活塞在第二双作用液压致动器的孔内的最大平移提供了体积位移V2，其中V2 = V1。 第一和第二双重作用液压缸中的每一个中的一对流体端口通过流体管道可操作地连接，其中一个流体端口包括可用于控制输出杆的速度或将输出杆锁定的阀电路 通过调节双作用气缸之间的液压流体的流动而产生静态位置。

    Pneumatic cylinder assemblies
    88.
    发明授权
    Pneumatic cylinder assemblies 失效
    气动缸组件

    公开(公告)号：US4276813A

    公开(公告)日：1981-07-07

    申请号：US915515

    申请日：1978-06-14

    Applicant: Henry W. Weyman

    Inventor： Henry W. Weyman

    IPC: F15B11/076 ,  F15B15/22

    CPC classification number: F15B11/076 ,  F15B2211/40515 ,  F15B2211/40553 ,  F15B2211/41536 ,  F15B2211/7055 ,  F15B2211/8855

    Abstract: The present invention provides a method and apparatus for controlling the rate of flow of fluid in a high (e.g. 100 kg/sq cm) pressure hydraulic circuit such as is found in pneumatic piston and cylinder arrangements having hydraulic damping and which may be used to control the feed rate of a cutting tool. Control is achieved by incorporating into the fluid circuit, upstream of the flow control orifice, a pressure reducing valve designed to provide a controlled low (e.g. 7 kg/sq cm) pressure independently of changes in applied pressure or demanded flow rates and which further automatically clears itself of any silt deposited thereon from the hydraulic fluid.

    Abstract translation: 本发明提供了一种用于控制高（例如100kg / sqcm）压力液压回路中流体流速的方法和装置，例如在具有液压阻尼的气动活塞和气缸装置中发现的，并且可用于控制 切削刀具的进给速度。 通过在流量控制孔的上游结合到流体回路中来实现控制，减压阀被设计成独立于所施加的压力或所需流量的变化提供受控的低（例如7kg / cm 2）的压力，并进一步自动地 从液压流体中清除沉积在其上的任何淤泥。

    Hydraulic brake mechanism for an air cylinder
    89.
    发明授权
    Hydraulic brake mechanism for an air cylinder 失效
    气缸液压制动机构

    公开(公告)号：US3929057A

    公开(公告)日：1975-12-30

    申请号：US42784773

    申请日：1973-12-26

    Applicant: KONDO MFG

    Inventor： KONDO SHIGEJI

    IPC: E21B1/30 ,  F15B11/076 ,  F15B11/04

    CPC classification number: F15B11/076 ,  F15B2211/212 ,  F15B2211/40507 ,  F15B2211/40515 ,  F15B2211/411 ,  F15B2211/41536 ,  F15B2211/426 ,  F15B2211/625 ,  F15B2211/75 ,  F15B2211/8855

    Abstract: For retarding the motion of a piston traveling on its forward stroke in an air cylinder, a hydraulic cylinder having shorter piston stroke than that of the air cylinder is mounted on its rear side in axial alignment therewith. The piston rod of the hydraulic cylinder projects into the air cylinder to be telescopically received in an axial bore formed through the rear end portion of the air cylinder piston rod. Hence, as the air cylinder piston travels forwardly in the usual manner to a predetermined point intermediate both extremities of its stroke, a larger diameter portion on the front end of the hydraulic cylinder piston rod engages the air cylinder piston at the rear end of the aforesaid axial bore. The forward motion of the air cylinder piston is thereafter retarded by the hydraulic cylinder piston also traveling forwardly against the resistance offered by hydraulic fluid in the intercommunicated chambers of the hydraulic cylinder. The passageway intercommunicating the hydraulic fluid chambers can be closed by a solenoid-operated shut-off valve whereby the air cylinder piston traveling forwardly at reduced speed as above can be stopped whenever required.

    Abstract translation: 为了减缓在气缸中向前行程行进的活塞的运动，其活塞行程比气缸短的液压缸安装在其与其轴向对准的后侧。 液压缸的活塞杆突出到气缸中以可伸缩地容纳在通过气缸活塞杆的后端部分形成的轴向孔中。 因此，当气缸活塞以通常的方式向前行进到行程两端的预定点时，液压缸活塞杆的前端上的较大直径的部分与前述的后端的气缸活塞接合 轴向孔。 气缸活塞的向前运动此后由液压缸活塞延迟，还相对于液压缸的相互连通的腔室中的液压流体提供的阻力向前运动。 通过相互连通的液压流体室的通道可以通过一个电磁操作的截止阀来关闭，从而如果需要，可以停止如上所述以减速的方式向前行进的气缸活塞。

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