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    Laser sustained plasma bulb including water
    83.
    发明授权
    Laser sustained plasma bulb including water 有权
    激光持续等离子体灯泡包括水

    公开(公告)号：US08796652B2

    公开(公告)日：2014-08-05

    申请号：US13790084

    申请日：2013-03-08

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

    IPC: H05G2/00

    CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

    Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

    Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

    INDUCTION RF FLUORESCENT LIGHT BULB WITH SYNCHRONIZED BURST-MODE DIMMING
    84.
    发明申请
    INDUCTION RF FLUORESCENT LIGHT BULB WITH SYNCHRONIZED BURST-MODE DIMMING 审中-公开
    带同步脉冲模式调光的感应射频荧光灯泡

    公开(公告)号：US20140145637A1

    公开(公告)日：2014-05-29

    申请号：US14035744

    申请日：2013-09-24

    Applicant: Lucidity Lights, Inc.

    Inventor： John R. Goscha ,  Victor D. Roberts

    IPC: H01J65/04

    CPC classification number: H01J65/048 ,  H01J5/54 ,  H01J61/28 ,  H01J61/56 ,  H05B41/2806 ,  Y02B20/22

    Abstract: A dimmable induction RF fluorescent lamp comprising a burst-mode dimming facility that periodically interrupts the high frequency voltage and current to a power coupler in order to reduce the power being delivered to the power coupler, where the periodic interruptions are synchronized with the operating frequency of the electronic ballast.

    Abstract translation: 一种可调光感应RF荧光灯，其包括突发模式调光设备，其周期性地中断向功率耦合器的高频电压和电流，以便降低传递到功率耦合器的功率，其中周期性中断与运行频率同步 电子镇流器。

    INDUCTION RF FLUORESCENT LAMP WITH LOAD CONTROL FOR EXTERNAL DIMMING DEVICE
    85.
    发明申请
    INDUCTION RF FLUORESCENT LAMP WITH LOAD CONTROL FOR EXTERNAL DIMMING DEVICE 有权
    感应射频荧光灯带外部调光装置的负载控制

    公开(公告)号：US20140145619A1

    公开(公告)日：2014-05-29

    申请号：US14035733

    申请日：2013-09-24

    Applicant: Lucidity Lights, Inc.

    Inventor： John R. Goscha ,  Victor D. Roberts ,  Thomas Farkas

    IPC: H01J1/52

    CPC classification number: H01J65/048 ,  H01J5/54 ,  H01J61/28 ,  H01J61/56 ,  H05B41/2806 ,  H05B41/3921 ,  Y02B20/22

    Abstract: An induction RF fluorescent lamp comprising a dimming device load control facility enabling the induction RF fluorescent lamp to provide for electrical loads required for the proper operation of an external control dimming device, the dimming device load control facility controlling a switched electrical load switched in and out of connectivity within the electronic ballast to provide a load for the external dimming device.

    Abstract translation: 一种感应RF荧光灯，包括调光装置负载控制装置，使得感应RF荧光灯能够提供用于外部控制调光装置的正常操作所需的电负载，调光装置负载控制装置控制切换的电负载切换和断开 在电子镇流器内连接，为外部调光装置提供负载。

    Laser Sustained Plasma Bulb Including Water
    88.
    发明申请
    Laser Sustained Plasma Bulb Including Water 有权
    激光持续等离子体灯泡包括水

    公开(公告)号：US20140042336A1

    公开(公告)日：2014-02-13

    申请号：US13790084

    申请日：2013-03-08

    Applicant: KLA-TENCOR CORPORATION

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

    IPC: H01J61/02

    CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

    Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

    Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

    AMALGAM HEATER FOR FLUORESCENT LAMPS
    89.
    发明申请
    AMALGAM HEATER FOR FLUORESCENT LAMPS 有权
    用于荧光灯的AMALGAM加热器

    公开(公告)号：US20130127342A1

    公开(公告)日：2013-05-23

    申请号：US13303536

    申请日：2011-11-23

    Applicant: Peter Lucz ,  Gabor Szabo ,  Balazs Torok ,  Miklos Budai ,  Titusz Talalt ,  Jacint Gergely ,  Gabor Schmidt

    Inventor： Peter Lucz ,  Gabor Szabo ,  Balazs Torok ,  Miklos Budai ,  Titusz Talalt ,  Jacint Gergely ,  Gabor Schmidt

    IPC: H01J61/52

    CPC classification number: H05B41/295 ,  H01J61/26 ,  H01J61/28 ,  H01J61/523 ,  H01J61/56

    Abstract: A fluorescent lighting device includes an arc tube, an exhaust tube extending from the arc tube, and an amalgam. A resistive heater is located adjacent to at least one of the arc tube and the exhaust tube. A power supply circuit is operatively coupled with the resistive heater. When the fluorescent lighting device is switched from an OFF state to an ON state, the power supply circuit temporarily energizes the resistive heater, thereby heating the at least one of the arc tube and the exhaust tube while the resistive heater is energized, and automatically de-energizing the resistive heater after said heating.

    Abstract translation: 荧光照明装置包括电弧管，从电弧管延伸的排气管和汞齐。 电阻加热器位于与电弧管和排气管中的至少一个相邻的位置。 电源电路与电阻加热器可操作地耦合。 当荧光照明装置从OFF状态切换到ON状态时，电源电路暂时对电阻加热器通电，从而在电阻加热器通电期间加热电弧管和排气管中的至少一个，并且自动de 在加热后给电阻加热器通电。

    LAMP PART FIXING BY SHAPE MEMORY ALLOY IN THE DISCHARGE TUBE OF FLUORESCENT LAMPS
    90.
    发明申请
    LAMP PART FIXING BY SHAPE MEMORY ALLOY IN THE DISCHARGE TUBE OF FLUORESCENT LAMPS 失效
    灯泡部件通过形状记忆合金固定在荧光灯管中

    公开(公告)号：US20130119855A1

    公开(公告)日：2013-05-16

    申请号：US13297816

    申请日：2011-11-16

    Applicant: Peter Ivan Poczik ,  Peter Mora ,  Peter Lucz ,  Balazs Torok

    Inventor： Peter Ivan Poczik ,  Peter Mora ,  Peter Lucz ,  Balazs Torok

    IPC: H01J61/42 ,  H01J9/24 ,  H01J5/48

    CPC classification number: H01J7/186 ,  H01J61/26 ,  H01J61/28 ,  H01J61/327 ,  H01J61/72

    Abstract: The present disclosure relates to a lamp part fixing device and method for lamp components made of shape memory alloy. The device includes a main body that carries, for example, a main or auxiliary amalgam, getter, etc. located at a desired position within a discharge tube of a fluorescent lamp. For example, the amalgam can be advantageously located at preselected axial locations and/or within a diffusion path. The main body is configurable between a first configuration and a second configuration. The first configuration allows the mount to move within the discharge tube when the shape memory alloy is below an alloy transition temperature. The second configuration of the main body allows for controlled placement and immobilization of the device within the discharge tube when the shape memory alloy is raised above the alloy transition temperature. The device is shaped in a generally planar or non-planar configuration.

    Abstract translation: 本发明涉及由形状记忆合金制成的灯部件的灯部件固定装置和方法。 该装置包括主体，其承载例如位于荧光灯的放电管内的期望位置处的主要或辅助汞齐，吸气剂等。 例如，汞齐可以有利地位于预选的轴向位置和/或扩散路径内。 主体可配置在第一配置和第二配置之间。 当形状记忆合金低于合金转变温度时，第一种配置允许安装件在放电管内移动。 当形状记忆合金升高到合金转变温度以上时，主体的第二构造允许装置在放电管内的受控放置和固定。 该装置成形为大致平面或非平面构型。

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