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公开(公告)号:US11512958B2
公开(公告)日:2022-11-29
申请号:US16649474
申请日:2018-09-18
发明人: Ryohei Uchino , Takashi Ikeda
IPC分类号: G01C19/5684 , B81B3/00 , G01C19/5719 , H01L29/84 , G01C19/5677
摘要: An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.
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公开(公告)号:US11415417B2
公开(公告)日:2022-08-16
申请号:US17272944
申请日:2020-09-25
发明人: Yu Liu , Yongle Lu , Huihui Yang , Ke Di , Xinhai Zou , Zhen Fang , Jijun Bu , Yong Yang , Lele Fu
IPC分类号: G01C19/5684 , G01C19/5733
摘要: A cavity optomechanical vibratory gyroscope pertains to technical fields of resonant optical gyroscopes and micro-optical-electro-mechanical systems. A novel cavity optomechnical Coriolis vibratory micro gyroscope is realized based on ring micro rings and the Coriolis vibration principle, and driving and detection thereof is completely different from conventional electric or magnetic means. Based on the principle of angular velocity sensitive structures in the conventional Coriolis vibratory gyroscopes, full-optical driving, detecting and sensing of a vibratory gyroscope are achieved using cavity optomechnical technologies, which fundamentally suppresses various noises (including thermal noise, cross interference, connection point noise and quadrature error) introduced by electric or magnetic driving. Besides, displacement (vibration) sensing information is obtained according to a linear relationship between frequency shift and light amplitude in the micro cavity optomechnical effect.
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公开(公告)号:US11280610B2
公开(公告)日:2022-03-22
申请号:US16577095
申请日:2019-09-20
发明人: Heikki Kuisma
IPC分类号: G01C19/5733 , B81B3/00 , G01C19/5684 , G01C19/5698 , G01C19/574 , G01C19/5712
摘要: The disclosure describes a z-axis gyroscope where a proof mass is suspended from a peripheral suspender and a central suspender. The peripheral suspender forms a truncated triangle around the proof mass, and the central suspender extends through the truncated corner of the triangle formed by the peripheral suspender. The proof mass is driven into a primary oscillation mode by one or more piezoelectric drive transducers located on the peripheral suspender. One or more piezoelectric sense transducers located on the base of the peripheral suspender are configured to detect the secondary oscillation mode of the proof mass.
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公开(公告)号:US20220057211A1
公开(公告)日:2022-02-24
申请号:US17415340
申请日:2020-02-04
发明人: Koichiro NAKASHIMA , Takashi UCHIDA , Yusuke NAKAMURA , Hideki UEDA , Naruhito NODA , Toshitsugu KONISHI , Toshio YAMAZAKI
IPC分类号: G01C19/5783 , G01C19/5684 , B81B7/00
摘要: A sensor device includes a sensor element, a substrate, and a bonding wire. Over the substrate, provided is the sensor element. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the substrate together. The bonding wire is provided to connect two connection surfaces that intersect with each other.
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公开(公告)号:US11248910B2
公开(公告)日:2022-02-15
申请号:US16713427
申请日:2019-12-13
IPC分类号: G01C19/5776 , G01C19/5684 , H03D3/00
摘要: A method of demodulating a MEMS sensor pickoff signal from a vibrating resonator of said sensor, the method comprising: sampling the pickoff signal with an asynchronous ADC at a sampling rate of at least 50 times the resonant frequency of the resonator to generate a stream of samples; generating a first value by combining samples from said stream of samples according to a selected operation, said operation being selected in dependence on a synchronous clock signal that is synchronous to the resonant frequency of the resonator, said synchronous clock signal having a frequency at least twice the resonant frequency of the resonator; and counting the number of samples contributing to the first value. The increased sampling rate of the pickoff signal allows a much higher number of samples to be taken into account, thereby reducing noise. However, the ADC asynchronously from the resonator of the MEMS sensor.
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公开(公告)号:US20210247186A1
公开(公告)日:2021-08-12
申请号:US17053555
申请日:2019-05-02
发明人: Heikki KUISMA
IPC分类号: G01C19/5684 , B81B3/00
摘要: A ring gyroscope which comprises a substantially circular and flexible ring suspended from a substrate. The gyroscope comprises one or more primary piezoelectric split transducers placed on first sectors of the ring and one or more secondary piezoelectric split transducers placed on one or more second sectors of the ring. Each first sector crosses a transversal symmetry axis (T1, T2) of the ring and is symmetric with respect to that symmetry axis, and each second sector crosses a diagonal symmetry axis (D1, D2) of the ring and is symmetric with respect to that symmetry axis.
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公开(公告)号:US10982530B2
公开(公告)日:2021-04-20
申请号:US15089586
申请日:2016-04-03
发明人: Juei Igarashi , Sogo Kuroiwa , Shigeru Sato , Akira Kamiya
IPC分类号: E21B47/024 , G01C19/5684 , E21B7/04 , E21B47/092 , E21B47/12
摘要: A gyroscope package, system and method for use in a downhole tool suitable are provided. The gyroscope package, system and method includes a housing coupleable with a downhole tool, a gyroscope body within the housing, and an inductive-type MEMS gyroscope. The MEMS gyroscope includes a magnetic shield disposed around the inductive-type MEMS gyroscope to magnetically shield the inductive-type MEMS gyroscope.
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公开(公告)号:US10746548B2
公开(公告)日:2020-08-18
申请号:US14532256
申请日:2014-11-04
申请人: Analog Devices, Inc.
IPC分类号: G01C19/5677 , G01C19/5684 , G01C19/567
摘要: Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.
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公开(公告)号:US20200256676A1
公开(公告)日:2020-08-13
申请号:US16847248
申请日:2020-04-13
发明人: Lian X. HUANG , Logan SORENSON , Raviv PERAHIA , Hung NGUYEN , David T. CHANG
IPC分类号: G01C19/5712 , G01C19/5677 , G01C19/5684
摘要: A resonator includes an anchor, an outer stiffener ring on an outer perimeter of the resonator, and a plurality of curved springs between the anchor and the outer stiffener ring.
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公开(公告)号:US20200018599A1
公开(公告)日:2020-01-16
申请号:US16553785
申请日:2019-08-28
IPC分类号: G01C19/5684
摘要: A resonator paradigm, where the resonator structure is made up of a very large number of small, coupled Coriolis sensitive units arranged in a periodic 1D or 2D (and, possibly, in the future, 3D) structure to create a Coriolis-sensitive “fabric” that supports a large number of Coriolis-coupled “supermodes. Such a “fabric” can be shaped into arbitrary “waveguides” that propagate either pulses of excitation that are Coriolis-coupled, thus enabling an acoustic version of a FOG-type gyroscope (where a pulse of excitation travels along a passive waveguide and it's phase/time delay is measured), or support multiple “stationary” Coriolis-coupled vibration modes analogous to optical laser modes in an RLG where counter-propagating modes of oscillation are maintained at constant amplitude via a continuous addition of energy.
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