METHOD AND STRUCTURE FOR CHARACTERISING AN ATOMIC FORCE MICROSCOPY TIP
    5.
    发明申请
    METHOD AND STRUCTURE FOR CHARACTERISING AN ATOMIC FORCE MICROSCOPY TIP 有权
    表征原子力显微镜提示的方法和结构

    公开(公告)号:US20110093990A1

    公开(公告)日:2011-04-21

    申请号:US12906801

    申请日:2010-10-18

    IPC分类号: G01Q60/24

    CPC分类号: G01Q40/00 G01Q40/02

    摘要: A method for characterising an atomic force microscopy tip using a characterisation structure having two inclined sidewalls opposite one another and of which at least one actual lateral distance separating the two inclined sidewalls corresponding to a given height is known, the method including scanning the surfaces of the inclined sidewalls by the tip, the scanning being carried out while the tip oscillates solely vertically; measuring, for the given height, the lateral distance separating the two inclined sidewalls, the measurement incorporating the convolution of the shape of the tip with the shape of the characterisation structure; and determining a characteristic dimension of the tip as a function of the measured lateral distance, and of the actual lateral distance.

    摘要翻译: 使用具有两个彼此相对的倾斜侧壁的表征结构来表征原子力显微镜尖端的方法,其中分离与给定高度相对应的两个倾斜侧壁的至少一个实际横向距离是已知的,该方法包括扫描 倾斜的侧壁由尖端,当尖端完全垂直摆动时进行扫描; 测量给定的高度,分离两个倾斜的侧壁的横向距离,该测量结合尖端的形状与表征结构的形状的卷积; 以及根据所测量的横向距离和实际横向距离来确定尖端的特征尺寸。