公开(公告)号：US20060056597A1

公开(公告)日：2006-03-16

申请号：US10522496

申请日：2003-07-28

申请人： Adolf Inneman ,  Ladislav Pina ,  David Bowen ,  Rene Hudec ,  Stephan Menzer

发明人： Adolf Inneman ,  Ladislav Pina ,  David Bowen ,  Rene Hudec ,  Stephan Menzer

IPC分类号： G21K1/00

CPC分类号： G21K1/06 ,  B82Y10/00 ,  G03F7/70075 ,  G03F7/70166 ,  G03F7/702

摘要： A pipe coupling flange (16) comprising a central bore and having first and second ports for receiving valves and a plurality of channels, wherein a take-off channel links the first port with the central bore, a feed channel links the first port directly or indirectly with the second port; and wherein the second port links directly or indirectly with the exterior of the flange. Across two pipe flanges (16), and fixed directly to the periphery of each flange there may be a Bridge (30). The bridge (30) may be capable of having process media (24) monitoring devices fixed directly to it.

摘要翻译： 一种管接头法兰（16），其包括中心孔并具有用于接收阀和多个通道的第一和第二端口，其中，引出通道将第一端口与中心孔连接，进料通道将第一端口直接连接或 间接与第二个港口; 并且其中所述第二端口直接或间接地连接到所述凸缘的外部。 横跨两个管道法兰（16），并直接固定在每个法兰的周边，可能有一个桥（30）。 桥（30）可能能够具有直接固定到其上的监控装置的处理介质（24）。

公开(公告)号：US06881965B2

公开(公告)日：2005-04-19

申请号：US10627863

申请日：2003-07-28

申请人： David Keith Bowen ,  Ladislav Pina ,  Adolf Inneman ,  Rene Hudec ,  Stephan Menzer

发明人： David Keith Bowen ,  Ladislav Pina ,  Adolf Inneman ,  Rene Hudec ,  Stephan Menzer

IPC分类号： G21K1/06 ,  G03F7/20 ,  G21K1/02 ,  G21K5/02 ,  H01L21/027 ,  G21K5/04

CPC分类号： G21K1/06 ,  B82Y10/00 ,  G03F7/70075 ,  G03F7/70166 ,  G03F7/702

摘要： The invention provides a miniaturized multi-foil object for use in a laboratory environment and other practical applications that require small or portable and/or disposable high energy radiation optics. Specifically, the invention finds utility in high energy lithographic systems, such as X-ray or EUV lithography, as a condenser optic or in topographic systems. In lithographic systems, the present invention exhibits square symmetry, a relatively large aperture size, and disposability. Additionally, the multi-foil optic of the invention provides a high throughput efficiency.

摘要翻译： 本发明提供了一种在实验室环境中使用的小型化多箔物体和需要小型或便携式和/或一次性高能辐射光学器件的其它实际应用。 具体地说，本发明可用于诸如X射线或EUV光刻的高能光刻系统中，作为聚光镜或地形系统。 在平版印刷系统中，本发明具有方形对称性，相对较大的孔径尺寸和可处理性。 另外，本发明的多箔光学器件提供高通量效率。

公开(公告)号：US5893549A

公开(公告)日：1999-04-13

申请号：US754195

申请日：1996-11-27

申请人： Ladislav Pina ,  Adolf Inneman ,  Ulrich Wolfgang Arndt ,  David Keith Bowen

发明人： Ladislav Pina ,  Adolf Inneman ,  Ulrich Wolfgang Arndt ,  David Keith Bowen

IPC分类号： G02B7/182 ,  G21K5/08 ,  G02B5/30

CPC分类号： G21K5/08 ,  G02B7/182 ,  G21K2201/067

摘要： Mirror support means having a metal block machined with a first pair of slots shaped to receive a first pair of curved mirrors and a second pair of slots shaped to receive a second pair of curved mirrors. The block is sufficiently resiliently deformable to enable the slots to be widened to receive the mirrors and then for the mirrors to be clamped in position, the slots being accurately machined so that the mirrors are bent into their required forms of curvature. The use of a unitary block simplifies the construction and setting up of the support means for the mirrors.

摘要翻译： 镜支撑装置具有加工有第一对槽的金属块，该第一对槽成形为接收第一对曲面镜和成形为接收第二对曲面镜的第二对槽。 该块具有足够的可弹性变形以使狭槽能够加宽以接收反射镜，然后为了使镜子被夹紧就位，槽被精确加工，使得镜子被弯曲成其所需的曲率形式。 使用单一块可简化镜子支撑装置的结构和设置。

公开(公告)号：US07127037B2

公开(公告)日：2006-10-24

申请号：US10626630

申请日：2003-07-25

申请人： David Keith Bowen ,  Ladislav Pina ,  Adolf Inneman ,  Stephan Menzer

发明人： David Keith Bowen ,  Ladislav Pina ,  Adolf Inneman ,  Stephan Menzer

IPC分类号： G21K1/02 ,  G01N23/20

CPC分类号： G21K1/025

摘要： A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple, parallel blades of low-density material, such as glass, mica, or the like, which can be treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.

摘要翻译： 提供了Soller狭缝装置，用于准直诸如X射线或EUV辐射的高能量辐射，并且具有低的发散角（小于0.1°）和高的透射效率（60-80％或更大）。 索勒狭缝由多个平行的低密度材料叶片组成，例如玻璃，云母等，可被处理以降低反射率。 本发明的Soller狭缝装置有利地提供了在高能量衍射应用（例如X射线衍射）中产生的衍射图中增加的峰强度和降低的峰宽。

公开(公告)号：US20050281382A1

公开(公告)日：2005-12-22

申请号：US10522495

申请日：2003-07-28

申请人： Adolf Inneman ,  Ladislav Pina ,  David Bowen

发明人： Adolf Inneman ,  Ladislav Pina ,  David Bowen

IPC分类号： G01N23/20 ,  G21K1/02

CPC分类号： G21K1/025

摘要： A Soller slit device is provided for collimation of high energy radiation, such as X-ray or EUV radiation, and has a low angle of divergence (less than 0.1°) and a high transmission efficiency (60 to 80% or greater). The Soller slit is made up of multiple blades of low-density material, such as glass, mica, or the like, which are treated to reduce reflectivity. The Soller slit device of the invention advantageously provides an increased peak intensity and decreased peak width in diffraction patterns produced in high energy diffractometry applications, such as X-ray diffractometry.

摘要翻译： 提供了Soller狭缝装置，用于准直诸如X射线或EUV辐射的高能量辐射，并且具有低的发散角（小于0.1°）和高的透射效率（60-80％或更大）。 Soller狭缝由多个低密度材料叶片组成，例如玻璃，云母等，经过处理以降低反射率。 本发明的Soller狭缝装置有利地提供了在高能量衍射应用（例如X射线衍射）中产生的衍射图中增加的峰强度和降低的峰宽。