公开(公告)号：US20080290968A1

公开(公告)日：2008-11-27

申请号：US12190620

申请日：2008-08-13

申请人： Daisuke YAMAMOTO ,  Hajime KANDO ,  Akihiro TERAMOTO ,  Toshiyuki FUYUTSUME ,  Masahiko SAEKI

发明人： Daisuke YAMAMOTO ,  Hajime KANDO ,  Akihiro TERAMOTO ,  Toshiyuki FUYUTSUME ,  Masahiko SAEKI

IPC分类号： H03H9/00 ,  B23K28/00

CPC分类号： H03H9/0222 ,  H03H9/14541 ,  Y10T29/42

摘要： A boundary acoustic wave device includes a first medium, a second medium, and an IDT electrode disposed at an interface between the first medium and the second medium, the IDT electrode having an Au layer defining a main electrode layer, wherein a Ni layer is laminated so as to contact at least one surface of the Au layer, and a portion of Ni defining the Ni layer is diffused from the Ni layer side surface of the Au layer toward the inside of the Au layer.

摘要翻译： 弹性边界波装置包括第一介质，第二介质和布置在第一介质和第二介质之间的界面处的IDT电极，所述IDT电极具有限定主电极层的Au层，其中Ni层被层压 以接触Au层的至少一个表面，并且限定Ni层的Ni的一部分从Au层的Ni层侧表面朝向Au层的内部扩散。

公开(公告)号：USD666979S1

公开(公告)日：2012-09-11

申请号：US29393934

申请日：2011-06-10

申请人： Akihiro Teramoto ,  Norifumi Sato

设计人： Akihiro Teramoto ,  Norifumi Sato

公开(公告)号：US08043039B2

公开(公告)日：2011-10-25

申请号：US12207809

申请日：2008-09-10

申请人： Yuichi Yamamoto ,  Akihiro Teramoto ,  Wataru Tsukinoki

发明人： Yuichi Yamamoto ,  Akihiro Teramoto ,  Wataru Tsukinoki

IPC分类号： H01L21/677

CPC分类号： H01L21/67766 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.

摘要翻译： 公开了一种基板处理装置。 所述基板处理装置包括：盒装载部，当将所述盒搬运到所述基板处理装置的外部时，装载用于容纳基板的盒; 用于对所述基板进行处理的基板处理部; 用于将装载在所述盒装载部分上的所述盒中的所述基板运送到所述基板处理部分的基板承载部分，以及将已经被所述基板处理部分处理的所述基板运送到所述盒装载部分上的所述盒; 临时装载通过将基板运送到基板处理部而使盒空置的空置盒装载部; 以及用于在空的盒装载部分和盒装载部分之间传送空盒的空的盒传送机构。

公开(公告)号：US07554428B2

公开(公告)日：2009-06-30

申请号：US12190620

申请日：2008-08-13

申请人： Daisuke Yamamoto ,  Hajime Kando ,  Akihiro Teramoto ,  Toshiyuki Fuyutsume ,  Masahiko Saeki

发明人： Daisuke Yamamoto ,  Hajime Kando ,  Akihiro Teramoto ,  Toshiyuki Fuyutsume ,  Masahiko Saeki

IPC分类号： H03H9/145 ,  H03H9/25 ,  H03H3/08 ,  H01L41/047 ,  H01L41/18 ,  H01L41/22

CPC分类号： H03H9/0222 ,  H03H9/14541 ,  Y10T29/42

摘要： A boundary acoustic wave device includes a first medium, a second medium, and an IDT electrode disposed at an interface between the first medium and the second medium, the IDT electrode having an Au layer defining a main electrode layer, wherein a Ni layer is laminated so as to contact at least one surface of the Au layer, and a portion of Ni defining the Ni layer is diffused from the Ni layer side surface of the Au layer toward the inside of the Au layer.

摘要翻译： 弹性边界波装置包括第一介质，第二介质和布置在第一介质和第二介质之间的界面处的IDT电极，所述IDT电极具有限定主电极层的Au层，其中Ni层被层压 以接触Au层的至少一个表面，并且限定Ni层的Ni的一部分从Au层的Ni层侧表面朝向Au层的内部扩散。

公开(公告)号：US20090081009A1

公开(公告)日：2009-03-26

申请号：US12207809

申请日：2008-09-10

申请人： Yuichi Yamamoto ,  Akihiro Teramoto ,  Wataru Tsukinoki

发明人： Yuichi Yamamoto ,  Akihiro Teramoto ,  Wataru Tsukinoki

IPC分类号： H01L21/677

CPC分类号： H01L21/67766 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.

摘要翻译： 公开了一种基板处理装置。 所述基板处理装置包括：盒装载部，当将所述盒搬运到所述基板处理装置的外部时，装载用于容纳基板的盒; 用于对所述基板进行处理的基板处理部; 用于将装载在所述盒装载部分上的所述盒中的所述基板运送到所述基板处理部分的基板承载部分，以及将已经被所述基板处理部分处理的所述基板运送到所述盒装载部分上的所述盒; 临时装载通过将基板运送到基板处理部而使盒空置的空置盒装载部; 以及用于在空的盒装载部分和盒装载部分之间传送空盒的空的盒传送机构。