Optical waveguide coupler and method for producing same
    2.
    发明授权
    Optical waveguide coupler and method for producing same 有权
    光波导耦合器及其制造方法

    公开(公告)号:US06501885B2

    公开(公告)日:2002-12-31

    申请号:US09757914

    申请日:2001-01-10

    IPC分类号: G02B626

    CPC分类号: G02B6/4249 G02B6/125

    摘要: The optical waveguide coupler comprises a structure (1) of a number of elongated narrow optical waveguide strips (2), which consist respectively of a front area (3), a center area (4) and a coupling area (5). The center area (4) has respective transition areas (6) and (7) to the corresponding area (3) or (5). A gap (9) in the front areas (3) provided between two adjoining strips (2) is larger than the thickness of the narrow strips (2). The front faces (8) of the front areas (3), and the front faces of the coupling areas (5) are embodied to be as smooth as possible, wherein all strips form a stack in the coupling area (5). The gaps are pits which result from etching of an Si substrate with the aid of a DRIE etching process.

    摘要翻译: 光波导耦合器包括分别由前区域(3),中心区域(4)和耦合区域(5)组成的多个细长窄光波导条(2)的结构(1)。 中心区域(4)具有到相应区域(3)或(5)的各自的过渡区域(6)和(7)。 设置在两个邻接条(2)之间的前区域(3)中的间隙(9)大于窄条(2)的厚度。 前区域(3)的前表面(8)和联接区域(5)的前表面被实施为尽可能平滑,其中所有条带在耦合区域(5)中形成堆叠。 间隙是借助于DRIE蚀刻工艺蚀刻Si衬底产生的凹坑。

    Use of a cleaning process, a cleaning process, a connection process and a workpiece pair
    4.
    发明授权
    Use of a cleaning process, a cleaning process, a connection process and a workpiece pair 失效
    使用清洁过程,清洁过程,连接过程和工件对

    公开(公告)号:US06503351B2

    公开(公告)日:2003-01-07

    申请号:US09729176

    申请日:2000-12-05

    IPC分类号: B32B3116

    摘要: A method uses a treatment process for surfaces which subsequently are to be connected by bonding, gluing or molding. The surfaces are exposed to an atmosphere with activated hydrogen. The connection is made a process step for eliminating the conservation treatment. The surfaces can be subjected to a plasma discharge in an atmosphere containing hydrogen. The plasma discharge is operated by a cathode/anode path as a DC discharge, and using a thermionic cathode as the cathode. The workpiece to be stored in air comprises a connection, which by gluing, bonding or molding, is subjectable to substantially higher stress than an identical workpiece which is stored in an identical manner, this being determinable by essentially identical Auger diagrams.

    摘要翻译: 一种方法使用用于通过粘合,胶合或模制连接的表面的处理工艺。 表面暴露于活性氢气氛中。 该连接是消除保护处理的过程步骤。 表面可以在含氢的气氛中进行等离子体放电。 等离子体放电由作为直流放电的阴极/阳极路径操作,并且使用热离子阴极作为阴极。 待储存在空气中的工件包括通过胶合,粘合或模制而形成的连接件,其能够以相同方式存储的相同的工件受到比相同工件大得多的应力,这可通过基本上相同的俄歇图来确定。