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    Method and Arrangement for the Adjustment of Characteristics of a Beam Bundle of High-Energy Radiation Emitted from a Plasma
    2.
    发明申请
    Method and Arrangement for the Adjustment of Characteristics of a Beam Bundle of High-Energy Radiation Emitted from a Plasma 有权
    用于调整等离子体发射的高能量辐射束束特性的方法和装置

    公开(公告)号：US20120248327A1

    公开(公告)日：2012-10-04

    申请号：US13436923

    申请日：2012-03-31

    申请人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

    发明人： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

    IPC分类号： H01J3/14

    CPC分类号： G03F7/70133 ,  G01J1/4257 ,  G01J1/429 ,  G03F7/70141 ,  G03F7/70166 ,  G03F7/7085 ,  H05G2/001

    摘要： The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.

    摘要翻译： 本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。 为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布 光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是 由不同扇区的强度值的比较确定，用于对准收集器光学器件。