Method of calibrating the optical system of a laser machine for processing electrical circuit substrates
    2.
    发明授权
    Method of calibrating the optical system of a laser machine for processing electrical circuit substrates 失效
    用于校准用于处理电路基板的激光机的光学系统的方法

    公开(公告)号:US06678061B2

    公开(公告)日:2004-01-13

    申请号:US10121731

    申请日:2002-04-15

    IPC分类号: G01B1114

    摘要: To calibrate the optical system of a laser machine having a laser source, a deflecting unit and an imaging unit, firstly a first sample plate is arranged in the focal plane of the imaging unit, with prescribed grid points being marked by the laser beam. After that, the marked points are measured by means of a camera, and their position values are compared with the prescribed position values of the target points, in order to derive first correction values from this and store them. After that, a second sample plate is arranged in a second calibrating plane, at a distance from the focal plane, and is targeted by the laser beam and provided with markings. The second sample plate is measured by the camera, and the measured positions of the markings are compared with the positions of the target points, in order to derive second correction values and store them. From the stored first and second correction values of the two planes, correction values can then be determined by interpolation for arbitrary target points in the spatial region between the focal plane and the second calibrating plane and be used for the activation of the deflecting unit.

    摘要翻译: 为了校准具有激光源,偏转单元和成像单元的激光机的光学系统,首先将第一样品板布置在成像单元的焦平面中,其中规定的网格点由激光束标记。 之后,通过照相机测量标记点,并将它们的位置值与目标点的规定位置值进行比较,以便从中导出第一校正值并存储它们。 之后,将第二样品板设置在与焦平面相距一定距离的第二校准平面中,并由激光束对准并具有标记。 通过相机测量第二样品板,并将标记的测量位置与目标点的位置进行比较,以得到第二校正值并存储它们。 根据所存储的两个平面的第一和第二校正值,可以通过对焦平面和第二校准平面之间的空间区域中的任意目标点的插值来确定校正值,并且用于激活偏转单元。