Replica micro-resonator and method of fabrication
    2.
    发明申请
    Replica micro-resonator and method of fabrication 有权
    复制微型谐振器和制造方法

    公开(公告)号:US20050111776A1

    公开(公告)日:2005-05-26

    申请号:US10953288

    申请日:2004-09-29

    IPC分类号: G02B6/12

    CPC分类号: G02B6/12007 G02B2006/1219

    摘要: Polymer micro-resonators and methods of fabricating the same. A liquid polymer material is applied to a micro-resonator master that includes at least one micro-resonator, such as a disk or toroid micro-resonator. The liquid molding material is cured or set to form a mold that is derived from the master. A replica of the master micro-resonator is cast using the mold, and the replicated micro-toroid resonator(s) are separated from the mold. The polymer micro-resonators can have Q factors up to about 5×106. The mold and replica materials can be a silicone material, such as polydimethylsiloxane.

    摘要翻译: 聚合物微谐振器及其制造方法。 将液体聚合物材料施加到包括至少一个微谐振器的微谐振器母盘,例如盘或环形微谐振器。 液体模制材料被固化或设置成形成从主体衍生的模具。 使用模具铸造主微型谐振器的复制品,并将复制的微环形谐振器与模具分离。 聚合物微谐振器可以具有高达约5×10 6的Q因子。 模具和复制材料可以是硅氧烷材料,例如聚二甲基硅氧烷。